Ibyuma by'umwuka bya Granite: Uko bikora n'impamvu Granite ari yo nzira nziza yo kuyobora

Udupira tw’umwuka tugera ku kintu kidakora ku gipimo cy’uko icyuma gifatana n’icyuma kidashobora gukoraho: kugenda nta gusaza, nta gupfuka cyangwa gusimbuka, ku rwego rwo kugororoka kwa sub-micron. Ariko icyuma gifatana n’ikirere kiba cyiza gusa nk’ubuso bwacyo burerembaho. Iyi nkuru isobanura fiziki y’udupira tw’umwuka, impamvu granite karemano ifite utubuto twinshi ari yo ikwiye gukoreshwa mu guhuza, uburyo umuhanda usaba ubuziranenge, n’aho udupira tw’umwuka wa granite dutanga agaciro kanini - kuva kuri platforme za moteri zigororotse kugeza kuri sisitemu zo kugenzura urumuri.

1. Uko ibyuma bitanga umwuka bikora: Gukoresha firime y'umwuka ya mikorosikopi

Ibyuma bitanga umwuka bishyigikira umutwaro wabyo ku gapira gato gafite umuvuduko, ubusanzwe gafite ubugari bwa µm 3–15. Hari amahame abiri akurikizwa mu gutanga umusaruro:

• Indishyi y'ikiguzi cy'ikiguzi.Umwuka unyura mu myobo minini neza ukajya mu mufuka cyangwa mu mwobo muto; igitutu cyigenga uko icyuho gihinduka. Byoroshye kandi bikomeye, ariko ubushobozi bwo gutwara ni buringaniye kandi firime irashobora kwitwara neza ku makosa yo hejuru y’aho hantu.
• Indishyi zirimo utudomo.Umwuka uva amaraso mu buryo bumwe unyuze mu kintu gifite imyenge (akenshi na karuboni), bigatuma habaho agace gakomeye kandi gashobora kwihanganira imyenge gafite ubushuhe bwinshi.

Uko byagenda kose, fiziki iyobora ni imwe: ubukana bwa firime buterwa n'ubugari bw'icyuho. Iyo ubuso bw'umuhanda bumeze nk'ubugari bwa firime, urubyiniro rugira impinduka z'umuvuduko - bigaragara nk'ikosa ryo kugororoka, kuzunguruka, cyangwa se bibi kurushaho, inyundo y'umwuka (kwiyunga yishimye).Inzira iyobora abagenzi, si icyuma gifata amashanyarazi, ni yo igena urwego rw'ubwiza bw'iyi sisitemu.

2. Impamvu Granite ari yo nzira nziza yo kuyobora

Hari igihe abahanga mu by'injeniyeri bibaza impamvu ibyiciro by'umwuka bitwara cyane binyura kuri granite aho gukoresha ibyuma cyangwa ceramic. Impamvu ni fiziki y'ibintu, si umuco:

• Imiterere myiza kandi isa y'ibinyampeke.Granite y'umukara irakomera bitewe n'ishonga rimwe; nta gutandukanya dendritic, inclusions cyangwa matrix yoroshye nk'uko bigenda mu cyuma gishongeshejwe. Guhuza ibyuma bigaragaza ubuso bungana, bityo icyuho cy'umwuka gikomeza kuba kimwe mu rugendo rwose - ikintu cy'ingenzi cyane gituma filime idahungabana.
• Kwaguka k'ubushyuhe buke (≈5–8 µm/m·°C).Icyuho cy'umwuka ni mikoroni nke gusa; kimwe cya kabiri cy'impinduka z'ubushyuhe gishobora guhindura icyuma kurusha icyuho cy'umwuka. Gukomera kwa granite bituma imiterere ya filime ikomeza kuba myiza mu gihe cy'imyitozo yo ku manywa na nijoro.
• Nta kwangirika, nta mavuta.Granite yambaye ubusa ntikenera gusiga cyangwa amavuta - ni ingenzi cyane mu byumba by'isuku, aho gusohora imyuka no gukora uduce duto bituma inzira zirimo amavuta zidashobora gukoreshwa.
• Ubushyuhe bwinshi.Gufata neza imbere muri Granite bigabanya uburyo bwo gutigita kw'ikirere kuva hasi no ku miyoboro, bikongera imikorere y'ikiciro cyo kureremba.
• Ishobora kunyuranamo kugeza ku rwego rwa micron hejuru ya metero.Imigozi miremire ya granite ishobora gufatishwa intoki no kwemezwa ko ifite mikoroni nke mu gihe cya metero nyinshi - ikintu imashini yonyine idashobora kugeraho.

