Mu mvugo y’ubuhanga mu by’ubukanishi, "frictionless" ni igitekerezo cy’inyigisho - ikintu kigaragara mu nyandiko zisobanura ibibazo ariko ntikigera kigerwaho mu isi ifatika. Nyamara mu byiciro byo gushyira ibintu neza aho bihindura imiterere ya silikoni mu mashini zitunganya, sisitemu za laser zikora mu buryo butaziguye, ibikoresho byo gucukura PCB byihuta, hamwe na platforme zo kugenzura ingano ya nanometero, ibintu bigenda byegera cyane iki gitekerezo. Bibikora binyuze mu ikoranabuhanga ryitwa air bearing, kandi ubuso bw’aho icyuma gito cy’indege gitemberaho hafi ya hose ni granite ikora neza.
Gusobanukirwa ikoranabuhanga ryo gutwara ibintu mu kirere — fiziki yaryo, ibyo risaba, n'imbogamizi zaryo — ntaho bitaniye no gusobanukirwa impamvu granite ari yo ikoreshwa cyane mu gutwara ibintu mu kirere. Ikoranabuhanga ribiri ni iry'ubufatanye: ibyuma byo gutwara ibintu mu kirere bituma granite ikoresha neza ubuso bwayo, naho granite ituma ibyuma byo gutwara ibintu mu kirere bigerwaho neza kandi bigashyirwa mu mwanya wabyo, bigatuma biba byiza kubikoresha mbere na mbere.
Fiziki y'imikorere y'ikirere
Ibyuma bisanzwe byo gukurura ibintu — umupira wo gukurura cyangwa umupira wo gukurura — bishyigikira umutwaro wimuka unyuze mu gukurura kwa Hertzian: imipira cyangwa umupira wo gukurura bikandagira ku nzira zo gusiganwa, bigahindura imiterere y’umutwaro buhoro buhoro kandi bigatanga imbaraga binyuze mu gace gato ariko katari ka zeru. Uku gukurura bitera gukururana, bigatera kwangirika, kandi bigatera inzira ya mekanike ishobora koherezwa kuva kuri umupira ujya ku nyubako ishyigikiwe.
Umuyoboro w'umwuka usimbura uwo muyoboro ukomeye w'umwuka urimo umwuka ushyushye — ubusanzwe umwuka usukuye kandi wumye, nubwo azote ikoreshwa mu bikorwa aho ubushuhe bw'umwuka butera ikibazo. Ikintu kigenda ("slider" cyangwa "gutwara") gitandukanywa n'ubuso bw'umuyobozi n'icyuho gisanzwe gifite ubugari bwa mikorometero 5-15. Umwuka ushyushye utangwa unyuze mu tuzu duto cyangwa ahantu hari imyenge mu maso h'umuyoboro, ukinjira muri icyo cyuho, hanyuma ugasohoka ku nkengero z'agace k'umuyoboro.
Ikwirakwizwa ry'umuvuduko mu cyuho — hejuru hafi y'aho amazi anyura, hasi hafi y'aho asohokera — bitanga imbaraga zo guterura zishyigikira uburemere bw'ikigega (mu buryo butambitse) cyangwa umutwaro ukoreshwa. Uko cyuho kigabanuka (urugero, niba ikigega gihengamye gato munsi y'umutwaro), imbaraga zo kwirinda ziyongera, umuvuduko urazamuka, kandi imbaraga zo kugarura umuvuduko ziyongera — bigatuma habaho uburyo bwo kwihagararaho. Ku rundi ruhande, iyo cyuho cyiyongereye, umuvuduko uragabanuka kandi ubwikorezi bugakomera buhoro.
