♦ Alumina (Al2O3)
Ibice bya ceramic byuzuye byakozwe na ZhongHui Intelligent Manufacturing Group (ZHHIMG) birashobora gukorwa mubikoresho byibanze byera bya ceramic, 92 ~ 97% alumina, 99.5% alumina,> 99,9% alumina, hamwe na CIP ikonje isostatike.Ubushyuhe bwo hejuru no gutunganya neza, uburinganire bwa ± 0.001mm, ubworoherane bugera kuri Ra0.1, koresha ubushyuhe bugera kuri dogere 1600.Amabara atandukanye yubutaka arashobora gukorwa ukurikije ibyo abakiriya basabwa, nka: umukara, umweru, beige, umutuku wijimye, nibindi. ikoreshwa igihe kirekire mubushyuhe bwinshi, vacuum na gaze yangiza ibidukikije.
Byakoreshejwe cyane mubikoresho bitandukanye bitanga umusaruro wa semiconductor: Frames (ceramic bracket), Substrate (base), Arm / Bridge (manipulator) ,, Ibikoresho bya mashini hamwe na Ceramic Air Bearing.
| izina RY'IGICURUZWA | Isuku ryinshi 99 Alumina Ceramic Square Tube / Umuyoboro / Inkoni | |||||
| Ironderero | Igice | 85% Al2O3 | 95% Al2O3 | 99% Al2O3 | 99.5% Al2O3 | |
| Ubucucike | g / cm3 | 3.3 | 3.65 | 3.8 | 3.9 | |
| Gukuramo Amazi | % | <0.1 | <0.1 | 0 | 0 | |
| Ubushyuhe | ℃ | 1620 | 1650 | 1800 | 1800 | |
| Gukomera | Mohs | 7 | 9 | 9 | 9 | |
| Imbaraga Zunamye (20 ℃)) | Mpa | 200 | 300 | 340 | 360 | |
| Imbaraga zo guhonyora | Kgf / cm2 | 10000 | 25000 | 30000 | 30000 | |
| Igihe kirekire Gukora Ubushyuhe | ℃ | 1350 | 1400 | 1600 | 1650 | |
| Icyiza.Ubushyuhe bwo gukora | ℃ | 1450 | 1600 | 1800 | 1800 | |
| Ingano yo Kurwanya | 20 ℃ | Ω.cm3 | > 1013 | > 1013 | > 1013 | > 1013 |
| 100 ℃ | 1012-1013 | 1012-1013 | 1012-1013 | 1012-1013 | ||
| 300 ℃ | > 109 | > 1010 | > 1012 | > 1012 | ||
Gushyira mubikorwa byiza bya alumina ceramics:
1. Bikoreshwa mubikoresho bya semiconductor: ceramic vacuum chuck, gukata disiki, gusukura disiki, CHUCK ceramic.
2. Ibice byoherejwe bya Wafer: gufata wafer, gukata wafer, disiki yoza wafer, ibikombe byo kugenzura wafer optique.
3. LED / LCD yibikoresho byerekana inganda: ceramic nozzle, ceramic gusya disiki, PIN LIFT PIN, gari ya moshi.
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5. Ibice birwanya ubushyuhe kandi bitanga amashanyarazi: ibyuma bya ceramic.
Kugeza ubu, aluminium oxyde ceramics irashobora kugabanywamo ubuziranenge bwinshi nubutaka busanzwe.Urutonde rwinshi rwa aluminium oxyde ceramics yerekana ibintu byubutaka birimo 99.9% Al₂O₃.Kubera ubushyuhe bwacyo bugera kuri 1650 - 1990 ° C hamwe nuburebure bwacyo bwa metero 1 ~ 6 mm, ubusanzwe butunganyirizwa mubirahuri byahujwe aho kuba platine ikomeye: ishobora gukoreshwa nkumuyoboro wa sodiumi bitewe no kwanduza urumuri no kurwanya ruswa. icyuma cya alkali.Mu nganda za elegitoroniki, irashobora gukoreshwa nkibikoresho byihuta cyane byo kubika insimburangingo ya IC.Ukurikije ibintu bitandukanye bigize oxyde ya aluminium, urukurikirane rusanzwe rwa aluminium oxyde ceramic rushobora kugabanywamo ibice 99 byubutaka, 95 ceramique, 90 ceramique na 85 ceramics.Rimwe na rimwe, ububumbyi bufite 80% cyangwa 75% bya aluminium oxyde nayo ishyirwa mubikorwa nkibisanzwe bya aluminium oxyde ceramic.Muri byo, ibikoresho 99 bya aluminium oxyde ceramic bikoreshwa mugukora ubushyuhe bwo hejuru cyane, itanura ryaka umuriro hamwe nibikoresho bidasanzwe birwanya kwambara, nkibikoresho bya ceramic, kashe ya ceramic na plaque.95 aluminium ceramics ikoreshwa cyane nkigice cyihanganira kwangirika.85 ceramics ikunze kuvangwa mubintu bimwe na bimwe, bityo igateza imbere amashanyarazi nimbaraga za mashini.Irashobora gukoresha molybdenum, niobium, tantalum nizindi kashe zicyuma, kandi zimwe zikoreshwa nkibikoresho bya vacuum.
