Ese imashini ya granite izaguka bitewe n'ubushyuhe mu gihe cyo gupima wafer?

Mu isano ry'ingenzi mu gukora chips - gupima wafer, ubuhanga bw'ibikoresho bugena ubwiza bwa chips. Nk'igice cy'ingenzi cy'ibikoresho, ikibazo cyo kwaguka k'ubushyuhe bw'imashini za granite cyakuruye abantu benshi.

Igipimo cy’ubushyuhe bwa granite ubusanzwe kiri hagati ya 4 na 8 × 10⁻⁶ / ℃, kikaba kiri hasi cyane ugereranyije n’icy’ibyuma na marble. Ibi bivuze ko iyo ubushyuhe buhindutse, ingano yabyo ihinduka gato cyane. Ariko, ni ngombwa kumenya ko kwaguka guke kw’ubushyuhe ntibivuze ko nta kwaguka k’ubushyuhe. Mu gihe cy’ihindagurika rikomeye ry’ubushyuhe, ndetse no kwaguka guke cyane bishobora kugira ingaruka ku buryo bugaragara bwo gupima wafer.

Mu gihe cyo gupima wafer, hari impamvu nyinshi zituma habaho kwaguka k'ubushyuhe. Ihindagurika ry'ubushyuhe mu icupa, ubushyuhe buterwa n'imikorere y'ibikoresho, hamwe n'ubushyuhe bwinshi buhita buterwa no gutunganya laser byose bizatuma ishingiro rya granite "ryaguka kandi rigacika bitewe n'impinduka z'ubushyuhe". Iyo ishingiro rimaze kwaguka, imiterere y'umurongo uyobora n'ubugari bw'urukuta bishobora gutandukana, bigatuma inzira idahwitse y'ameza ya wafer igenda. Ibice by'urumuri bishyigikira nabyo bizahinduka, bigatuma urumuri rwo gupima "ruhinduka". Gukora igihe kirekire nabyo bizakusanya amakosa, bigatuma imiterere irushaho kuba mibi.

Ariko ntugire ikibazo. Abantu basanzwe bafite ibisubizo. Ku bijyanye n'ibikoresho, imitsi ya granite ifite igipimo cyo hasi cy'ubushyuhe izatoranywa kandi ikoreshwe mu gusaza. Ku bijyanye no kugenzura ubushyuhe, ubushyuhe bw'aho bakorera bugenzurwa neza kuri 23±0.5℃ cyangwa ndetse munsi yayo, kandi igikoresho gikoresha ubushyuhe kizakoreshwa mu gukwirakwiza ubushyuhe. Ku bijyanye n'imiterere y'inyubako, imiterere ingana n'inkunga yoroshye irakoreshwa, kandi kugenzura mu buryo nyabwo bikorwa binyuze mu byuma bipima ubushyuhe. Amakosa aterwa no guhinduka k'ubushyuhe akosorwa hifashishijwe algorithm.

Ibikoresho byo mu rwego rwo hejuru nka ASML lithography machines, binyuze muri ubu buryo, bituma ingaruka zo kwaguka k'ubushyuhe bw'ifatizo rya granite ziba nto cyane, bigatuma uburyo bwo gupima wafer bugera ku rwego rwa nanometer. Kubwibyo, igihe cyose igenzuwe neza, ifatizo rya granite rikomeza kuba amahitamo yizewe ku bikoresho byo gupima wafer.