Impamvu abakora ibikoresho bya semiconductors bagaragaza ishingiro rya granite karemano - Impamvu 5 z'ingenzi

Mu isi ikomeye yo gukora semiconductor, aho ingano z'ibintu zipimirwa muri nanometero, urufatiro rw'imashini ni ingenzi cyane nk'urumuri cyangwa sisitemu yo gusohora imyuka. Yaba imashini igenzura wafer cyangwa sisitemu ya lithography ya deep-ultraviolet (DUV), imashini zikora ibikoresho ku isi zihora zigena granite y'umukara karemano ku byuma byazo.

Ariko kuki amabuye karemano ari yo akoreshwa mu nganda zikoreshwa mu buhanga bugezweho? Dore impamvu eshanu za tekiniki zituma granite karemano iba amahitamo adasubirwamo ku bikoresho bya semiconductor.

1. Ubushyuhe buhamye cyane muri Fab

Imiterere y’ibice by’imbere (semiconductor "Front-End") isaba imiterere ihamye. Ndetse n’igice gito cy’ihindagurika ry’ubushyuhe gishobora gutuma inyubako z’icyuma zaguka, bigatera amakosa yo gutwikira cyangwa "guhindagurika" muri lithography.

Granite karemano ifite Coefficient of Thermal Expansion (CTE) iri hasi cyane. Iyo ugereranijeishingiro rya graniteKu mashini igenzura wafer ikoresheje icyuma cyangwa aluminiyumu, granite ikomeza kuba "ikonje" nubwo hari impinduka nto ku bidukikije. Ubu bushyuhe butuma inzira y'urumuri ikomeza kuba igororotse kuva kuri wafer ya mbere y'ihinduka kugeza kuri ya nyuma.

2. Gupima neza imitingito mu buryo budasanzwe kugira ngo habeho uburyo bwo gukora neza bwa nanometer

Ibikoresho bya Lithography n'ibikoresho byo gupima bifite ubushobozi bwo hejuru birakomera cyane ku “rusaku”—imitingito ituruka hasi mu ruganda, mu byuma bikonjesha, cyangwa mu byuma bikoresha roboti.

Nubwo ibyuma bikunda "gutembera" (gutembera igihe kirekire nyuma yo gukubita), granite karemano ifite ubushobozi bwo kugabanya ubushyuhe imbere. Ifata kandi igakuraho ingufu za kinetic vuba. Iyi granite igabanya ubushyuhe bw'ibikoresho bya lithography ituma imashini ibasha guhagarara vuba nyuma yo kwihuta cyane, yongera cyane "Units Per Hour" (UPH) y'igikoresho.

3. Ntikoresha amashanyarazi kandi ntikoresha amashanyarazi

Inzira za semiconductor akenshi zikoresha imirasire ya elegitoroni (E-beam) cyangwa moteri zikoresha magnetic linear zigezweho cyane. Ishingiro ry'icyuma rishobora kubangamira izi ngufu za rukuruzi cyangwa rigatuma habaho imirasire ihindagurika ibangamira uburyo sensor ikora neza.

Nk’igikoresho gikingira ibintu karemano, granite itanga urubuga rwo gupima ibintu rudakoresha ingufu za rukuruzi mu byumba byo gusukura. Ntibibangamira ibidukikije bya electromagnetic by’igikoresho, bigatuma amakuru meza kandi adafite umwanda mu gihe cyo gupima imiterere y’ubutaka cyangwa gusuzuma inenge.

4. Kurwanya ingese no guhuza isuku n'aho umuntu akorera

Mu cyumba cy'isuku (icyiciro cya 1 cyangwa icya 10), gusohora imyuka no gukora uduce duto ni abanzi b'umusaruro. Bitandukanye n'icyuma gikozwe mu cyuma cyangwa mu cyuma, granite isanzwe ntabwo ikora ingese, ntikora ogisijeni, cyangwa ngo ikoreshe amarangi n'ibisigazwa bya shimi bishobora gushwanyagurika cyangwa kubura umwuka uko igihe kigenda gihita.

Granite ntigira uburozi mu buryo bwa shimi. Nubwo yashyirwa mu bikoresho byihariye byo gusukura bikoreshwa mu mashini ikora ibikoresho bya semiconductor, ikomeza ubuziranenge bwayo. Imiterere yayo ifite ubucucike bwinshi (hafi 3100kg/m³) ituma ikomeza kuba "idafite uduce" mu gihe cyose cy'ubuzima bw'ibikoresho.

5. Kugera ku "Buringanire bw'ukuri" binyuze mu gukubitana intoki

Mu nganda za semiconductor, "gorofa" ntabwo igorofa ihagije. Ibice biyigize akenshi bisaba ubuziranenge bwo ku rwego rwa nano imashini za CNC zidashobora kugeraho.

Granite karemano yemerera gukoresha intoki, inzira yo gutunganya intoki aho abahanga mu by’ubuhanga bagera ku buremere bwo kugorora bungana na ± 0.001mm. Uru rwego rwo gukora neza ni ingenzi ku byiciro bifite umwuka ukoreshwa mu byuma bigezweho byo gupima ubushyuhe, aho icyuho cy’umwuka kiri hagati y’ikibuga n’ishingiro kigomba kuguma kimwe neza mu rugendo rwose.

Akamaro ka ZHHIMG: Uburyo bwo gukora neza kuri Nano-Age

Muri UNPARALLELED (ZHHIMG), dusobanukiwe neza uburyo granite ihagaze neza mu bikoresho bya semiconductor kurusha undi muntu uwo ari we wese. Dutanga ibikoresho bya granite byakozwe mu buryo bwihariye ku bahanga ibikoresho bya semiconductor ku isi, bihariye muri ibi bikurikira:

• Ishingiro rinini cyane rijyanye n'ibikoresho byo mu bwoko bwa vacuum.

• Imirasire igezweho ku buryo bworoshye bwo gushyiramo gantry yihuta cyane.

• Ibikoresho bihujwe byo gushyiramo moteri igororotse.

Granite yacu y'umukara ifite ubucucike bwinshi iraboneka kandi igatunganywa kugira ngo ihuze n'ibipimo by'ingenzi cyane by'igenamigambi ry'isi rya semiconductor.