Mu rwego rw'inganda zigezweho n'ubushakashatsi bwa siyansi bugezweho, urubuga rwo kugenda rw'umwuka uhindagurika mu buryo bunoze ni cyo gikoresho cy'ingenzi kugira ngo hagerwe ku mikorere myiza cyane. Ishingiro ry'ubuziranenge bwa granite ni igice cy'ingenzi gishyigikira urubuga, kandi imikorere yarwo ifitanye isano rya hafi n'ibidukikije. Gusobanukirwa no kuzuza ibi bisabwa ku bidukikije ntibishobora kwemeza gusa imikorere myiza y'urubuga, ahubwo binafasha ikigo kugira ubushobozi bwo guhangana n'ibindi mu nzego zijyanye narwo, nk'uko bisobanurwa mu buryo burambuye hano hepfo.
1. Ubushyuhe: kugenzura neza kugira ngo harebwe ko ingano ihamye
Nubwo granite izwiho kudahinduka, ingano yayo yo kwaguka k'ubushyuhe ntabwo ari zeru, kandi impinduka nto z'ubushyuhe zishobora kugira ingaruka ku buryo ingana. Muri rusange, ingano yo kwaguka k'ubushyuhe bwa granite ni 5-7 × 10⁻⁶/℃. Mu ikoreshwa ry'urwego rw'umwuka uhindagurika neza, iri hinduka rito ryiyongereyeho urwego, bishobora gutuma habaho kunyuranya kw'uburyo ihindagurika. Urugero, mu ikorwa rya chip za semiconductor, inzira ya lithography yo gushyiramo ibisabwa ku rwego rwa danami, ihindagurika ry'ubushyuhe bw'ikirere rya 1 ° C, uburebure bw'uruhande rw'ishingiro rya granite rya metero 1 bushobora gutanga mikoroni 5-7 zo kwaguka cyangwa guhindagurika, ibi bikaba bihagije kugira ngo ihinduka ry'ishusho ya chip lithography rigabanuke, rigabanye umusaruro. Kubwibyo, urwego rw'umwuka uhindagurika neza rufite ishingiro rya granite, ubushyuhe bwiza bwo gukoreraho bugomba kugenzurwa neza kuri 20 ° C ± 1 ° C, ibigo bishobora gushyiraho sisitemu yo kongerera ubushyuhe ihoraho, gukurikirana no guhindura neza ubushyuhe bw'ikirere, kubungabunga ingano y'ishingiro rya granite, kugira ngo birebe ko urwego rukora neza cyane.
2.ubushuhe: kugenzura neza, kurinda imikorere y'ibanze
Ubushuhe bugira ingaruka zikomeye ku rufatiro rwa granite rutunganye. Mu hantu hari ubushuhe bwinshi, granite yoroshye kwinjiza umwuka w'amazi, kandi hashobora kubaho ubushuhe ku buso, bitazabangamira gusa imikorere isanzwe ya sisitemu yo kuzenguruka umwuka, ahubwo binatera kwangirika k'ubuso bwa granite igihe kirekire, bigagabanya ubuziranenge n'ubuzima bwabwo. Dufashe urugero rw'aho icyuma gisya lenzi z'amatara nk'urugero, niba ubushuhe buri hejuru ya 60% RH igihe kirekire, umwuka w'amazi winjira ku buso bwa granite uzangiza imiterere ya filime y'umwuka, bigatuma ubuziranenge bwo gusya lenzi bugabanuka n'ubusembwa bw'ubuso. Kubwibyo, ubushuhe bw'aho bakorera bugomba kugenzurwa hagati ya 40% na 60% RH. Ibigo bishobora gukoresha ibikoresho bikuraho ubushuhe, ibikoresho bipima ubushuhe n'ibindi bikoresho kugira ngo bikurikirane kandi bigenzure ubushuhe mu gihe nyacyo, bishyireho ibidukikije bibereye ubushuhe ku rufatiro rwa granite rutunganye, kandi bigenzure imikorere ihamye y'urwego rw'umwuka ruhindagurika.
3. isuku: kugenzura neza, gukuraho uburyo uduce duto twivangavanga
Uduce tw’umukungugu ni "umwanzi" w’urubuga rwo kugenda rw’umwuka uhindagurika, kandi bigira ingaruka mbi ku gice cy’umukungugu. Uduce duto twinjiye mu cyuho cya gaze kiri hagati y’agace gakoresha umwuka uhindagurika n’igice cy’umukungugu, dushobora kwangiza imiterere y’agace gakoresha umwuka, kongera ubukana, ndetse no gushwanyaguza ubuso bw’igice, bigira ingaruka zikomeye ku buryo urusobe rw’uru ...
4. Gutembagara: Kwitandukanya neza kugira ngo habeho umwanya mwiza
Gutembagara inyuma bizabangamira cyane uburyo urubuga rw’umwuka utembagara neza, nubwo urwego rw’umuvuduko wa granite rufite ubushobozi bwo kugabanya gutigita, ariko gutigita gukomeye gushobora kugabanya umupaka warwo. Gutigita guterwa n’urujya n’uruza rw’uruganda n’imikorere y’ibikoresho binini bya mekanike byoherezwa ku rufatiro rwa granite binyuze mu butaka, ibyo bikabangamira uburyo urubuga rutembagara neza. Muri CMM yo mu rwego rwo hejuru, gutigita bishobora gutuma aho icyuma gipimira n’icyuma gipimira bipimirwa hadakora neza, bigatuma amakuru yo gupima ahinduka. Kugira ngo iki kibazo gikemuke, ni ngombwa gukoresha ingamba zo gutigita neza, nko gushyira udupapuro two gutigita mu gice gishyirwamo ibikoresho, kubaka umusingi wo gutigita, cyangwa gukoresha sisitemu yo gutigita ikora kugira ngo ihuze n’uburyo bwo gutigita hanze, no gushyiraho ahantu hatuje kandi hahamye ho gukorera ku rufatiro rw’umuvuduko wa granite n’urwego rwo gutigita rutemba neza.
Uzuza ibisabwa ku bidukikije byavuzwe haruguru, kugira ngo ushyire mu bikorwa ibyiza byo gukoresha granite neza mu buryo buhamye mu kirere gishyushya umwuka, kugira ngo urebe ko urubuga rutanga serivisi zo kugenzura ingendo mu buryo bunoze kandi buhamye ku nganda zitandukanye. Niba ibigo bishobora kwita kuri ibi bisobanuro mu bijyanye n'umusaruro, bizakoresha amahirwe mu gukora ibintu binoze, ubushakashatsi bwa siyansi n'izindi nzego, birusheho kunoza ubushobozi bwabyo bwo guhangana, kandi bigere ku iterambere rirambye.
Igihe cyo kohereza: 10 Mata 2025