Uruhare rukomeye rwa Ultra-Precision Granite muri Semiconductor no Gukora Iterambere

Mwisi yisi ihanitse cyane yinganda ziciriritse, aho ibice bipimirwa muri nanometero kandi kwihanganira umusaruro bisaba microscopique neza, umusingi ubwo buhanga bwubatswe uba butagaragara ariko ni ngombwa. Muri ZHHIMG, tumaze imyaka ibarirwa muri za mirongo tunonosora ubuhanzi na siyanse yibikoresho bya ultra-precision granite-intwari zitavuzwe zituma ibikorwa byubu byateye imbere. Nkumuyobozi wisi yose mubisubizo byukuri bya granite, twishimiye gusangira uburyo 3100 kg / m³ yuzuye ya granite yumukara irimo gusobanura ibishoboka muri lithographie ya semiconductor, sisitemu ya metrologiya, hamwe nibikorwa byubukorikori byateye imbere kwisi yose.

Igitanda cyibisobanuro bigezweho: Kuki Granite?

Iyo abakora semiconductor bakora chip hamwe na tekinoroji ya 3nm - aho ubugari bwa transistor bwegera ubunini bwa atome kugiti cyabo - bashingira kubikoresho bigomba kubungabunga umutekano kurwego rwa atome. Aha niho imiterere yihariye ya granite iba idasimburwa. Bitandukanye n'ibyuma bivangwa n'ibyuma bigenda bihindagurika hamwe nubushyuhe bwubushyuhe cyangwa ibihimbano bidafite imbaraga zigihe kirekire, granite yumukara wa ZHHIMG® itanga inertie idasanzwe yubushyuhe hamwe nubushobozi bwo kugabanya imbaraga. Hamwe n'ubucucike bwa 3100kg / m³ - hejuru cyane ugereranije na granite isanzwe yo mu Burayi (ubusanzwe 2600-2800kg / m³) - ibikoresho byacu bitanga urubuga ruhamye rwa sisitemu yo kugenzura neza.

Reba imbogamizi zikabije za ultraviolet (EUV) lithographie, aho sisitemu ya optique igomba gukomeza guhuza sub-nanometero mu masaha yo gukora. Urufatiro rwa granite rushyigikira sisitemu rugomba kurwanya na microscopique yinyeganyeza ziva mubikoresho byuruganda cyangwa impinduka zibidukikije. Koeffisiyoneri yimbere yimbere ikurura ingufu zinyeganyeza inshuro 10-15 kuruta ibyuma, nkuko byagereranijwe nubushakashatsi bwakozwe na Laboratwari yigihugu (UK). Iri tandukaniro ryimikorere risobanurwa neza kumusaruro mwinshi hamwe nigipimo cyo hasi cyumusemburo muke wa semiconductor - inyungu ikomeye muruganda aho isegonda imwe yamasaha ishobora gutwara ibihumbi.

Ubwubatsi Bwiza: Kuva muri Quarry kugeza Quantum Gusimbuka

Ibyo twiyemeje gukora neza bitangirira ku isoko. Tugumana uburyo bwihariye bwo kubitsa premium granite yatoranijwe kubwuburyo bwabo bwa kristalline hamwe na minerval ntoya. Buri gice kimara amezi atandatu yikirungo karemano mbere yo kwinjira muri 200.000m² yinganda zikora hafi ya Jinan, muburyo bufatika bwo kugera ku cyambu cya Qingdao kugirango gikwirakwizwe ku isi. Ubushobozi bwacu bwo kubyaza umusaruro ntagereranywa: hamwe n’imashini enye zo muri Tayiwani Nan Teh zo gusya (buri kimwe kirenga $ 500,000 $), turashobora gutunganya ibice bimwe bipima toni 100 bifite uburebure bugera kuri 20m z'uburebure - ubushobozi buherutse kudufasha gutanga ibyiciro byabigenewe bya sisitemu yo mu bwoko bwa EUV ikora ibikoresho bizakurikiraho.

Umutima wibikorwa byacu ubarizwa muri 10,000m² Ubushyuhe nubushuhe buhoraho, aho buri gihindagurika cyibidukikije kigenzurwa neza. Uburebure bwa metero 1000mm ya ultra-ikomeye ya beto, ihujwe na 500mm z'ubugari bwa vibrasiyo yo kwigunga ikikije agace k’umusaruro, bituma habaho ibidukikije bihamye aho ubushyuhe bugumaho muri ± 0.5 ° C. Uru rwego rwo kugenzura ibidukikije ni ngombwa mugihe rukora plaque yubuso bwa granite yihanganira uburebure buri munsi ya 0,5 mm hejuru yuburebure bwa 6000mm - ibisobanuro byagenzuwe ukoresheje interineti ya Renishaw laser interferometero hamwe na Mahr precision, byose byahinduwe mubipimo byikigo cyigihugu cya metero.

