Ingaruka yihariye ya coefficient yo kwagura amashyuza mubikorwa bya semiconductor.

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Mu rwego rwo gukora semiconductor, ikurikirana neza, coefficente yo kwagura amashyuza nimwe mubintu byingenzi bigira ingaruka kumiterere yibicuruzwa no guhagarara neza. Mubikorwa byose uhereye kuri fotolitografiya, kurigata kugeza gupakira, itandukaniro muri coefficient yo kwagura ubushyuhe bwibikoresho bishobora kubangamira ubunyangamugayo muburyo butandukanye. Nyamara, base ya granite, hamwe na coefficient ya ultra-low yo kwagura ubushyuhe, yabaye urufunguzo rwo gukemura iki kibazo. ?
Uburyo bwa Lithographie: Guhindura ubushyuhe bitera gutandukana
Photolithography nintambwe yibanze mubikorwa bya semiconductor. Binyuze mu mashini ifotora, imiterere yumuzingi kuri mask yimurirwa hejuru ya wafer yashizwemo na fotore. Muri iki gikorwa, imicungire yubushyuhe imbere yimashini ya Photolithography hamwe no guhagarara kumurimo wakazi bifite akamaro kanini. Fata urugero rw'ibyuma gakondo nk'urugero. Coefficient yo kwagura ubushyuhe ni 12 × 10⁻⁶ / ℃. Mugihe cyo gukora imashini ya Photolithography, ubushyuhe butangwa nisoko yumucyo wa laser, lens optique hamwe nibikoresho bya mashini bizatuma ubushyuhe bwibikoresho buzamuka 5-10 ℃. Niba imashini ikora ya lithographie ikoresha icyuma, icyuma gifite uburebure bwa metero 1 gishobora gutera kwaguka kwa metero 60-120, ibyo bikazana ihinduka ryumwanya ugereranije hagati ya mask na wafer. ?
Mubikorwa byiterambere byiterambere (nka 3nm na 2nm), intera ya tristoriste ni nanometero nkeya. Ihinduka rito cyane ryumuriro rirahagije kugirango ifoto ya fotolithographie idahuzwa, biganisha kuri tristoriste idasanzwe, imiyoboro migufi cyangwa imiyoboro ifunguye, nibindi bibazo, bikaviramo kunanirwa imikorere ya chip. Coefficient yo kwagura ubushyuhe bwa base ya granite iri munsi ya 0.01μm / ° C (ni ukuvuga, (1-2) × 10⁻⁶ / ℃), kandi guhindagurika munsi yubushyuhe bumwe ni 1 / 10-1 / 5 gusa byicyuma. Irashobora gutanga urubuga ruhamye rutwara imashini ifotora, ikemeza neza uburyo bwo gufotora neza no kuzamura umusaruro wibikorwa bya chip. ?

Kuzunguruka no kubitsa: bigira ingaruka kumiterere yimiterere
Kuzunguruka no kubitsa ninzira zingenzi zokubaka ibyiciro bitatu byumuzunguruko hejuru ya wafer. Mugihe cyo gutobora, gaze ya reaction ikora imiti hamwe nibikoresho byo hejuru ya wafer. Hagati aho, ibice nkibikoresho bitanga ingufu za RF hamwe nigenzura rya gazi imbere mubikoresho bitanga ubushyuhe, bigatuma ubushyuhe bwa wafer nibigize ibikoresho bizamuka. Niba coefficente yo kwagura ubushyuhe bwikwirakwizwa rya wafer cyangwa ibikoresho fatizo bidahuye nubwa wafer (coefficient yo kwagura ubushyuhe bwibikoresho bya silikoni ni hafi 2,6 × 10⁻⁶ / ℃), ubushyuhe bwumuriro buzabyara mugihe ubushyuhe bwahindutse, bushobora gutera uduce duto cyangwa guturika hejuru ya wafer. ?
Ubu bwoko bwo guhindura ibintu bizagira ingaruka ku burebure bwimbitse no guhagarikwa kwurukuta rwuruhande, bigatera ibipimo byimisozi ihanamye, binyuze mumyobo nizindi nyubako gutandukana nibisabwa. Mu buryo nk'ubwo, muburyo bwo kubika firime yoroheje, itandukaniro ryo kwaguka k'ubushyuhe rishobora gutera guhangayika imbere muri firime yabitswe, biganisha ku bibazo nko guturika no gukuramo firime, bigira ingaruka ku mikorere y'amashanyarazi no kwizerwa igihe kirekire cya chip. Gukoresha ibishingwe bya granite hamwe na coefficente yo kwagura ubushyuhe busa nubwa ibikoresho bya silikoni birashobora kugabanya neza ubushyuhe bwumuriro kandi bikagaragaza ituze nukuri kubikorwa byo guterwa no kubitsa. ?