Ingaruka nyamukuru z'ubu buryo bwo gushyigikira umutwaro udafite aho uhuriye ni ukurandura burundu uburyaryate buhamye n'ubunyerera. Icyiciro cy'umwuka uteguriwe neza gifite ubwinyerera buhamye budashobora gupimwa - mu by'ukuri nta na kimwe kiri mu buryo bwo gupima imbaraga nyinshi. Iyi miterere isobanurwa nk'aho nta "kwifata" - ikintu cyo kunyerera aho ubwinyerera buhamye (buri hejuru ya ubwinyererane bwa kinetic) bugomba kugabanywa kugira ngo hatangwe ingendo, bigatera umuvuduko ubangamira aho umuntu ahagaze nyuma yaho.
Impamvu kugenda kutagira stress ari ingenzi mu gushyiraho neza aho umuntu ahagaze
Mu cyiciro gisanzwe cyo gushyiramo umupira cyangwa screw iyobowe na screw hamwe n'udupira tw'ingufu, guhagarara ni imbogamizi y'ibanze ku buryo bwo gusubiramo aho uhagaze. Iyo sisitemu yo kugenzura aho uhagaze itegeka kugenda gato, uburyo bwo kuyitwara bugomba kubanza gutsinda uburyaryate budahinduka mbere yuko ikamyo igenda na gato. Ibi bivuze ko aho uhagaze n'aho uhagaze nyabyo bitameze kimwe ku ntambwe nto - urwego "rurafata" hanyuma "rukagwa", rurenga aho uhagaze mbere yo kwishyira.
Iyi ngaruka igabanya umupaka ku bunini bw'intambwe n'uburyo bwo gushyiramo imbaraga. Muri sisitemu za servo, uburyo bwo guhagarara butera uruziga rw'imipaka - aho umurongo ugenzura aho uhagaze uhora uzenguruka aho wategetswe, ntushobore kuguma ku gaciro gahamye kuko uburyo ubwo aribwo bwose bwo gukosora busaba gutsinda uburyo bwo guhagarara, hanyuma bugahita burenga intego.
Ibyuma by'umwuka bikuraho burundu guhagarara kw'ikirere. Igare rireremba ku gipfundikizo cy'umwuka gikomeza, kandi imbaraga nke zikoreshwa mu cyerekezo cy'ikirere zitanga umuvuduko uhwanye n'uwo. Ibi bivuze ko:
- Gushyira urwego rwa nanometero mu mwanya wabyo birashoboka hakoreshejwe uburyo bukwiye bwo gutwara (moteri zigororotse, ibyuma bikoresha amashanyarazi, cyangwa ibyuma bikoresha ijwi n'amajwi) nta ntera iri hasi y'ingano y'intambwe ishyirwaho n'ingamba.
- Igihe cyo gukemura ikibazo kiragabanuka cyane kuko umurongo wo kugenzura udaharanira imirwano kuri buri gikorwa
- Gusubiramo bigengwa ahanini n'uburyo bwo gukosora no gupima ubushyuhe aho kuba n'ihindagurika ry'ubushyuhe
Ku bijyanye na photolithography ya semiconductor, aho icyiciro cya wafer kigomba gutera intambwe kuri buri mwanya wa die hamwe no gusubiramo kwa sub-nanometer ku ntambwe amagana ku isegonda, iyi miterere ni ingenzi. Nta rindi koranabuhanga ry’ubwikorezi ritanga imikorere isa nayo ku gipimo gikenewe.
Ubuso bw'ubuyobozi bwa Granite: Gutuma habaho imikorere myiza y'umwuka
Ingufu y'umwuka iba nziza gusa nk'ubuso igenderaho. Icyuho cya 5–15 μm ntabwo ari ukwihanganira ubukana bw'ubuso bw'umuyobozi - ni ahantu hose hakoreshwa harimo n'inkomoko zose z'impinduka. Ubuso bw'umuyobozi ubwabwo bugomba kuba bworoshye kandi butambitse kurusha iki cyuho kugira ngo umuyaga ukore neza.
