Ibisabwa mu rwego rwa tekiniki ku bikoresho bya granite by’ibikoresho bya semiconductor.

1. Ubuziranenge bw'ibipimo
Ubugari: ubugari bw'ubuso bw'ibanze bugomba kugera ku rwego rwo hejuru cyane, kandi ikosa ry'ubugari ntirigomba kurenza ± 0.5μm mu buso ubwo aribwo bwose bwa 100mm × 100mm; Ku gice cyose cy'ibanze, ikosa ry'ubugari rigenzurwa muri ± 1μm. Ibi byemeza ko ibice by'ingenzi by'ibikoresho bya semiconductor, nk'umutwe w'ibikoresho bya lithography n'ameza y'ibikoresho byo gupima chip, bishobora gushyirwaho neza kandi bigakoreshwa ku gice cy'ingenzi, byemeza ko inzira y'urumuri n'umuyoboro w'uruziga by'ibikoresho ari ukuri, kandi birinda gutandukana kw'ibice biterwa n'umuyoboro utaringaniye w'ibanze, bigira ingaruka ku gukora chip za semiconductor no kumenya neza.
Kugororoka: Kugororoka kwa buri nkombe y'ifatizo ni ingenzi cyane. Mu cyerekezo cy'uburebure, ikosa ryo kugororoka ntirigomba kurenza ± 1μm kuri 1m; Ikosa ryo kugororoka ryinjira rigenzurwa muri ± 1.5μm. Dufashe urugero rw'imashini ikora lithography neza cyane, iyo ameza agenda ku murongo w'ifatizo, kugororoka kw'inkombe y'ifatizo bigira ingaruka zitaziguye ku buryo ameza ahagaze neza. Iyo kugororoka kutari ku rwego rusanzwe, imiterere ya lithography izahinduka kandi igahinduka, bigatuma umusaruro w'ibikoresho bikorerwamo chips ugabanuka.
Parallelism: Ikosa ryo kugereranya ubuso bwo hejuru n'ubwo hasi bw'ishingiro rigomba kugenzurwa muri ± 1μm. Parallelism nziza ishobora kwemeza ko hagati y'uburemere rusange nyuma yo gushyiraho ibikoresho, kandi imbaraga za buri gice zikaba zimwe. Mu bikoresho byo gukora wafer ya semiconductor, niba ubuso bwo hejuru n'ubwo hasi bw'ishingiro budahuye, wafer izahengamira mu gihe cyo gutunganya, bigira ingaruka ku buryo ibintu bimeze nk'ibishushanyo mbonera n'ibishushanyo mbonera, bityo bigira ingaruka ku mikorere ya chip.
Icya kabiri, imiterere y'ibikoresho
Ubukomere: Ubukomere bw'ibikoresho by'ibanze bya granite bugomba kugera ku bukomere bwa Shore HS70 cyangwa burenga. Ubukomere bwinshi bushobora kurwanya kwangirika guterwa no kugenda kenshi no gukururana kw'ibice mu gihe cy'imikorere y'ibikoresho, bigatuma ishingiro rigumana ingano nziza nyuma yo gukoreshwa igihe kirekire. Mu bikoresho byo gupfunyikamo chip, ukuboko kwa roboti akenshi gufata chip ku ishingiro, kandi ubukomere bwinshi bw'ishingiro bushobora kwemeza ko ubuso butoroshye gushwanyagurika no kugumana ubuziranenge bw'ukuboko kwa roboti.
Ubucucike: Ubucucike bw'ibikoresho bugomba kuba hagati ya 2.6-3.1 g/cm³. Ubucucike bukwiye butuma ishingiro rigira ubuziranenge buhamye, bushobora kwemeza ko ibikoresho bikomera bihagije, kandi ntibizateza ingorane mu gushyiraho no gutwara ibikoresho bitewe n'uburemere bukabije. Mu bikoresho binini bigenzura ibikoresho bya semiconductor, ubucucike bw'ibanze buhamye bufasha kugabanya ihererekanya ry'imitingito mu gihe cy'imikorere y'ibikoresho no kunoza uburyo bwo kubitahura.
Ubushyuhe buhamye: igipimo cyo kwaguka kiri munsi ya 5×10⁻⁶/℃. Ibikoresho bya semiconductor bigira ingaruka zikomeye ku mpinduka z'ubushyuhe, kandi ubushyuhe buhamye bw'ibanze bufitanye isano itaziguye n'uburyo ibikoresho bihagaze. Mu gihe cyo gushushanya, ihindagurika ry'ubushyuhe rishobora gutuma igice cy'ibanze cyaguka cyangwa kigabanuka, bigatuma ingano y'aho gishyirwa ihinduka. Igipimo cy'ibanze cya granite gifite igipimo cyo kwaguka kiri hasi gishobora kugenzura impinduka z'ingano mu rugero ruto cyane iyo ubushyuhe bw'imikorere y'ibikoresho buhindutse (muri rusange 20-30 ° C) kugira ngo hamenyekane ko igipimo cyo kwaguka kiringaniye.
