Ese?
Mu rwego rwo gukora ibikoresho bya semiconductor, bikurikiza ubuziranenge buhanitse, igipimo cyo kwaguka k'ubushyuhe ni kimwe mu bipimo by'ingenzi bigira ingaruka ku bwiza bw'ibicuruzwa no kudatezuka k'umusaruro. Mu gihe cyose cy'ibikorwa kuva kuri fotolithography, gushushanya kugeza ku gupakira, itandukaniro riri mu gipimo cyo kwaguka k'ubushyuhe bw'ibikoresho rishobora kubangamira ubuziranenge bw'ibicuruzwa mu buryo butandukanye. Ariko, ishingiro rya granite, hamwe n'igipimo cyo kwaguka k'ubushyuhe buke cyane, ryabaye ingenzi mu gukemura iki kibazo.
Uburyo bwo gushushanya: Guhinduka k'ubushyuhe bitera kunyuranya kw'imiterere
Fotolithography ni intambwe y'ingenzi mu gukora semiconductor. Binyuze mu mashini ikoresha photolithography, imiterere y'uruziga kuri mask yimurirwa ku buso bwa wafer itwikiriwe na photoresist. Muri iki gikorwa, gucunga ubushyuhe muri mashini ikoresha photolithography no kugumana imbaraga mu mbonerahamwe y'akazi ni ingenzi cyane. Fata urugero rw'ibikoresho by'icyuma bisanzwe. Igipimo cyabyo cyo kwaguka k'ubushyuhe ni hafi 12 × 10⁻⁶/℃. Mu gihe mashini ikoresha photolithography, ubushyuhe buturuka ku isoko y'urumuri rwa laser, lenses z'amatara n'ibice bya mekanike bizatuma ubushyuhe bw'ibikoresho buzamuka ho 5-10 ℃. Niba icyuma gikoresha fondasiyo y'icyuma gikoresha fondasiyo, fondasiyo ifite uburebure bwa metero 1 ishobora gutuma habaho kwaguka kwa 60-120 μm, ibyo bikazatuma habaho ihinduka mu mwanya uri hagati ya mask na wafer.
Mu buryo bugezweho bwo gukora (nka 3nm na 2nm), intera ya transistor ni nanometero nke gusa. Guhinduka guto kw'ubushyuhe birahagije gutuma imiterere ya photolithography ihinduka nabi, bigatera guhuza transistor ku buryo budasanzwe, imiyoboro migufi cyangwa imiyoboro ifunguye, n'ibindi bibazo, bigatuma imikorere ya chip inanirwa. Igipimo cyo kwaguka k'ubushyuhe bw'ishingiro rya granite kiri hasi nka 0.01μm/°C (ni ukuvuga (1-2) ×10⁻⁶/℃), kandi guhinduka munsi y'impinduka imwe y'ubushyuhe ni 1/10-1/5 gusa y'icyuma. Ishobora gutanga urubuga ruhamye rwo gutwara imizigo ku mashini ya photolithography, igenzura ko imiterere ya photolithography ihererekanywa neza kandi ikongera cyane umusaruro w'ikorwa rya chip.
Gushushanya no gushyiramo: Bigira ingaruka ku buziranenge bw'imiterere y'inyubako
Guteka no gushyiramo ni inzira y'ingenzi yo kubaka inyubako z'urusobe rw'amashanyarazi rufite imiterere itatu ku buso bwa wafer. Mu gihe cyo gutema, gaze ikora ihinduka ikoresheje imiti hamwe n'ibikoresho byo hejuru bya wafer. Hagati aho, ibice nk'amashanyarazi ya RF n'uburyo bwo kugenzura ubwiyongere bw'amazi mu bikoresho bitanga ubushyuhe, bigatuma ubushyuhe bwa wafer n'ibikoresho byiyongera. Iyo igipimo cyo kwaguka k'ubushyuhe bw'icyuma gitwara wafer cyangwa igikoresho kidahuye n'icya wafer (igipimo cyo kwaguka k'ubushyuhe bw'ibikoresho bya silicon kingana na 2.6 × 10⁻⁶/℃), ubushyuhe buzavuka iyo ubushyuhe buhindutse, bishobora gutera utunyangingo duto cyangwa kugorama ku buso bwa wafer.