Ibisabwa ku kurangiza ubuso (Uburemere)
Ubukana bw'ubuso bw'ubuyobozi bugomba kuba igice gito cy'icyuho cy'umwuka.ubuso bw'ubuyobozihamwe n’ubukana bwa Ra bwa 0.4 μm (ubuso bwiza bukozwe mu mashini) byagaragaza ihindagurika ry’uburebure bw’aho hantu ringana n’igice kinini cy’icyuho cy’umwuka, bigatuma habaho ihindagurika ry’umuvuduko rihinduka mu buryo butaziguye urusaku rwo gushyira ku gikapu.
Ubuso bw'inyuguti za granite ziyobora neza mu gukoresha umuyaga bushyirwa ku gipimo cya Ra cya 0.02–0.1 μm (20–100 nm) — bihuye n'indorerwamo nziza. Kugira ngo ugere kuri izi ngamba zo gukaraba kuri granite bisaba ubuhanga bwihariye bwo gukaraba, gukoresha imashini zisanzwe zo mu bwoko bwa abrasive, n'abahanga mu kuyikoresha basobanukiwe uburyo bwo gukuraho ibikoresho ndetse n'imyitwarire y'imiterere ya granite mu gihe cyo gukaraba neza.
Ubukomere bw'ibuye rya granite bugira akamaro kanini hano: ibuye rikomeye kandi rinini (nk'ibuye ry'umukara ry'igiciro kinini rifite ubucucike bwa ≈ 3,100 kg / m³) rishobora gupfundikirwa ku buryo rito kurusha iry'umukara cyangwa marble byoroshye, kuko imiterere yaryo yoroheje kandi ifatanye neza idakuramo uduce tw'ibinyampeke dukubita hejuru mu gihe cyo gupfundikirwa neza. Iyi ni imwe mu mpamvu zikomeye zituma guhitamo ibikoresho biba ingenzi ku buso buyobora umwuka, atari ku buryo bworoshye gusa ku gice cy'ubutaka.
Ibisabwa ku buryo bworoshye no kugororoka
Uretse ubugari bw'ubuso, ubuso buyobora umwuka bugomba kuzuza ibisabwa bikomeye byo kuba burambitse. Inzira yo gutwara umwuka igenda "isoma" ubuso buyobora - icyerekezo cyabwo kuri buri gace mu rugendo kigenwa n'imiterere y'ubuso buyobora. Gutandukana kose n'ubugari bukwiye (mu cyerekezo cya Z) cyangwa ubw'ubugari (mu cyerekezo gigororotse ugana ku muvuduko, mu gice cya XY) cy'ubuso buyobora bigaragazwa nk'ikosa ry'ingendo ry'imodoka.
Iki ni ikintu kizwi nka Abbe error (cyangwa sine error): iyo ubuso bw'umuyobozi bufite ikosa ryo kumanuka rya radians za θ, kandi ikintu gishishikaje ku modoka kiri kure ya L uvuye ku buso bw'umuyobozi, ikosa ryo ku ruhande ni L × sin(θ) ≈ L × θ ku mfuruka nto. Ku modoka aho icyuma gipima n'igice gipimwa bitandukanyijwe na mm 100 mu cyerekezo gihagaze, ikosa ryo kumanuka ry'ubuyobozi rya arcsegonda 1 ritanga ikosa ryo kumanuka rya 0.48 μm.
Kugabanya iyi ngaruka bisaba ubuso bw'abayobozi bufite amakosa yo kugororoka mu gice cya arcsecond cyangwa munsi yacyo, mu burebure bwose bw'urugendo rw'ikibuga. Ku gice cya 500mm cyo kugororoka, ibi bihuye n'impinduka z'uburebure bwa mikorometero nke cyangwa munsi yacyo mu burebure bwose bwa granite guide. Kugira ngo ugere kuri uru rwego rwo kugororoka no kugenzura ubu buryo bwo kugororoka bisaba ubuhanga bwo gupima neza, gupima witonze hakoreshejwe urwego rw'ikoranabuhanga na interferometer za laser, no gukosora uburyo bwo gukosora busa n'ubukoreshwa mu gupima plate y'ubuso.
