Mu rwego rwo gukora inganda zo mu rwego rwo hejuru hamwe n’ubushakashatsi bugezweho bwa siyansi, icyerekezo gihamye cyumuvuduko wikirere kireremba ni ibikoresho byingenzi kugirango ugere kubikorwa bya ultra-precision. Ikibanza cya granite nikintu cyibanze gishyigikira igice cyurubuga, kandi imikorere yacyo ifitanye isano rya hafi nakazi keza. Gusobanukirwa no kuzuza ibyo bisabwa bidukikije ntibishobora gusa gukora neza-neza imikorere yurubuga, ariko kandi nigice cyingenzi cyumushinga kugirango uzamure guhangana kwayo mubice bifitanye isano, byasobanuwe muburyo bukurikira.
1. Ubushyuhe: kugenzura neza kugirango umenye neza ituze
Nubwo granite izwiho guhagarara neza, coefficente yo kwagura ubushyuhe ntabwo ari zeru, kandi ihinduka rito ryubushyuhe rirashobora kugira ingaruka kuburinganire bwaryo. Muri rusange, coefficente yo kwagura ubushyuhe bwa granite ni 5-7 × 10⁻⁶ / ℃. Mugihe cyo gusaba ibintu byerekana neza ikirere gihindagurika ikirere, iyi mpinduka nkeya yongerewe imbaraga na platifomu, ishobora kuganisha ku gutandukana kwukuri. Kurugero, murwego rwo gukora chip ya semiconductor, inzira ya lithographie kugirango igaragaze neza ibisabwa kurwego rwa danami, ihindagurika ryubushyuhe bwibidukikije bwa 1 ° C, uburebure bwuruhande rwa metero 1 ya granite irashobora kubyara microne 5-7 zo kwagura umurongo cyangwa kugabanuka, ibyo bikaba bihagije kugirango chip lithographie itandukane, bigabanye umusaruro. Kubwibyo rero, umuyaga uhagaze neza wumuyaga ureremba ufite granite precision base, ubushyuhe bwiza bwibidukikije bukora bugomba kugenzurwa cyane kuri 20 ° C ± 1 ° C, ibigo birashobora gushyiraho sisitemu yo hejuru yubushyuhe bwo hejuru yubushyuhe, guhora ikurikirana kandi igahindura neza ubushyuhe bwibidukikije, ikagumana ubunini bwibikorwa bya granite, kugirango igenzure neza.
2.ubushuhe: kugenzura neza, kurinda imikorere shingiro
Ubushuhe nabwo bugira ingaruka zikomeye kuri granite yibanze. Ahantu h’ubushuhe buhebuje, granite iroroshye kwinjiza imyuka y’amazi, kandi hashobora kubaho kondegene hejuru, ibyo ntibizabangamira imikorere isanzwe yimikorere yikirere, ariko kandi biganisha ku isuri rirerire ryubuso bwa granite, bigabanya ukuri kwabyo nubuzima bwa serivisi. Dufashe nk'amahugurwa yo gusya ya optique nk'urugero, niba ubuhehere buri hejuru ya 60% RH mugihe kirekire, imyuka y'amazi yamamajwe hejuru yikibanza cya granite izasenya uburinganire bwa firime ireremba ikirere, bikaviramo kugabanuka kwa lens gusya neza hamwe nubusembwa bwubuso. Kubwibyo, ubuhehere bugereranije bwibidukikije bikora bigomba kugenzurwa hagati ya 40% -60% RH. Ibigo birashobora gukoresha imyuka ihumanya, ibyuma bifata ibyuma n’ibindi bikoresho kugira ngo ikurikirane kandi igenzure ubuhehere mu gihe nyacyo, hashyizweho ahantu heza h’ubushuhe bw’ibanze bwa granite, kandi ikore neza ko imikorere ihamye y’umuvuduko uva mu kirere.
3. Isuku: kugenzura byimazeyo, kurandura ibice bivangavanze
Umukungugu wumukungugu ni "umwanzi" wumuvuduko ukabije wumuyaga ugenda hejuru yikirere, kandi byangiza cyane base ya granite. Iyo uduce duto tumaze kwinjira mu cyuho cya firime ya gazi hagati ya gazi ireremba hejuru ya granite na base ya granite, birashobora gusenya uburinganire bwa firime ya gaze, bikongera ubushyamirane, ndetse bikanashushanya hejuru yikibanza, bikagira ingaruka zikomeye kumyitozo yimikorere. Mu mahugurwa ya ultra-precision yo gutunganya ibice byikirere, niba umukungugu wumukungugu wo mu kirere uguye kuri granite base, inzira yimikorere yigikoresho gishobora guteshuka, bikagira ingaruka kumikorere yibice. Kubwibyo, aho bakorera hagomba guhora hasukuye cyane kandi bigera ku gipimo cy’isuku 10,000 cyangwa kirenga. Ibigo birashobora gushungura uduce twumukungugu mukirere dushyiramo akayunguruzo keza cyane (HEPA), kandi bigasaba abakozi kwambara imyenda itagira ivumbi, ibipfukisho byinkweto, nibindi, kugirango bagabanye umukungugu uzanwa nabantu, kandi bagumane ibidukikije bikora neza cyane bya base ya granite hamwe na platifike yumuvuduko ukabije wikirere.
4. Kunyeganyega: Kwigunga neza kugirango habeho umwanya mwiza
Kunyeganyega hanze bizabangamira byimazeyo icyerekezo cyumuvuduko ukabije wikirere kireremba hejuru, nubwo base granite base ifite ubushobozi bwo kwinyeganyeza, ariko imbaraga zinyeganyega zishobora gukomeza kurenga imipaka yacyo. Kunyeganyega bituruka ku kinyabiziga gikikije uruganda no gukora ibikoresho binini bya mashini byoherezwa mu kibanza cya granite binyuze mu butaka, bikazabangamira ukuri kw'imikorere ya platifomu. Muri CMM yo mu rwego rwo hejuru, kunyeganyega birashobora gutuma habaho guhuza hagati yiperereza ryapimwe nigikorwa cyapimwe kugirango kidahungabana, bikaviramo gutandukana kwamakuru yo gupima. Kugira ngo iki kibazo gikemuke, birakenewe ko hafatwa ingamba zifatika zo kwigunga, nko gushyira udusanduku tw’ibikoresho byo kwihererana ahantu hashyizweho ibikoresho, kubaka umusingi w’ibikorwa byo kwigunga, cyangwa gukoresha uburyo bwo kwiherera bwitandukanya kugira ngo uhagarike byimazeyo kunyeganyega hanze, kandi hashyizweho ahantu hatuje kandi hatuje kugira ngo habeho urujya n'uruza rw’ikirere.
Kuzuza ibisabwa haruguru by’ibidukikije, kugirango utange ibisobanuro byuzuye kubyiza bya granite yibirindiro byumuvuduko uhamye wumuvuduko wikirere ugenda hejuru, kugirango umenye neza ko urubuga rutanga serivisi zinoze kandi zihamye zo kugenzura ibikorwa byinganda zitandukanye. Niba ibigo bishobora kwitondera aya makuru arambuye mubidukikije, bazakoresha amahirwe mubikorwa byogukora neza, ubushakashatsi bwa siyanse nizindi nzego, bizamura irushanwa ryabo, kandi bigere kumajyambere arambye.
Igihe cyo kohereza: Apr-10-2025