Kuki granite idafite vibration ikoreshwa mu bikorwa byiza iba inkingi ikomeye y'inganda za semiconductor zikora ibikoresho bya sub-nanometer?

Mu byumba bituje cyane ku isi—inganda zikora ibikoresho bya semiconductor—intambara irimo gutegurwa bucece irwanya umwanzi utagaragara: vibration. Uko inganda z’ibikoresho bya elegitoroniki ku isi zigenda zerekeza ku mipaka ya logique ya 2nm no hejuru yayo, kwihanganira kudahinduka kwa mekanike byagiye bigabanuka. Muri ibi bidukikije birimo imbaraga nyinshi, imikorere y’igikoresho cya lithography cyangwa metrology cya miliyoni nyinshi z’amadolari ifatanye cyane n’ubutaka ihagazeho. Niyo mpamvu icyifuzo cyagranite idafite vibration kuri master granite nziza cyaneIbikorwa remezo byahindutse kuva ku buryo bwo kwihaza mu buryo bw'akataraboneka bihinduka ikintu cy'ingenzi mu kunoza umusaruro.

Sisitemu gakondo zo kwitandukanya n’imitingito akenshi zibanda ku miterere y’umwuka ikora cyangwa uburyo bwo gufunga ibintu mu buryo bugoye. Ariko, abahanga mu by’ubuhanga mu by’ubuhanga mu Burayi no muri Amerika ya Ruguru bemeza ko sisitemu zikora zigira akamaro nk’uko ubushobozi bwazo buhagaze. Granite karemano, cyane cyane iyo itunganyijwe ku gipimo cya granite cyo hejuru, itanga ubucucike bw’ibintu bya sintetike bugorana kubyigana. Imiterere ya kristalo y’ibice bya gabbro na granite byatoranijwe bya ZHHIMG ikora nk'akayunguruzo karemano gatuma ibintu bihindagurika cyane, kakabya ingufu za micro-acoustic zigenda ziyongera mbere yuko zihinduka ihinduka ihinduka ihinduka ihinduka.

Iyo tuganira kuicyuma gipima ubuso bwa granite yo mu rwego rwa semiconductor, tuvuga urwego rw'ubuhanga burenze ubuziranenge busanzwe bw'ibipimo ngenderwaho by'inganda. Mu iduka risanzwe, icyuma cya Grade 00 gishobora kuba gihagije mu kugenzura ibice bya mekanike. Mu rwego rwa semiconductor, injeniyeri za ZHHIMG zigomba kubara ubuziranenge bw'ubwinshi bw'amazi, hygroscopy y'ubuso, no kugumana ubuziranenge bw'ibinyampeke mu gihe kirekire. Impinduka iyo ari yo yose mu ibuye mu myaka itanu ishobora gutuma ritakaza ubushobozi bwo kwibanda mu cyuma cya EUV (Extreme Ultraviolet). Kubwibyo, gutunganya kwacu bisaba igihe gikomeye cyo kugabanya imihangayiko, bigatuma ibuye rigera ku rwego rw'uburinganire bw'ubutaka mbere yuko ritangira gukora neza.

Akamaro kagranite idafite vibration kuri master granite nziza cyaneIkoreshwa ry’ibicuruzwa rirushaho kwiyongera bitewe n’ubwiyongere bw’ibikenewe mu gutunganya ibikomoka ku bimera bigezweho. Moteri zikoresha umuvuduko mwinshi, zitwara ibice bya bimera ku muvuduko utangaje, zitanga imbaraga zikomeye zikora. Iyo hatabayeho ishingiro rinini, ridafite imbaraga, kandi rigabanya umuvuduko, izi mbaraga zikora imihindagurikire isigaye isaba "igihe cyo guhagarara" hagati y’ibipimo. Mu gushyira mu bikorwa umuti wa granite wo mu bwoko bwa ZHHIMG, abakora ibikoresho by’ubukorikori bashobora kugabanya cyane igihe cyo guhagarara, bigatuma ibikomoka ku bimera byinshi ku isaha imwe bigabanuka kandi bigatuma ikiguzi cyose cyo gutunga ibintu kigabanuka.