Ubushobozi bwo kwinjira mu kirere no kwemerera umwuka kwinjira mu kirere
Imwe mu miterere ya granite ifite akamaro kanini mu gukoresha umuyaga ariko idakunze kuvugwaho cyane mu nyandiko rusange ni porosity. Niba ubuso bw'inyuguti ya granite bufite imyenge ifunguye - imyenge mito ihuza imbere mu ibuye n'ubuso - umwuka urimo igitutu uri mu mwenge w'inyuguti ushobora kwinjira mu ibuye aho gutembera neza ugana ku mwobo usohoka. Ibi bituma umuvuduko ukwirakwira mu buryo butaringaniye, byongera ikoreshwa ry'umwuka, kandi mu bihe bikomeye bishobora gutuma icyuma gisenyuka aho kiri.
Granite yirabura ifite ubucucike bwinshi, ifite imiterere mito cyane ikomoka ku miterere yayo ya kristale, ntabwo ikunze kwibasirwa n'iki kibazo kurusha granite yirabura ifite ubucucike buke. Ubucucike bwa hafi 3.100 kg/m³ - ugereranije na granite isanzwe y'ibara ry'umukara kuri 2.600–2.700 kg/m³ - bugaragaza igice gito cyane cy'ubucucike mu bikoresho. Ku buso bw'ubuyobozi bw'umwuka, iri tandukaniro mu mirebere rigira ingaruka zitaziguye ku mikorere y'ibara n'ubudahangarwa.
Mu bikorwa by’ingenzi, hashobora gukoreshwa ubundi buryo bwo kuvura ubuso (gushyiramo imvange hakoreshejwe epoxy, cyangwa uburyo bwihariye bwo gufunga imyenge y’ubuso). Ariko, gutangirana n’ibikoresho bifite imyenge mike bigabanya gukenera ubwo buryo bwo kuvura ndetse n’ibyago byo kugira ibibazo by’imikorere y’imyenge.
Iteraniro ry'Ibintu Bifite Umucyo bya Granite: Ibitekerezo ku gishushanyo mbonera
Icyiciro cyuzuye cyo gutwara umwuka kuri granite gikubiyemo ibintu byinshi by’ubuhanga birenze ubuso bw’umuyobozi ubwabwo:
Igishushanyo mbonera cyo gushyiramo ibintu mbere y'igihe
Ibyuma by'umwuka bigomba gushyirwaho mbere - bivuze ko imbaraga zo gusubiza ibintu mu buryo zigomba kurwanya ubushake ubwo aribwo bwose bw'ikamyo bwo kuva ku buso bw'umuyobozi. Iyo idashyizwemo mbere, ikamyo yahita irembera ikava ku buso iyo hari ikibazo cyo kuzamuka hejuru. Gushyiramo mbere bikorwa hakoreshejwe bumwe mu buryo butatu:
Udupira tw’umwuka dutandukanye dukoresha ubuso bwa kabiri bw’umwuka buri ku rundi ruhande rw’umurongo uyobora cyangwa ubuso burambuye, bigatuma habaho imbaraga z’umuvuduko zihangana zigahuza ikamyo n’umurongo uyobora mu gihe zikomeza gutandukanya filime y’umwuka ku mpande zombi. Iyi ni yo miterere ikunze gukoreshwa cyane mu byiciro by’umurongo ugororotse.
Ibyuma bikoresha umwuka woroshye bikoresha agace ko hagati gafite umwuka woroshye mu gice cyo hejuru, gakikijwe n'agace gafite umwuka woroshye. Imbaraga ni itandukaniro riri hagati y'imbaraga zo guterura agace gafite umwuka woroshye n'agace gafite umwuka woroshye, bigatuma umwuka woroshye ugera ku buso bw'umuyobozi.
Gushyira ingufu za rukuruzi mu mwanya wa mbere w’icyuma gikurura ...
