Muri iki gihe, hamwe n’iterambere ryihuse ry’inganda zikora ibikoresho bya semiconductor, ibizamini bya IC, nk’ihuriro rikomeye ryo kwemeza imikorere ya chips, ukuri kwabyo no guhagarara kwabyo bigira ingaruka zitaziguye ku musaruro wa chips no ku guhangana kw’inganda. Uko inzira yo gukora chips ikomeje gutera imbere igana kuri 3nm, 2nm ndetse n’utundi duce twateye imbere, ibisabwa ku bice by’ingenzi mu bikoresho bipima IC birimo kugenda birushaho gukomera. Ishingiro rya granite, hamwe n’imiterere yaryo yihariye y’ibikoresho n’inyungu zaryo mu mikorere, byabaye "umufatanyabikorwa w’izahabu" w’ibikoresho bipima IC. Ni iyihe logic ya tekiniki iri inyuma y’ibi?
I. "Kudashobora guhangana n'ibibazo" by'ibanze gakondo
Mu gihe cyo gupima IC, ibikoresho bigomba kumenya neza imikorere y'amashanyarazi y'udupira tw'ibyuma, ubuziranenge bw'ibimenyetso, n'ibindi kuri nanoscale. Ariko, ishingiro ry'icyuma gakondo (nk'icyuma gishongeshejwe n'icyuma) ryagaragaje ibibazo byinshi mu mikoreshereze ifatika.
Ku ruhande rumwe, igipimo cyo kwaguka k'ubushyuhe bw'ibikoresho by'icyuma kiri hejuru cyane, akenshi kiri hejuru ya 10 × 10⁻⁶/℃. Ubushyuhe buturuka mu gihe cy'imikorere y'ibikoresho byo gupima IC cyangwa ndetse n'impinduka nto mu bushyuhe bw'ikirere bishobora gutera kwaguka gukomeye k'ubushyuhe no kugabanuka k'ishingiro ry'icyuma. Urugero, ishingiro ry'icyuma gifite uburebure bwa metero 1 rishobora kwaguka no kugabanuka kugeza kuri 100μm iyo ubushyuhe buhindutseho 10℃. Impinduka nk'izo zirahagije kugira ngo probe yo gupima ihindurwe nabi n'udupira tw'icyuma, bigatuma habaho gukora nabi bityo bigatuma amakuru y'igerageza ahindagurika.
Ku rundi ruhande, ubushobozi bwo gufunga icyuma bugabanuka, bigatuma bigorana gukoresha vuba ingufu zituruka ku mihindagurikire y’ibikoresho. Mu gihe cyo gupima ibimenyetso bikoresha frequency nyinshi, guhindagurika kwa micro-oscillation bikomeza gutera urusaku rwinshi, bikongera amakosa yo gupima ibimenyetso ku kigero kirenga 30%. Byongeye kandi, ibikoresho by'icyuma bifite ubushobozi bwo kwanga magnetism bwinshi kandi bishobora guhuzwa n'ibimenyetso bya electromagnetic by'ibikoresho byo gupima, bigatera igihombo cy'umuyoboro wa eddy n'ingaruka za hysteresis, bibangamira uburyo bwo gupima neza.
Ii. "Imbaraga zikomeye" z'ibice bya Granite
Ubushyuhe buhamye, bushyiraho urufatiro rwo gupima neza
Granite ikorwa n'uruvange rukomeye rwa kristu z'amabuye nka quartz na feldspar binyuze mu migozi ya ionic na covalent. Ingano yayo yo kwaguka k'ubushyuhe ni nto cyane, ni 0.6-5 × 10⁻⁶/℃ gusa, bingana na 1/2-1/20 y'ibikoresho by'icyuma. Nubwo ubushyuhe bwahinduka ho 10℃, kwaguka no guhindagurika kw'ishingiro rya granite rifite uburebure bwa metero 1 ni munsi ya 50nm, hafi kugera kuri "zero deformation". Hagati aho, ubwiyongere bw'ubushyuhe bwa granite ni 2-3 W/(m · K), bungana na 1/20 y'ubw'ibyuma. Ishobora gukumira neza ubwiyongere bw'ubushyuhe bw'ibikoresho, ikagumana ubushyuhe bw'ishingiro bungana, kandi ikareba ko probe y'igerageza n'agace kayo bihora bihagaze neza.