3. Ni ubuhe buryo bwo kugenzura ikirere bukenewe?

Ibisobanuro biterwa n'ubwoko bw'ikimenyetso n'ubwiza bw'ikigendererwa, ariko ibikenewe bisanzwe kugira ngo habeho ubuziranengeikirere gikoresha granitesisitemu ni:

Igenzura ntiritandukanywa n'iyi mibare: gupima ubugororangingo hejuru ya metero 2 hamwe n'ubudasobanutse bwa sub-micron bisaba urwego rw'ikoranabuhanga, autocollimators cyangwa laser interferometry mu cyumba kigenzurwa n'ubushyuhe. Niyo mpamvu ubushobozi bwo gupima bw'umutanga inzira y'ubuyobozi ari ingenzi kimwe n'intebe zabo zo kuraramo - dusobanura uburyo bwacu muigenzura n'igenzura rya graniteinzira.

4. Porogaramu zisanzwe

• Platifomu za moteri zikoresha umurongo.Moteri zitagira icyuma zitanga imbaraga zoroshye nta gufunga; hamwe n'inzira z'umwuka za granite, ibyiciro bigera ku butumburuke bwa sub-micron ku muvuduko wa 1-2 m / s - imiterere isanzwe yo kugenzura wafer no gupima laser.
• Ibyiciro byo gukora neza bya XY.Ibyiciro by’umwuka uteretse cyangwa uteretse ku gitereko cya granite bituma habaho gusubiramo kurwego rwa nanometero kuri lithography-metrology iri hafi, amakarita y’ubushakashatsi n’igenzura ry’ibyerekanwa.
• Sisitemu zo kugenzura amaso.Sisitemu zo gupima amashusho zikoresha uburyo bwa Confocal, interferometric na chromatic zikenera uburyo bwo gupima amashusho butagira vibration, kandi nta kwangirika kw'amashusho; filime idakoraho nta bice by'umubiri yongeraho cyangwa ngo ikore hysteresis.
• Ibipimo ngenderwaho n'ibipimo bya laboratwari.Imodoka zitwara umwuka ku miyoboro ya granite zikora aho isuku n'ubuziranenge bw'imiterere y'ikirere ari ngombwa.

Muri ibi bihe byose, granite igira inshingano ebyiri icyarimwe: imiterere y’inyubako n’inzira iyobora neza. Guhuza byombi mu bikoresho bimwe - inzira imwe yo gufunga, imwe ikoreshwa mu bushyuhe, imwe ihabwa icyemezo - bikuraho aho byashoboraga gutera amakosa. Ibisobanuro birambuye ku ikoreshwa biraboneka muri twe.ibikoresho bya semiconductoribisubizo.

5. Inyandiko z'igishushanyo mbere yo kugisobanura

1. Sobanura ingendo, umutwaro n'aho imbaraga zigarukira— Uburemere bwa firime n'uburyo ikoreshwa mbere yo kuyishyiramo ni ingano ikikije.
2. Garagaza ubwiza bw'umwuka— ubusanzwe umwuka usukuye kandi wumye ufite akayunguruzo kagera kuri 0.01 µm; agahu kaba gasukuye nk'uko amazi aboneka.
3. Hitamo itariki yo gupima— ni nde ufite icyerekezo cyo kugororoka: icyuma gitanga ubwikorezi, icyuma gitanga inkingi, cyangwa sisitemu iteranijwe?
4. Tegura ibidukikije— 20 ± 0.5 °C hamwe n'ishingiro ritandukanye n'ihindagurika ry'ikirere bibungabunga imiterere yemewe.
5. Saba raporo y'igenzura hamwe n'igice— Ingano z’ubugororangingo/ubugororangingo zapimwe hakoreshejwe uburyo bwo kumenya no gukurikirana igikoresho, atari inyuguti y’icyiciro gusa.

Umwanzuro

Ibyuma by'umwuka n'ibya granite ni bimwe: ibyuma bitanga imikorere idahindagurika, naho granite itanga ubuso buhamye, butuje kandi budafite uduce duto butuma filime ikora. Iyo byombi byakozwe kandi bigasuzumwa hamwe, umusaruro uba mwiza ku buryo sisitemu zo gukorana zidashobora kugera kuri byo.

Urimo gutegura urwego rwo gutwara umwuka cyangwa urubuga rwo kugenda? Twoherereze urwego rw'ingendo, imitwaro, uburyo bworoshye n'igishushanyo mbonera cy'aho uherereye - ZHHIMG® izatunganya kandi yemeze ibice by'inzira ya granite kuri sisitemu yawe, hamwe na raporo y'igenzura ishobora gukurikiranwa.