Mu bijyanye no gukata imashini zikoresha ikoranabuhanga rya semiconductor wafer, gukora neza ni byo bifasha mu buzima. Ishingiro ridasanzwe rya granite rishobora gutuma habaho intambwe ikomeye mu mikorere y'ibikoresho byo gukata imashini! Ni izihe "mbaraga zikomeye" mu by'ukuri zihisha? Kuki bivugwa ko guhitamo ishingiro rikwiye rya granite bivuze ko watsinze hagati yaryo? Uyu munsi, turagusaba kubigaragaza mu buryo bwimbitse!
I. Ingufu z'umwimerere: "Ibyiza bitatu by'umwimerere" bya Granite
Ubudahangarwa bw'imitingito burahamye nk'uko umusozi wa Tai uhagaze
Granite ifite ubucucike buri hagati ya 2,800-3,100 kg / m³, kandi imiterere yayo ni nk' "igihome cy'amabuye". Mu buryo bwo guhindagurika cyane kw'imashini zisukamo amazi (imiyoboro y'ibikoresho irenga inshuro 100 ku munota), ishobora kwinjiza ingufu zirenga 90% by'ingufu zisukamo amazi, kimwe no guha ibikoresho "ikoranabuhanga ry'umukara rituma umuntu ahungabana"! Amakuru yapimwe aturuka mu ruganda runaka rw'ibikoresho by'imashini agaragaza ko nyuma yo gukoresha ishingiro rya granite, uburebure bw'umutwe w'icyuma gisukamo amazi bwagabanutse kuva kuri 15μm kugera kuri 3μm, kandi impande z'imiyoboro mito ishushanyijeho ziba zoroshye nk'indorerwamo.
2. "Itera imbaraga zirinda ubushyuhe" Ntitinya itandukaniro ry'ubushyuhe
Ibikoresho bisanzwe "birakura kandi bigahinduka" iyo bishyushye kandi "biragabanuka kandi bigahinduka" iyo bikonje, ariko igipimo cyo kwaguka k'ubushyuhe bwa granite kiri hasi cyane nka 4-8 × 10⁻⁶ / ℃, ni ukuvuga 1/5 gusa cy'ibyuma! Nubwo ubushyuhe mu iduka buhinduka cyane ho 10℃ mu masaha 24, guhinduka kwabyo ni munsi ya 0.01mm kandi bishobora kwirengagizwa. Ibi bivuze ko hatitawe ku gusimburana kw'amanywa na nijoro cyangwa imikorere miremire n'ikorwa ry'ubushyuhe bw'ibikoresho, ishingiro rya granite rishobora kugumana umwanya "udahinduka" igihe cyose.
3. Ubudahangarwa bwo kwangirika budashobora kwangirika
Ubukana bwa Mohs bwa granite bugera kuri 6 kugeza kuri 7, bungana n'ubw'amabuye ya quartz, kandi ubushobozi bwayo bwo kwangirika bukubye gatatu ugereranije n'ubw'icyuma gisanzwe! Mu gihe cy'igihe kirekire cyo kwangirika kw'imashini ya wafer, ubuso bw'ishingiro ntibushira. Nyuma y'uko uruganda runaka rukoresheje imashini za granite mu gihe cy'imyaka itanu, ubugari bwazo bwakomeje kugumana hagati ya ± 0.5μm/m nyuma yo kugenzurwa, kandi uburyo bwo kwangirika bwakomeje kuba bwiza, bigatuma ibikoresho bigabanuka cyane ndetse n'amafaranga yo kubisimbura agabanuka.
Ii. Guhindura imiterere neza: Ni gute Granite yujuje ibisabwa bitandukanye byo gukata?
Igice cya 1: Gukata neza cyane (imigozi mito iri munsi ya 10μm)
Ibisabwa: Ubugari buhanitse
Ibyiza bya granite: Binyuze mu gutunganya neza cyane, ubugari bw'umusatsi bushobora kugenzurwa muri ± 0.5μm/m, bivuze ko ku burebure bwa metero 1, ikosa ry'uburebure riba rito inshuro 200 ugereranyije n'umusatsi w'umuntu! Menya neza ko intera iri hagati y'umutwe w'icyuma gikata grooving na wafer ihora ari nziza, kandi ikosa ry'ubugari bw'imigozi mito ishushanyije ntirirenza ± 0.1μm.
Igice cya 2: Gutunganya umusaruro wihuse cyane
Ibisabwa: Uburyo bworoshye bwo gufata shock
Ibyiza bya granite: Imiterere yayo karemano yo guhumeka imbere ishobora kugabanya vuba guhinda kw'ibikoresho. Nyuma y'uko uruganda runaka rushyizeho ishingiro rya granite, umuvuduko wo gukurura wariyongereyeho 40%, kandi umusaruro wazamutse uva kuri 85% ugera kuri 96%, bigeraho umusaruro wikubye kabiri umusaruro w'umusaruro n'ubwiza!
Igice cya 3: Gutunganya ibidukikije mu buryo bugoye (Ubushyuhe bwinshi/ingese)
Ibisabwa: Kurwanya ubushyuhe bwinshi no kurwanya ingese
Ibyiza bya granite: Ifite ubushobozi bukomeye bwo kudahinduka kw'ibinyabutabire, irwanya aside na alkali; Ifite ubushobozi buke bwo kwaguka k'ubushyuhe kandi ntishobora kwangirika nubwo haba hari ubushyuhe bwinshi (150℃) mu gihe cyo gucukura hakoreshejwe laser. Ishingiro rya granite rikoreshwa muri laboratwari runaka rifite umuti wo gucukura umaze imyaka itatu ukoreshwa, kandi ubuso bw'ishingiro bugumaho.
Iii. Ni gute wahitamo "Ishingiro ry'ibara rya granite ry'umwimerere"?
Reba ubucucike: Granite ifite ubucucike bwa ≥2800kg/m³ ifite imiterere mito kurushaho.
Reba ibyemezo: Menya neza ko wemeje ibyemezo byemewe nka ISO 9001 na CNAS kugira ngo urebe ko ari byiza.
Amakuru yo kugenzura: Uruganda rusabwa gutanga raporo z'ibizamini ku gipimo cy'ubushyuhe (< 8×10⁻⁶/℃) n'ubugari (± 0.5μm/m).
Ikizamini cyo mu mwanya: Kanda hasi. Ijwi risobanutse neza rigaragaza ko nta cyuho kiri imbere. Niba ubuso bwo gukoraho buringaniye nk'indorerwamo, bigaragaza ko ari bwo buryo bworoshye bwo gutunganya.
Umwanzuro: Hitamo granite ikwiye hanyuma utsinde kimwe cya kabiri cy'urugamba mu gusya!
Kuva ku gushyuha kw'ingufu, ubushyuhe kugeza ku gushya, ishingiro rya granite, rifite "ubwiza karemano" n' "imbaraga zikomeye", ryabaye umufatanyabikorwa w'izahabu mu bikoresho byo gukurura wafer. Muri iki gihe cyo gukora ibikoresho bya semiconductor gikurikiza ubuziranenge bwa nanoscale, ishingiro rya granite ryiza ntabwo ari ishoramari mu bikoresho gusa ahubwo ni n'ingwate y'igihe kirekire yo kunoza umusaruro no kunoza umusaruro!
Igihe cyo kohereza: Kamena-17-2025