Ubwo bwoko bw'ihindagurika buzagira ingaruka ku burebure bw'ibumba n'ubugari bw'urukuta rwo ku ruhande, bigatuma ingano y'imirongo yakuweho, binyuze mu myobo n'ibindi bidukikije itandukana n'ibisabwa mu gishushanyo. Mu buryo nk'ubwo, mu nzira yo gushyiramo icyuma gito, itandukaniro mu kwaguka k'ubushyuhe rishobora gutera stress imbere muri icyuma gito cyakuweho, bigatera ibibazo nko gucika no gushishagura icyuma, ibyo bigira ingaruka ku mikorere y'amashanyarazi no kwizerwa kw'igihe kirekire kwa chip. Gukoresha ishingiro rya granite rifite ikigereranyo cyo kwaguka k'ubushyuhe nk'icy'ibikoresho bya silicon bishobora kugabanya neza stress y'ubushyuhe no kwemeza ko inzira zo gutwika no gushyiramo icyuma zihamye kandi zihamye.
Icyiciro cyo gupakira: Kutageranya kw'ubushyuhe biteza ibibazo byo kwizera
Mu cyiciro cyo gupakira ibikoresho bya semiconductor, guhuza imiterere y’ubushyuhe hagati ya chip n’ibikoresho byo gupakira (nk’ibuye rya epoxy, ceramics, nibindi) ni ingenzi cyane. imiterere y’ubushyuhe ya silikoni, ibikoresho by’ingenzi bya chips, ni ntoya cyane, mu gihe imiterere y’ibikoresho byinshi byo gupakira iba iri hejuru cyane. Iyo ubushyuhe bwa chip buhindutse mu gihe cyo kuyikoresha, ubushyuhe buzagaragara hagati ya chips n’ibikoresho byo gupakira bitewe n’uko imiterere y’ubushyuhe itaba ihuye.
Uku gushyuha gukabije, bitewe n’ingaruka z’ubushyuhe busubiramo (nk’ubushyuhe n’ubukonje mu gihe cy’imikorere ya chip), bishobora gutuma imiyoboro y’amashanyarazi iri hagati ya chip n’igice cyo gupakira icika, cyangwa bigatuma insinga zo gufatanya ku buso bwa chip zigwa, amaherezo bigatuma amashanyarazi ahagarara. Mu guhitamo ibikoresho byo gupakira bifite ingano y’ubushyuhe hafi y’ibikoresho bya silicon no gukoresha urubuga rwo gupima granite rufite ubushyuhe buhamye kugira ngo hamenyekane neza mu gihe cyo gupakira, ikibazo cyo kudahuza neza kw’ubushyuhe gishobora kugabanuka neza, icyizere cyo gupakira gishobora kunozwa, kandi igihe cyo gukora cya chip gishobora kongerwa.
Kugenzura ibidukikije bikorerwa mu musaruro: Guhuza ibikoresho n'inyubako z'uruganda kugira ngo bibe bihamye
Uretse kugira ingaruka zitaziguye ku mikorere y’inganda, igipimo cyo kwagura ubushyuhe gifitanye isano no kugenzura ibidukikije muri rusange inganda za semiconductor. Mu mahugurwa manini yo gukora semiconductor, ibintu nko gutangira no guhagarara kwa sisitemu zo gukonjesha no gushonga kw’ubushyuhe bw’ibikoresho bishobora gutera ihindagurika ry’ubushyuhe bw’ibidukikije. Niba igipimo cyo kwagura ubushyuhe bw’ubutaka bw’uruganda, ibikoresho by’ibanze n’ibindi bikorwa remezo ari hejuru cyane, impinduka z’ubushyuhe bw’igihe kirekire zizatuma hasi hacikamo uduce n’ishingiro ry’ibikoresho, bityo bigatera ingaruka ku buryo ibikoresho bigezweho nk’imashini zifotora n’imashini zishushanya.
Mu gukoresha ibikoresho bya granite nk'inkunga no kubihuza n'ibikoresho by'ubwubatsi by'uruganda bifite coefficients nke zo kwagura ubushyuhe, ibidukikije byo gukora bishobora kugerwaho neza, bigabanye inshuro zo gupima ibikoresho no kubibungabunga bitewe n'ihindagurika ry'ubushyuhe bw'ibidukikije, kandi bigaha agaciro imikorere irambye y'umurongo utunganya ibikoresho bya semiconductor.
Ingano y’ubwiyongere bw’ubushyuhe inyura mu buzima bwose bw’inganda zikora ibikoresho bya semiconductor, kuva ku guhitamo ibikoresho, kugenzura inzira kugeza ku gupakira no gupima. Ingaruka z’ubwiyongere bw’ubushyuhe zigomba kwitabwaho cyane muri buri sano. Ishingiro rya granite, hamwe n’ingano yaryo iri hasi cyane y’ubwiyongere bw’ubushyuhe n’indi miterere myiza, bitanga urufatiro ruhamye rw’inganda zikora ibikoresho bya semiconductor kandi bikaba garanti y’ingenzi yo guteza imbere iterambere ry’inganda zikora chips mu buryo bunoze cyane.
Igihe cyo kohereza: Gicurasi-20-2025