Granite ni ibikoresho bikunzwe cyane mu nganda zitunganya wafer bitewe n’imiterere yayo idasanzwe ya mekanike no kuramba kwayo. Ni ibuye karemano ricukurwa mu mabuye hirya no hino ku isi kandi rimaze ibinyejana byinshi rikoreshwa mu bwubatsi butandukanye, harimo no gukora ibikoresho bya semiconductor. Muri iyi nkuru, turaganira ku miterere ya granite n’uburyo ikoreshwa mu bikoresho bitunganya wafer.
Imitungo ya Granite
Granite ni ibuye ry’umukara rigizwe na mica, feldspar, na quartz. Rizwiho gukomera kwaryo cyane, ubukana bwaryo, no kuramba kwaryo, bigatuma riba ibikoresho byiza cyane byo gukoresha bisaba ubushishozi n’ubuziranenge. Granite ifite ubushobozi buke bwo kwaguka kw’ubushyuhe, bivuze ko idakura cyangwa ngo igabanuke bitewe n’impinduka z’ubushyuhe, bigatuma igumaho neza. Byongeye kandi, granite irwanya ingese n’imiti, bituma iba ibikoresho byiza byo gukoreshwa mu duce duto.
Ikoreshwa rya Granite mu bikoresho byo gutunganya Wafer
Granite ni ibikoresho bikoreshwa cyane mu nganda zitunganya wafer bitewe n’imiterere yayo yihariye. Ibi bikurikira ni bimwe mu byo granite ikoresha mu bikoresho bitunganya wafer:
1. Ibikoresho bya Metrology
Granite ikoreshwa cyane mu gukora ibikoresho byo gupima, nk'imashini zipima ibintu (CMMs) na sisitemu zo gupima ibintu. Ibi bikoresho bisaba ubuso buhamye bushobora kurwanya guhinda no gushyuha. Ubukana bwinshi n'ubushyuhe buke bya granite bituma iba ibikoresho byiza byo gukoresha muri ubwo buryo.
2. Uduce twa Wafer
Uduce twa wafer tukoreshwa mu gufata wafer mu gihe cyo gukora. Utu duce dukenera ubuso bugororotse kandi buhamye kugira ngo wirinde wafer guhindagurika cyangwa guhindagurika. Granite itanga ubuso bugororotse kandi buhamye kandi burwanya guhindagurika, bigatuma iba ibikoresho byiza cyane byo gufata wafer.
3. Ibikoresho byo Gusukura Imiterere ya Chemical (CMP)
Ibikoresho bya CMP bikoreshwa mu gusiga wafers mu gihe cyo gukora. Ibi bikoresho bisaba urubuga ruhamye rushobora kurwanya imihindagurikire n'ubushyuhe. Ubukana bwiza cyane n'ubushyuhe buke bwa granite bituma iba ibikoresho byiza ku bikoresho bya CMP.
4. Ibikoresho byo kugenzura Wafer
Ibikoresho byo kugenzura wafer bikoreshwa mu gusuzuma wafers kugira ngo harebwe inenge n'inenge. Ibi bikoresho bisaba ubuso buhamye kandi burambuye kugira ngo harebwe neza ibipimo. Granite itanga ubuso buhamye kandi burambuye budashobora kugorama, bigatuma iba ibikoresho byiza byo kugenzura wafers.
Umwanzuro
Muri make, granite ni ibikoresho bikoreshwa cyane mu nganda zitunganya wafer bitewe n’imiterere yayo idasanzwe ya mekanike no kuramba kwayo. Ikunze gukoreshwa mu gukora ibikoresho bya metrology, wafer chucks, CMP tools, n'ibikoresho byo kugenzura wafer. Uruvange rwihariye rw'imiterere rutuma iba ibikoresho byiza byo gukoresha bisaba ubushishozi n'ubunyangamugayo. Kubera ibyiza byinshi ifite, granite iracyari amahitamo akunzwe cyane ku bikoresho bitunganya wafer, kandi ikoreshwa ryayo rishobora gukomeza kwiyongera mu gihe kizaza.
Igihe cyo kohereza: Ukuboza-27-2023
