Ibikoresho bya granite bikoreshwa cyane mu nganda za semiconductor bitewe n’imiterere yabyo myiza, nko kuba bihamye cyane, ubushyuhe buke, no kurwanya ingese. Iyi miterere ituma granite iba ibikoresho byiza byo kubaka ibice bifite ubuhanga buhanitse muri sisitemu yo kohereza wafer.
Mu gikorwa cyo gukora semiconductor, sisitemu yo kohereza wafer igira uruhare runini mu gutwara wafer mu byiciro bitandukanye by'igikorwa cyo gukora. Ubuhanga n'ubunyangamugayo ni byo bisabwa kuri izi sisitemu kuko n'aho byahinduka gato bishobora gushyira mu kaga igikorwa cyose. Kubwibyo, ibice biri muri sisitemu yo kohereza wafer bigomba gukorwa mu bikoresho byiza, kandi granite yujuje ibyo bipimo.
Bimwe mu bice bya sisitemu yo kohereza wafer ikozwe mu bikoresho bya granite birimo:
1. Ameza yo mu bwoko bwa Vacuum Chuck
Ameza y'ubushyuhe akoreshwa mu gufata wafer mu gihe cyo kuyitunganya, kandi agomba kugira ubuso buhamye kugira ngo wafer idakomereka. Granite ni ibikoresho byiza byo gukora iyi meza kuko ifite ubuso burambuye, budafite imyenge butanga ituze n'ubuziranenge. Byongeye kandi, granite ifite ubushobozi buke bwo kwaguka k'ubushyuhe, bigatuma idashobora guhangana n'impinduka z'ubushyuhe zishobora gutera impinduka mu ngero za wafer.
2. Icyiciro cyo Gutwara Umwotsi
Icyiciro cy’umwuka gikoreshwa mu gutwara wafer mu byiciro bitandukanye by’igikorwa cyo kuyikora. Icyiciro cyakozwe kugira ngo gitange uburyo bwo kuyihinduramo ibintu, bisaba ubuhanga n’ubudahangarwa. Granite ikoreshwa muri ubu buryo kuko ari ibuye rikomeye kandi rikomeye, kandi rirwanya kwangirika no kwangirika uko igihe kigenda.
3. Amabwiriza yo Kugenda mu Mirongo
Udukoresho tw’umurongo ugororotse dukoreshwa mu kuyobora urwego rw’ikirere gikoresha umwuka, kandi tugomba gushyirwa neza kugira ngo tugabanye amakosa. Granite ikoreshwa mu kubaka iyi mfashanyigisho kuko ifite ubushobozi bwo guhagarara neza mu buryo bw’ikoranabuhanga. Ibikoresho kandi ntibishobora kwangirika, ibyo bikaba bituma sisitemu y’ubuyobozi iramba.
4. Ibikoresho bya Metrology
Ibikoresho bya Metrology bikoreshwa mu gupima ingano n'imiterere ya wafer mu gihe cyo kuyikora. Granite ni ibikoresho byiza cyane mu kubaka ibi bikoresho kuko bifite ubukana bwinshi, kwaguka guke, kandi bifite ububobere buke mu gihe cyo kuyitwara. Byongeye kandi, ubushyuhe bwa granite butuma ibikoresho bya Metrology bigumana ubuziranenge kandi neza uko igihe kigenda gihita.
Mu gusoza, inganda za semiconductor zishingiye ku buziranenge n'ubuziranenge, kandi ibikoresho bya granite byagaragaye ko byizewe cyane kandi bihamye mu buryo bwo kubitunganya. Kubera ko hari ibice byinshi by'ingenzi muri sisitemu yo kohereza wafer bisaba ubuziranenge bwinshi, ubuziranenge, no kwaguka guke k'ubushyuhe, injeniyeri zifashisha ibikoresho bya granite kugira ngo zihuze n'ibi bisabwa by'ingenzi.
Igihe cyo kohereza: Werurwe-19-2024