Icyiciro cyo gupakira: Kudahuza ubushyuhe bitera ibibazo byo kwizerwa
Mu cyiciro cyo gupakira igice cya semiconductor, guhuza coefficient zo kwagura amashyuza hagati ya chip nibikoresho bipakira (nka epoxy resin, ceramics, nibindi) bifite akamaro kanini. Coefficente yo kwagura ubushyuhe bwa silicon, ibikoresho byibanze bya chip, ni bike, mugihe ibyinshi mubipfunyika biri hejuru. Iyo ubushyuhe bwa chip buhindutse mugihe cyo gukoresha, guhangayikishwa nubushyuhe bizaba hagati ya chip nibikoresho bipakira kubera kudahuza kwa coefficient zo kwagura ubushyuhe. ?
Iyi mihangayiko yubushyuhe, bitewe nubushyuhe bwikurikiranya (nko gushyushya no gukonjesha mugihe cyo gukora chip), birashobora gutuma umunaniro ucika ingingo zagurishijwe hagati ya chip na substrate yapakira, cyangwa bigatuma insinga zihuza hejuru ya chip zigwa, amaherezo bikaviramo kunanirwa guhuza amashanyarazi ya chip. Muguhitamo ibikoresho byo gupakira ibikoresho hamwe na coefficente yo kwagura ubushyuhe hafi yibikoresho bya silikoni no gukoresha urubuga rwa test ya granite hamwe nubushyuhe buhebuje bwumuriro kugirango hamenyekane neza mugihe cyo gupakira, ikibazo cyo kudahuza amashyuza kirashobora kugabanuka neza, ubwizerwe bwibipfunyika burashobora kunozwa, kandi ubuzima bwa serivisi bwa chip burashobora kuramba. ?
Kugenzura ibidukikije byangiza umusaruro: Guhuza ibikoresho hamwe ninyubako zuruganda
Usibye kugira ingaruka zitaziguye mubikorwa byo gukora, coefficient yo kwagura ubushyuhe nayo ifitanye isano no kugenzura ibidukikije muri rusange inganda zikoresha amashanyarazi. Mu mahugurwa manini ya semiconductor, ibintu nko gutangira no guhagarika sisitemu yo guhumeka no gukwirakwiza ubushyuhe bwibikoresho bishobora gutera ihindagurika ryubushyuhe bwibidukikije. Niba coefficente yo kwagura ubushyuhe bwuruganda rwuruganda, ibirindiro byibikoresho nibindi bikorwa remezo biri hejuru cyane, ihinduka ryubushyuhe bwigihe kirekire rizatera hasi kumeneka kandi umusingi wibikoresho uhindurwe, bityo bikagira ingaruka kumyizerere yibikoresho bisobanutse nkimashini zifotora hamwe nimashini zitera. ?
Ukoresheje ibishingwe bya granite nkibikoresho bifasha no kubihuza nibikoresho byubaka uruganda hamwe na coefficient nkeya yo kwagura amashyuza, hashobora gushyirwaho ibidukikije bihamye, bikagabanya inshuro za kalibibikoresho n’ibiciro byo kubungabunga biterwa n’imihindagurikire y’ubushyuhe bw’ibidukikije, no kwemeza imikorere irambye y’umurongo w’amashanyarazi. ?
Coefficient yo kwagura amashyanyarazi ikurikirana mubuzima bwose bwo gukora igice cya kabiri, kuva guhitamo ibikoresho, kugenzura inzira kugeza gupakira no kugerageza. Ingaruka zo kwagura ubushyuhe zigomba gusuzumwa cyane muri buri murongo. Ibishingwe bya Granite, hamwe na coefficient ya ultra-low yo kwaguka kwinshi nubundi buryo buhebuje, bitanga umusingi uhamye wogukora inganda za semiconductor kandi bigahinduka ingwate yingenzi mugutezimbere iterambere ryibikorwa bya chip bigana neza.