Itangwa ry'umwuka n'iyungurura
Ibyiciro byo gutwara umwuka bisaba ko umwuka uhora ufunze neza, wumye, udafite uduce duto ku gitutu giteganywa — ubusanzwe 0.4–0.6 MPa. Kwanduzwa k'umwuka ukoresheje aerosol y'amavuta, umwuka w'amazi, cyangwa uduce duto ni imwe mu mpamvu zikunze gutuma umwuka unanirwa. Kwanduzwa kwa peteroli ku buso bw'ibikoresho, bigahindura imiterere yabyo n'uburyo amazi ahumira; amazi ahinduka umuvuduko; uduce duto dushobora kuziba icyuho cy'ibikoresho no gupima ubuso bw'imodoka ndetse n'ubuso bw'ikirahure cya granite.
Mu nganda zikora ibikoresho bya semiconductor, ubuziranenge bw'umwuka utangwa bugenzurwa neza n'ibipimo ngenderwaho by'inganda. Mu zindi nganda, hagomba kwitabwaho kugira ngo habeho uburyo bukwiye bwo kuyungurura no kumisha umwuka kugeza ku rwego rwo hejuru.
Ingaruka z'ubushyuhe ku firime y'umwuka
Ubushyuhe bw'umwuka buhinduka bitewe n'ubushyuhe — hafi 2% kuri dogere selisiyusi ku bushyuhe bw'icyumba. Impinduka zikomeye z'ubushyuhe mu mwuka (kuva mu cyumba cya compressor kugera mu cyumba gisukuye gigenzurwa n'ubushyuhe, urugero) bihindura ubukana bw'imbaraga z'ubwikorezi n'imbaraga zo guterura. Mu gukoresha neza, ubushyuhe bw'umwuka bugomba kugenzurwa hiyongereyeho igitutu.
Icyuho cy’ubushyuhe ubwacyo gitanga ubushyuhe buke ariko butari na zeru binyuze mu gukata icyuma cy’umwuka. Ku byiciro by’umuvuduko mwinshi, iyi soko y’ubushyuhe igomba kubarwa mu buryo bw’ubushyuhe bw’iyi sisitemu kugira ngo hirindwe ubushyuhe butunguranye mu ibara rya granite cyangwa mu nyubako y’imodoka.
Gupima no kugenzura imikorere y'icyiciro cyo gutwara umwuka
Nyuma yo guteranya, hagomba kugaragazwa urwego rw'umwuka uterwa kuri granite kugira ngo harebwe ko yujuje ibisabwa mu mikorere yayo. Ibipimo by'ingenzi byo gupima birimo:
Gusubiramo aho umuntu aherereye — bipimwa hakoreshejwe uburyo bwo kuyobora icyiciro kugeza ku rutonde rw'imyanya y'intego no kwandika aho umuntu aherereye nyayo hakoreshejwe icyuma gipima umurongo w'inyuma cyangwa interferometer ya laser. Gusubiramo aho umuntu ahagaze mu cyerekezo kimwe (kuva mu byerekezo byombi) bipima hysteresis.
Ubugororangingo bw'ingendo — bupimirwa hakoreshejwe gushyiraho inkombe igororotse (akenshi, ubwayo ikaba ari icyerekezo cy'ubugororangingo) iruhande rw'inzira y'ingendo no gukoresha icyuma gipima ikoranabuhanga kugira ngo gipime icyuho cy'igare riva ku murongo ugororotse uko rinyura mu ntera yaryo yose.
Amakosa y'inguni (pitch, roll, yaw) — yapimwe hakoreshejwe autocollimators cyangwa urwego rw'ikoranabuhanga rushyizwe ku igare, ikamenya impinduka ntoya z'inguni mu cyerekezo cy'igare uko rigenda.
Ikoreshwa ry'umwuka n'ubukana bw'ubwikorezi — bipimwa hakoreshejwe imitwaro izwi ku gikapu no gupima icyuho gikomokaho (kuva ku gisomwa cya encoder), bigatuma ubukana bw'ubwikorezi (imbaraga kuri buri gice cyo kwimuka) bubarwa.
