Imashini ya granite izaguka kubera ubushyuhe mugihe cyo gusikana wafer?

Mumuhuza wingenzi wo gukora chip - gusikana wafer, ubunyangamugayo bwibikoresho bigena ubwiza bwa chip. Nkigice cyingenzi cyibikoresho, ikibazo cyo kwagura ubushyuhe bwimashini ya granite yashimishije cyane.

Coefficient yo kwagura ubushyuhe bwa granite mubusanzwe iri hagati ya 4 na 8 × 10⁻⁶ / ℃, iri munsi cyane yicyuma na marble. Ibi bivuze ko iyo ubushyuhe buhindutse, ubunini bwabwo burahinduka gake. Ariko, twakagombye kumenya ko kwagura ubushyuhe buke bidasobanura ko nta kwaguka kwinshi. Mugihe cy'imihindagurikire yubushyuhe bukabije, ndetse no kwaguka gato bishobora kugira ingaruka kuri nanoscale yukuri ya scan ya wafer.

Mugihe cyo gusikana wafer, hariho impamvu nyinshi zituma habaho kwaguka kwinshi. Imihindagurikire yubushyuhe mu mahugurwa, ubushyuhe buturuka ku mikorere y’ibikoresho, hamwe n’ubushyuhe bwo hejuru ako kanya buzanwa no gutunganya lazeri byose bizatera base granite "kwaguka no kugabanuka bitewe n’imihindagurikire y’ubushyuhe". Iyo shingiro imaze kwaguka yubushyuhe, kugororoka kwa gari ya moshi iyobora hamwe nuburinganire bwa platifomu birashobora gutandukana, bikavamo inzira idahwitse yinzira ya wafer. Ibikoresho bifasha optique nabyo bizahinduka, bitera urumuri rwo gusikana "gutandukana". Gukora ubudahwema umwanya muremure nabyo bizarundanya amakosa, bigatuma ubunyangamugayo bubi kandi bubi.

Ariko ntugire ikibazo. Abantu basanzwe bafite ibisubizo. Kubijyanye nibikoresho, imitsi ya granite ifite coefficient yo hasi yo kwagura ubushyuhe izatoranywa kandi ikorwe no gusaza. Kubijyanye no kugenzura ubushyuhe, ubushyuhe bwamahugurwa bugenzurwa neza kuri 23 ± 0.5 ℃ cyangwa ndetse no munsi, kandi igikoresho gikwirakwiza ubushyuhe nacyo kizakorerwa shingiro. Kubijyanye nigishushanyo mbonera, imiterere ihuriweho hamwe ninkunga ihindagurika iremewe, kandi kugenzura-igihe-bikorwa bikorwa binyuze mu byuma byerekana ubushyuhe. Amakosa yatewe no guhindura amashyanyarazi akosorwa muburyo bwa algorithms.

Ibikoresho byo mu rwego rwo hejuru nka ASML imashini ya lithographie, binyuze muri ubu buryo, igumane ingaruka zo kwagura ubushyuhe bwa base ya granite murwego ruto cyane, bituma wafer yogusuzuma neza kugirango igere kurwego rwa nanometero. Kubwibyo, mugihe cyose igenzuwe neza, granite base ikomeza guhitamo kwizerwa kubikoresho byo gusikana wafer.