Icya gatatu, ubwiza bw'ubuso
Ubukana: Ubukana bw'ubuso Agaciro ka Ra ku ishingiro ntikarenze 0.05μm. Ubuso bworoshye cyane bushobora kugabanya kwinjizwa kw'umukungugu n'imyanda no kugabanya ingaruka ku isuku y'ahantu hakorerwa imashini zikora imashini. Mu iduka ridafite ivumbi ryo gukora imashini zikora imashini, uduce duto dushobora gutera inenge nko kuzunguruka k'urukuta, kandi ubuso bworoshye bw'ishingiro bufasha kubungabunga ibidukikije bisukuye by'iduka no kunoza umusaruro w'imashini zikora imashini.
Ubusembwa bwa mikorosikopi: Ubuso bw'ibanze ntibwemerewe kugira imyobo igaragara, imyobo y'umucanga, imyenge n'izindi nenge. Ku rwego rwa mikorosikopi, umubare w'ubusembwa bufite umurambararo urenze 1μm kuri santimetero kare ntugomba kurenza 3 hakoreshejwe mikorosikopi ya elegitoroniki. Ubusembwa buzagira ingaruka ku bunini bw'imiterere n'ubugari bw'ubuso bw'ibanze, hanyuma bugire ingaruka ku ituze n'ubuziranenge bw'ibikoresho.
Icya kane, gutuza no kudahungabana
Gutuza mu buryo buhindagurika: Mu buryo buhuye n'uburyo ibintu bihindagurika bikoreshwa n'imikorere y'ibikoresho bya semiconductor (intera y'ingufu zo gutigita 10-1000Hz, amplitude 0.01-0.1mm), kwimura kw'ingingo z'ingenzi zo gushyira ku rufatiro bigomba kugenzurwa muri ± 0.05μm. Dufashe urugero rw'ibikoresho byo gupima semiconductor, niba gutigita kw'igikoresho n'ingufu zigikikije byoherejwe ku rufatiro mu gihe cyo gukora, ukuri kw'ikimenyetso cy'ikizamini bishobora kubangamira. Gutuza mu buryo burambye bishobora gutuma ibisubizo by'ikizamini byizewe.
Ubudahangarwa ku mihindagurikire y'isi: Ishingiro rigomba kugira imikorere myiza cyane ya sisimu, kandi rishobora kugabanya vuba ingufu za simulation iyo rihuye n'ihindagurika ritunguranye ry'inyuma (nk'ihindagurika rya simulation wave), kandi rigatuma aho ibice by'ingenzi by'ibikoresho biherereye hahinduka muri ± 0.1μm. Mu nganda za semiconductor mu turere twibasirwa n'imitingito, ibirindiro birwanya isi bishobora kurinda neza ibikoresho bihenze bya semiconductor, bikagabanya ibyago byo kwangirika kw'ibikoresho no guhungabana k'umusaruro bitewe no guhindagurika.
5. Gukomera ku buziranenge bw'ibinyabutabire
Ubudahangarwa n'ingese: Urufatiro rwa granite rugomba kwihanganira ingese z'ibintu bisanzwe bya shimi mu ikorwa rya semiconductor, nka aside hydrofluoric, aqua regia, nibindi. Nyuma yo kwinjizwa mu gisubizo cya aside hydrofluoric gifite igice kinini cya 40% mu gihe cy'amasaha 24, igipimo cyo gutakaza ubuziranenge bw'ubuso ntikigomba kurenga 0.01%; Shyira mu mazi regia (ingano y'ingano ya aside hydrochloric na aside nitrique 3:1) mu gihe cy'amasaha 12, kandi nta bimenyetso bigaragara bya ingese ku buso. Inzira yo gukora semiconductor ikubiyemo uburyo butandukanye bwo gukata no gusukura imiti, kandi ubudahangarwa bwiza bw'ingese ku rufatiro bushobora gutuma ikoreshwa igihe kirekire mu bidukikije bya shimi ridahinduka, kandi imiterere y'ubuziranenge n'ubuziranenge bw'imiterere bigakomeza kuba byiza.
Kurwanya umwanda: Ibikoresho by'ibanze bifite ubushobozi buke bwo kwinjiza imyanda isanzwe mu nganda zikora ibikoresho bya semiconductor, nka gaze organic, ions z'ibyuma, nibindi. Iyo bishyizwe ahantu hari gaze organic zingana na 10 PPM (urugero: benzene, toluene) na 1ppm ya ions z'ibyuma (urugero: ions z'umuringa, ions z'icyuma) mu gihe cy'amasaha 72, impinduka mu mikorere iterwa no kwinjiza imyanda ku buso bw'ibanze ntabwo ari nyinshi. Ibi birinda imyanda kuva ku buso bw'ibanze kugera aho imashini ikorera ibikoresho binini kandi bigira ingaruka ku bwiza bwa chip.