Ibi bipimo, bikozwe hakoreshejwe ibikoresho bifite ubushobozi bwo gusuzuma no gupima neza, bitanga umwimerere w'imikorere ushobora gukomeza no kwemezwa mu gihe cyose cy'ubuzima bwabyo.
Ikoreshwa aho ibyiciro byo gushyiramo umwuka wa Granite ari ingenzi
Uruvange rw'ingendo z'umwuka n'ubuso bw'ubuyobozi bwa granite bigaragara aho fiziki y'ikoreshwa isaba imiterere yabyo ihuriweho:
Igenzura rya semiconductor wafer na lithography — Byamaze kuganirwaho cyane; ikoreshwa ry'icyitegererezo ryatumye iterambere ry'ikoranabuhanga rigera ku rwego ruriho ubu.
Gucukura PCB ku buryo bwihuta — Imashini zicukura zifite uruziga rwinshi zigomba gushyira uduce twinshi tw’imashini icyarimwe hejuru y’urubaho rwa PCB zikoresha ishingiro rya granite n’udupira tw’umwuka kugira ngo zigere ku muvuduko, ubuziranenge, no kudatezuka igihe kirekire bikenewe.
Igenzura ry’ubuso bw’ijisho n’ubuso bw’ijisho — Ibikoresho bipima imiterere y’ubuso ku gipimo cya sub-nanometer bigomba gupima icyuma gipima hejuru y’ubuso bw’igice mu buryo bworoshye cyane kandi butanyeganyega. Ibyuma by’umwuka biri ku buso bw’ijisho rya granite bitanga ubwiza bukenewe bwo kugenda.
Uburyo bwo gutunganya neza hakoreshejwe laser — sisitemu za laser za Femtosecond na picosecond zikoreshwa mu gukuraho ibikoresho neza — mu bikorwa kuva ku buvuzi bw'amaso kugeza kuri microelectronics kugeza ku bice by'indege — bisaba ibyiciro byo gushyiramo ibintu neza hakoreshejwe nanometer kandi nta gukurura kugira ngo hagerwe ku bwiza bukenewe bwo gukuramo.
Gupima ingano y'umurongo — Sisitemu zo gupima imiterere y'umurongo zikoresha uburyo bwo gupima imiterere y'umurongo n'uburyo bwo gupima imiterere y'umurongo zigomba kwimura ikintu gifite imiterere y'ingendo nziza ku buryo imiterere ubwayo idahagarika imiterere y'imiterere y'umwuka. Ibyiciro byo gufata umwuka ku buso bw'ubuyobozi bwa granite ni byo bikunze gukoreshwa ku buryo busaba cyane gupima imiterere y'umurongo.
Umwanzuro: Filimi y'ikirere n'ibuye
Ikoranabuhanga rikoresha umwuka n'ubuhanga bwa granite, mu buryo bw'ukuri, byakorewe hamwe. Fiziki y'imikorere y'ubuhanga bwa granite ishyiraho ibisabwa bikomeye ku busumbane bw'ubuso buyobora, ubugari, n'imiterere y'ibikoresho - bisaba ko granite ikoresha umwuka, iyo ikozwe kandi igatunganywa ku bipimo bikwiye, iba ifite umwanya mwiza wo guhuza. Kandi ubuhanga bwa granite, mu gukuraho kwangirika no kwangirika k'uburyo ikora, bituma ubuso bwa granite bukoresha ingano ya nanometero buhora bukoreshwa nta kwangirika.
Ingaruka ni ikoranabuhanga ryo gushyira ibintu mu mwanya wabyo rishobora kugera ku bwiza bw'ingendo - ripimirwa muri nanometero - ryari gusa nkaho ari ingenzi cyane ku bahanga bo mu gisekuru cyashize. Kuba iri koranabuhanga rishingiye, ku buryo bufatika no mu buryo bw'imitekerereze, ku rufatiro rw'amabuye ya kera, ni kimwe mu bintu bitangaje cyane mu buhanga bwo muri iki gihe bwo gukora neza.
Igihe cyo kohereza: Kamena-26-2026