Ibintu bifitanye isano n’ibidukikije muri urwo rwego nabyo bigira uruhare runini mu guhitamo ibikoresho. Icyumba cyo gusukura ni ahantu hakunze kwibasirwa cyane n’ubushyuhe aho ihindagurika ry’ubushyuhe, nubwo ryaba rito cyane, rishobora gutuma ibikoresho byaguka cyangwa bigabanyuka. ZHHIMG'sicyuma gipima ubuso bwa granite yo mu rwego rwa semiconductorIbicuruzwa bitoranywa kubera ko bifite igipimo cyo kwaguka k'ubushyuhe (CTE) kiri hasi cyane. Iyo bihujwe n'ikoranabuhanga ryacu rihuriweho ryo gukonjesha, ibi bice bya granite bitanga urubuga rudahinduka rutuma ubushyuhe bugumana ubugari bwarwo hatitawe ku bushyuhe buturuka ku bice by'ikoranabuhanga biri hejuru yarwo.

Urebye mu nganda zagutse, guhinduka ukagera ku ngano ya 300mm n'ingano ya 450mm ishobora kuba isaba ibice binini kandi bihamye by'imiterere. Iki gipimo gitanga imbogamizi idasanzwe mu buhanga: kubungabunga ubugari busesuye ku buso bunini mu gihe ibuye rikomeza "kudahungabana." ZHHIMG yabyitayeho ishora imari mu mashini nini zo gusya no gusimbuza za CNC zishobora kugera ku rwego rwa micron muri metero nyinshi z'amabuye. Ibi byemeza ko uko ibikoresho bishya bikura mu bunini, ubwiza bw'ibanze budashira.

Uretse ibikoresho, filozofiya ya ZHHIMG ishingiye ku gukorera mu mucyo mu bya tekiniki no mu buhanga mu bufatanye. Turumva ko ku mukozi w’ibikoresho by’umwimerere (OEM) muri Leta Zunze Ubumwe za Amerika cyangwa mu Muryango w’Ubumwe bw’u Burayi, kwizera ko uruhererekane rw’ibicuruzwa ari ingenzi kimwe n’uko ibuye ritambitse. Inyandiko zacu zigenzura ubuziranenge zitanga "icyemezo cy’amavuko" cyuzuye kuri buri gice cyagranite idafite vibration kuri master granite nziza cyanegutanga, gusobanura inkomoko y'ibuye, imiterere y'amabuye y'agaciro, n'ibisubizo by'ibizamini bya ultrasound. Uru rwego rwo gukomera rutuma iyo hashyizweho ishingiro rya ZHHIMG, riba igice gihoraho kandi cyizewe cy'umurage w'ibuye.

Mu gihe ubwenge bw'ubukorano n'ikoranabuhanga rigezweho bitera imbaraga nshya mu gushora imari mu byuma bipima ikirere, hakomeje gushakisha ibidukikije "bidahinduka". ZHHIMG ikomeje kwitangira iki gikorwa, inoza ubuhanga bwo gupima amabuye kugira ngo ihangane n'ibibazo by'imiterere y'ibintu bito mu gihe kizaza. Twizera ko ahazaza h'ikoranabuhanga hubatswe ku rufatiro rukomeye, kandi twishimiye gutanga ibisubizo by'ibice bya granite byo mu rwego rwa semiconductor bihamye kandi by'agaciro ku bahanga bo mu gihe cy'ikoranabuhanga.

Gushyira amabuye y’ubuziranenge ya ZHHIMG mu nyubako ni ibirenze amahitamo y’inyubako gusa—ni ukwiyemeza gukurikiza amahame yo hejuru ashoboka ya fiziki yo gupima. Mu gihe inganda zireba mu myaka icumi iri imbere y’udushya, kuba hari granite y’ubuziranenge itagira umutuzo kandi idahinduka bizaguma ari intwari ituje ya buri musaruro wa wafer watsinze.