Granite ni iki ikoreshwa mubikoresho byo gutunganya wafer?

Granite ni ibikoresho bizwi cyane mu nganda zitunganya wafer kubera imiterere yihariye ya mashini kandi iramba.Ni ibuye risanzwe ryacukuwe muri kariyeri ku isi yose kandi rikaba rimaze ibinyejana byinshi rikoreshwa mu bikorwa bitandukanye byo kubaka, harimo no gukora ibikoresho bya semiconductor.Muri iyi ngingo, tuzaganira ku miterere ya granite nuburyo bukoreshwa mubikoresho byo gutunganya wafer.

Ibyiza bya Granite

Granite ni urutare rwaka rugizwe na mika, feldspar, na quartz.Azwiho imbaraga zidasanzwe, gukomera, no kuramba, bigatuma iba ibikoresho byiza kubisabwa bisaba uburinganire bwuzuye kandi bwuzuye.Granite ifite coefficient nkeya yo kwagura ubushyuhe, bivuze ko itaguka cyangwa ngo igabanuke kubera ihindagurika ryubushyuhe, bigatuma ihagarara neza.Byongeye kandi, granite irwanya ruswa n’imiti, bigatuma iba ibikoresho byiza byo gukoresha ahantu habi.

Porogaramu ya Granite mubikoresho byo gutunganya Wafer

Granite ni ibikoresho bikoreshwa cyane munganda zitunganya wafer kubera guhuza ibintu byihariye.Ibikurikira nibimwe mubisabwa bya granite mubikoresho byo gutunganya wafer:

1. Ibikoresho bya Metrology

Granite isanzwe ikoreshwa mugukora ibikoresho bya metrologiya, nka mashini yo gupima imashini (CMMs) hamwe na sisitemu yo gupima optique.Ibi bikoresho bisaba ubuso butajegajega bushobora kurwanya kunyeganyega nubushyuhe.Gukomera kwinshi hamwe no kwagura ubushyuhe buke bwa granite bituma iba ibikoresho byiza nkibi bikorwa.

2. Wafer Chucks

Amashanyarazi ya Wafer akoreshwa mu gufata wafer mugihe cyo gukora.Iyi chucks isaba ubuso butajegajega kandi butajegajega kugirango wirinde wafer guhindagurika cyangwa kunama.Granite itanga ubuso butajegajega kandi bwihanganira kurwana, bukaba ibikoresho byiza kuri wafer chucks.

3. Ibikoresho bya Shimi ya mashini (CMP)

Ibikoresho bya CMP bikoreshwa mu gusya wafer mugihe cyo gukora.Ibi bikoresho bisaba urubuga ruhamye rushobora kurwanya kunyeganyega nubushyuhe.Gukomera kwiza hamwe no kwagura ubushyuhe buke bwa granite bituma iba ibikoresho byiza kubikoresho bya CMP.

4. Ibikoresho byo kugenzura Wafer

Ibikoresho byo kugenzura wafer bikoreshwa mugusuzuma waferi inenge ninenge.Ibi bikoresho bisaba ubuso butajegajega kandi buringaniye kugirango hamenyekane ibipimo nyabyo.Granite itanga ubuso butajegajega kandi buringaniye burwanya intambara, bukaba ibikoresho byiza kubikoresho byo kugenzura wafer.

Umwanzuro

Mu gusoza, granite ni ibikoresho bikoreshwa cyane mu nganda zitunganya wafer kubera imiterere yihariye ya mashini kandi iramba.Bikunze gukoreshwa mugukora ibikoresho bya metrologiya, wafer chucks, ibikoresho bya CMP, nibikoresho byo kugenzura wafer.Ihuriro ryihariye ryimiterere ituma iba ibikoresho byiza kubisabwa bisaba uburinganire bwuzuye kandi bwuzuye.Hamwe ninyungu nyinshi, granite ikomeje guhitamo gukundwa kubikoresho byo gutunganya wafer, kandi imikoreshereze yayo irashobora gukomeza kwiyongera mugihe kizaza.