2. Guhagarika gutigita cyane bitanga ahantu hahamye ho gupima
Ubusembwa bwihariye bwa kristu n'imiterere y'ibinyampeke biri imbere muri granite biyiha ubushobozi bukomeye bwo gukwirakwiza ingufu, hamwe n'igipimo cyo guhumeka cya 0.3-0.5, kikubye inshuro zirenga esheshatu ugereranyije n'ishingiro ry'icyuma. Amakuru y'igerageza agaragaza ko munsi y'ingufu za 100Hz zo gushyushya imitingito, igihe cyo kugabanya imitingito y'ishingiro rya granite ni amasegonda 0.1 gusa, mu gihe icy'ishingiro ry'icyuma gishongeshejwe ari amasegonda 0.8. Ibi bivuze ko ishingiro rya granite rishobora guhita rihagarika imitingito iterwa no gutangira no kuzimya ibikoresho, ingaruka zo hanze, nibindi, no kugenzura uburebure bw'imitingito y'urubuga rw'igerageza muri ± 1μm, bitanga garanti ihamye yo gushyira aho probe za nanoscale ziherereye.
3. Imiterere karemano yo kurwanya ingufu za rukuruzi, bikuraho ukwivanga kw'amashanyarazi
Granite ni ibikoresho bya diamagnetiki bifite ubushobozi bwo kwaguka kwa rukuruzi bugera kuri -10 ⁻⁵. Electron z'imbere ziba mu matsinda abiri mu migozi ya shimi kandi hafi ya zose ntizigera zihuza n'imbaraga za rukuruzi zo hanze. Mu kirere gikomeye cya rukuruzi cya 10 mT, imbaraga za rukuruzi ziterwa ku buso bwa granite ziri munsi ya 0.001 mT, mu gihe ku buso bw'icyuma gishongeshejwe ari hejuru ya 8 mT. Iyi miterere karemano yo kurwanya rukuruzi ishobora gukora ahantu ho gupima ibikoresho byo gupima IC, ikarinda ingaruka za electromagnetiki zo hanze nka moteri zo mu ruganda n'ibimenyetso bya RF. Ikwiriye cyane cyane mu gupima ibintu bishobora kwanduza cyane urusaku rwa electromagnetiki, nka quantum chips na ADCs/Dacs zigezweho cyane.
Icya gatatu, ishyirwa mu bikorwa ry’iyi gahunda ryageze ku musaruro utangaje
Imikorere y’ibigo byinshi bya semiconductor yagaragaje neza agaciro k’ishingiro rya granite. Nyuma y’uko uruganda ruzwi ku isi mu gupima ibikoresho bya semiconductor rukoresheje ishingiro rya granite mu buryo bwo ku rwego rwo hejuru bwo gupima chip ya 5G, rwageze ku musaruro utangaje: uburyo ikarita ya probe ihagaze neza bwazamutse kuva kuri ± 5μm kugera kuri ± 1μm, guhindagurika kw’amakuru y’igerageza kwagabanutseho 70%, kandi igipimo cyo gupima nabi ikizamini kimwe cyagabanutse cyane kuva kuri 0.5% kugera kuri 0.03%. Hagati aho, ingaruka zo gukumira guhindagurika ziratangaje. Ibikoresho bishobora gutangira ikizamini bidategereje ko guhindagurika kwangirika, bigagabanya ukwezi kw’ikizamini kimwe ho 20% kandi byongera ubushobozi bwo gukora buri mwaka ho wafer zisaga miliyoni 3. Byongeye kandi, ishingiro rya granite rimara imyaka irenga 10 kandi ntirisaba kubungabungwa kenshi. Ugereranyije n’ishingiro ry’ibyuma, ikiguzi cyaryo muri rusange cyagabanutseho ibirenga 50%.
Icya kane, guhuza n'uburyo inganda zigenda zikora no kuyobora iterambere ry'ikoranabuhanga ryo gupima
Bitewe n'iterambere ry'ikoranabuhanga rigezweho ryo gupakira (nka Chiplet) no kwiyongera kw'ibice bishya nka chips za quantum computing, ibisabwa kugira ngo ibikoresho bikore neza mu igeragezwa rya IC bizakomeza kwiyongera. Ishingiro rya granite naryo rihora rivugururwa kandi rivugururwa. Binyuze mu gutunganya irangi ryo hejuru kugira ngo hongerwe ubushobozi bwo kudashira cyangwa mu guhuza na piezoelectric ceramics kugira ngo haboneke uburyo bwo gupima no kugabanya imbaraga mu ikoranabuhanga, birimo kwerekeza mu cyerekezo gisobanutse neza kandi cy'ubwenge. Mu gihe kizaza, ishingiro rya granite rizakomeza kurinda udushya mu ikoranabuhanga ry'inganda za semiconductor ndetse n'iterambere ryiza rya "chips zo mu Bushinwa" hamwe n'imikorere yaryo ihebuje.
Guhitamo ishingiro rya granite bivuze guhitamo igisubizo cy’ibizamini bya IC gifite ishingiro, gihamye kandi gitanga umusaruro. Byaba ari ibizamini bya chip bigezweho cyangwa ubushakashatsi bw’ikoranabuhanga rigezweho mu gihe kizaza, ishingiro rya granite rizagira uruhare runini kandi rudasimburwa.
Igihe cyo kohereza: Gicurasi-15-2025