Ibikoresho byo kugenzura ibikoresho bya Wafer: Igitabo cyimyaka 10 Kugereranya hagati ya Granite nicyuma.

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Mu rwego rwo gukora semiconductor, ubunyangamugayo bwibikoresho byo kugenzura wafer bigena neza ubwiza numusaruro wa chip. Nka fondasiyo ishyigikira ibice byingenzi byo gutahura, ihame ryimiterere yibikoresho fatizo bigira uruhare runini mubikorwa byigihe kirekire byimikorere yibikoresho. Granite hamwe nicyuma nibikoresho bibiri bikunze gukoreshwa mubikoresho byo kugenzura wafer. Ubushakashatsi bumaze imyaka 10 bugereranya bwerekanye itandukaniro rinini hagati yabo mubijyanye no guhagarara neza, gutanga ibisobanuro byingenzi byo guhitamo ibikoresho. ?
Ubushakashatsi bwibanze hamwe nigishushanyo
Igikorwa cyo gukora waferi ya semiconductor gifite ibisabwa cyane kugirango tumenye neza. Ndetse na micrometero-urwego rwo gutandukana irashobora gutuma igabanuka ryimikorere ya chip cyangwa se gusiba. Kugirango hamenyekane ituze rya granite hamwe nicyuma mugihe cyo gukoresha igihe kirekire, itsinda ryubushakashatsi ryateguye ubushakashatsi bwigana aho bukorera. Icyitegererezo cya Granite hamwe n’ibyuma byerekana ibintu bimwe byatoranijwe hanyuma bishyirwa mu cyumba cy’ibidukikije aho ubushyuhe bwahindutse kuva kuri 15 ℃ kugeza 35 ℃ naho ubuhehere bukava kuri 30% bukagera kuri 70% RH. Kunyeganyega kwa mashini mugihe cyo gukora ibikoresho byagereranijwe binyuze kumeza yinyeganyeza. Ibipimo by'ingenzi by'icyitegererezo byapimwe buri gihembwe hifashishijwe interineti ihanitse cyane, kandi amakuru yakomeje kwandikwa mu myaka 10. ?

Ibisubizo byubushakashatsi: Inyungu yuzuye ya granite
Imyaka icumi yamakuru yubushakashatsi yerekana ko granite substrate yerekana ituze ritangaje. Coefficient yayo yo kwagura ubushyuhe ni hasi cyane, ugereranije 4,6 × 10⁻⁶ / only. Munsi yubushyuhe bukabije, gutandukana kurwego bigenzurwa muri ± 0.001mm. Imbere yubushyuhe bwimihindagurikire, imiterere yubucucike bwa granite ituma hafi ya byose bitagira ingaruka, kandi nta mpinduka zapimwe zibaho. Muburyo bwo kunyeganyega kumashanyarazi, ibintu byiza biranga granite bikurura neza imbaraga zinyeganyega, kandi ihindagurika ryibipimo ni rito cyane. ?
Ibinyuranye, kubutaka bwicyuma, impuzandengo yacyo yo kwagura ubushyuhe igera kuri 11 × 10⁻⁶ / ℃ - 13 × 10⁻⁶ / ℃, kandi gutandukana kwinshi guterwa nihindagurika ryubushyuhe mumyaka 10 ni ± 0.05mm. Ahantu h'ubushuhe, ibyuma bikozwe mu cyuma bikunda kubora no kubora. Ingero zimwe zerekana ihinduka ryaho, kandi gutandukana kurwego biriyongera. Mubikorwa byo kunyeganyega kwa mashini, icyuma gikozwe gifite imikorere mibi yo kunyeganyega kandi ingano yacyo ihindagurika kenshi, bigatuma bigorana kuzuza ibisabwa byuzuye byo kugenzura wafer. ?
Impamvu y'ingenzi yo gutandukanya umutekano
Granite yashinzwe mumyaka miriyoni amagana binyuze mubikorwa bya geologiya. Imiterere yimbere ni yuzuye kandi irasa, kandi imyunyu ngugu ya kirisiti itunganijwe neza, ikuraho imihangayiko yimbere muri kamere. Ibi bituma itumva cyane impinduka mubintu byo hanze nkubushyuhe, ubushuhe hamwe no kunyeganyega. Ibyuma bikozwe mucyuma bikozwe mu guta kandi bifite inenge za microscopique nk'imyobo n'umwobo imbere. Hagati aho, imihangayiko isigaye iterwa mugihe cyo gukina ikunda gutera impinduka zingana no gukurura ibidukikije. Ibintu byuma byuma byuma bituma bikunda kubora bitewe nubushuhe, kwihuta kwangirika kwimiterere no kugabanya ihame ryimiterere. ?
Ingaruka ku bikoresho byo kugenzura wafer
Ibikoresho byo kugenzura bya Wafer bishingiye kuri substrate ya granite, hamwe nibikorwa byayo bihamye, birashobora kwemeza ko sisitemu yubugenzuzi ikomeza neza cyane igihe kirekire, kugabanya imanza zitari zo no kubura gutahura biterwa no kugendana neza n’ibikoresho, kandi bikazamura cyane umusaruro w’ibicuruzwa. Hagati aho, ibisabwa bike byo kubungabunga bigabanya ubuzima bwuzuye bwibikoresho. Ibikoresho ukoresheje ibyuma byubatswe, bitewe nuburinganire buke, bisaba guhinduranya no kubungabunga. Ibi ntabwo byongera amafaranga yo gukora gusa ahubwo birashobora no kugira ingaruka kumiterere yumusaruro wa semiconductor bitewe nubusobanuro budahagije, bigatera igihombo cyubukungu. ?
Ukurikije inganda za semiconductor zikurikirana neza kandi zifite ireme ryiza, guhitamo granite nkibikoresho fatizo byibikoresho byo kugenzura wafer nta gushidikanya ko ari intambwe nziza yo kwemeza ibikoresho no kuzamura ubushobozi bw’ibigo. ?