| Ikintu cyiza (Agaciro gahagarariye) | izina RY'IGICURUZWA | AES-12 | AES-11 | AES-11C | AES-11F | AES-22S | AES-23 | AL-31-03 | |
| Ibikoresho bya Shimi Bike-Sodium Byoroshye Ibicuruzwa | H₂O | % | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 |
| LOl | % | 0.1 | 0.2 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | |
| Fe₂0₃ | % | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 | |
| SiO₂ | % | 0.03 | 0.03 | 0.03 | 0.03 | 0.02 | 0.04 | 0.04 | |
| Na₂O | % | 0.04 | 0.04 | 0.04 | 0.04 | 0.02 | 0.04 | 0.03 | |
| MgO * | % | - | 0.11 | 0.05 | 0.05 | - | - | - | |
| Al₂0₃ | % | 99.9 | 99.9 | 99.9 | 99.9 | 99.9 | 99.9 | 99.9 | |
| Hagati ya Diameter Hagati (MT-3300, uburyo bwo gusesengura laser) | μm | 0.44 | 0.43 | 0.39 | 0.47 | 1.1 | 2.2 | 3 | |
| Ingano ya Crystal | μm | 0.3 | 0.3 | 0.3 | 0.3 | 0.3 ~ 1.0 | 0.3 ~ 4 | 0.3 ~ 4 | |
| Gukora Ubucucike ** | g / cm³ | 2.22 | 2.22 | 2.2 | 2.17 | 2.35 | 2.57 | 2.56 | |
| Ubucucike bw'icyaha ** | g / cm³ | 3.88 | 3.93 | 3.94 | 3.93 | 3.88 | 3.77 | 3.22 | |
| Kugabanuka Igipimo cyumurongo wo gucumura ** | % | 17 | 17 | 18 | 18 | 15 | 12 | 7 | |
* MgO ntabwo yashyizwe mu kubara ubuziranenge bwa Al₂O₃.
* Nta fu yapima 29.4MPa (300kg / cm²), ubushyuhe bwo gucumura ni 1600 ° C.
AES-11 / 11C / 11F: Ongeraho 0.05 ~ 0.1% MgO, sinterabilité ni nziza, bityo rero ikoreshwa kuri ceramique ya aluminium oxyde ifite ubuziranenge burenga 99%.
AES-22S: Irangwa nubucucike bukabije hamwe nigabanuka rito ryumurongo wicyaha, birakoreshwa muburyo bwo gutembera hamwe nibindi bicuruzwa binini bifite ubunini busabwa.
AES-23 / AES-31-03: Ifite ubucucike buri hejuru, thixotropy hamwe nubukonje buke ugereranije na AES-22S.iyambere ikoreshwa mububumbyi mugihe iyanyuma ikoreshwa nkigabanya amazi kubikoresho bitangiza umuriro, bikamenyekana.
Ibiranga Silicon Carbide (SiC) Ibiranga
| Ibiranga rusange | Isuku yibice byingenzi (wt%) | 97 | |
| Ibara | Umukara | ||
| Ubucucike (g / cm³) | 3.1 | ||
| Kwinjiza amazi (%) | 0 | ||
| Ibiranga imashini | Imbaraga zoroshye (MPa) | 400 | |
| Modulus ikiri nto (GPa) | 400 | ||
| Gukomera kwa Vickers (GPa) | 20 | ||
| Ibiranga Ubushyuhe | Ubushyuhe ntarengwa bwo gukora (° C) | 1600 | |
| Coefficient yo kwagura ubushyuhe | RT ~ 500 ° C. | 3.9 | |
| (1 / ° C x 10-6) | RT ~ 800 ° C. | 4.3 | |
| Amashanyarazi (W / m x K) | 130 110 | ||
| Kurwanya ubushyuhe bwumuriro ΔT (° C) | 300 | ||
| Ibiranga amashanyarazi | Kurwanya amajwi | 25 ° C. | 3 x 106 |
| 300 ° C. | - | ||
| 500 ° C. | - | ||
| 800 ° C. | - | ||
| Dielectric ihoraho | 10GHz | - | |
| Gutakaza dielectric (x 10-4) | - | ||
| Ikibazo (x 104) | - | ||
| Umuvuduko wa dielectric yamashanyarazi (KV / mm) | - | ||
Ic Silicon Nitride Ceramic
| Ibikoresho | Igice | Si₃N₄ |
| Uburyo bwo gucumura | - | Umuvuduko wa gaze |
| Ubucucike | g / cm³ | 3.22 |
| Ibara | - | Icyatsi cyijimye |
| Igipimo cyo gukuramo amazi | % | 0 |
| Umusore Modulus | Gpa | 290 |
| Vickers Gukomera | Gpa | 18 - 20 |
| Imbaraga zo guhonyora | Mpa | 2200 |
| Imbaraga Zunamye | Mpa | 650 |
| Amashanyarazi | W / mK | 25 |
| Kurwanya Ubushyuhe | Δ (° C) | 450 - 650 |
| Ubushyuhe ntarengwa bwo gukora | ° C. | 1200 |
| Ingano yo Kurwanya | Ω · cm | > 10 ^ 14 |
| Umuyoboro uhoraho | - | 8.2 |
| Imbaraga za Dielectric | kV / mm | 16 |