Gushiraho ibipimo nganda: Impamyabumenyi no kwiyemeza ubuziranenge

Nkumushinga wonyine wa granite wuzuye ufite icyarimwe ISO 9001, ISO 14001, ISO 45001, na CE, twashyizeho ibipimo ngenderwaho bisobanura inganda. Politiki yacu nziza - "Ubucuruzi bwuzuye ntibushobora kuba busaba cyane" - buyobora buri kintu cyose mubikorwa byacu, uhereye kugenzura ibikoresho fatizo kugeza icyemezo cya nyuma. Twishimiye cyane sisitemu yo kwipimisha Metrologiya, ikubiyemo Ubudage bwa Mahr micrometero (0,5 mm ikemurwa), profilometero ya Mitutoyo, hamwe nu rwego rwa elegitoronike WYLER yo mu Busuwisi, byose bikomoka ku kigo cy’igihugu cy’Ubushinwa cya Metrology kandi kigenzurwa buri gihe binyuze muri gahunda zo kugereranya mpuzamahanga na Physikalisch-Technische Bundesanstalt (Ubudage) n’ikigo cy’igihugu gishinzwe ubuziranenge n’ikoranabuhanga (USA).

Ubu buryo butavuguruzanya bwaduteye ubufatanye n'abayobozi b'inganda barimo GE, Samsung, na ASML batanga. Iyo uruganda rukomeye rwibikoresho bya semiconductor rukeneye ibyiciro bya granite byumuyaga kugirango bigenzurwe na 300mm ya sisitemu yo kugenzura wafer, ubushobozi bwacu bwo gukora inteko 20.000 ziteranijwe neza buri kwezi byemeza ko zujuje igihe cyagenwe. Mu buryo nk'ubwo, ubufatanye bwacu na kaminuza y’ikoranabuhanga ya Nanyang yo muri Singapuru kuri karuboni fibre ikomezwa na granite ikora ni ugusunika imbibi z’imiterere yoroheje ya sisitemu yo mu gihe kizaza.

Kurenga Gukora: Gutezimbere Ubumenyi bwo gupima

Muri ZHHIMG, twemeye filozofiya ivuga ngo "niba udashobora gupima, ntushobora kuyikora." Iyi myizerere iteza imbere ubufatanye bwubushakashatsi n’ibigo nka kaminuza ya Stockholm ya Precision Engineering Lab hamwe n’Ubushinwa Changchun Institute of Optics. Hamwe na hamwe, turimo gutegura uburyo bushya bwo gupima burenze kure ya gakondo ya tactile kugirango dushyiremo optique interferometrie hamwe na tomografiya yabazwe kugirango isesengura ryimbere ryibice binini bya granite. Iterambere duheruka gukoresha mugupima ultrasonic gushushanya ikarita yimbere ya kristaline yagabanije igipimo cyo kwangwa kubintu 37% mugihe tunonosora igihe kirekire.

Ubwitange bwacu mu guteza imbere siyanse yo gupima bugaragarira muri laboratoire yacu igezweho ya metrologiya, igaragaramo icyiciro cy’isuku 100 cy’icyumba cy’isuku cyagenewe guteranya ibikoresho bya semiconductor. Hano, twigana ibicuruzwa byabakiriya bacu kugirango tumenye neza ko granite shingiro ryacu rigumana urwego rwa nanometero murwego rwo gukora. Uru rwego rwo kwiyemeza rwatugize umufatanyabikorwa wizewe mumashyirahamwe kuva muri Laboratwari ya Jet ya NASA kugeza ku isonga rya kwant computing computing itangiza sisitemu ikosora qubit.

Kubaka ejo hazaza: Kuramba no guhanga udushya

Nkuko gukora neza bigenda bihinduka, niko natwe uburyo bwacu bwo gutanga umusaruro urambye. Icyemezo cya ISO 14001 kigaragaza ubushake bwacu bwo gucunga umutungo ushinzwe, harimo na sisitemu yo gutunganya amazi ifata kandi ikavura 95% ya firimu yo gusya hamwe n’amashanyarazi akomoka ku mirasire y'izuba bikuraho 28% by'amashanyarazi dukeneye. Twateje imbere kandi tekinike yo kubona insinga ya diyama igabanya imyanda ku gipimo cya 40% ugereranije n’uburyo gakondo bwo gutunganya - iterambere rikomeye mu nganda aho ibiciro fatizo bigera kuri 35% by’umusaruro.

Urebye imbere, itsinda ryacu R&D ryibanze ku bintu bitatu bihindura: guhuza imiyoboro ya sensor mu buryo butaziguye mu nyubako ya granite yo gukurikirana ubuzima nyabwo, guteza imbere ubucucike bwa gradient igabanya ubukana bw’ibiro, hamwe na sisitemu yo gufata neza AI ikoreshwa n’ibikoresho byacu byo gukora. Udushya dushingiye ku murage wacu wa patenti mpuzamahanga zirenga 20 kandi uduha umwanya wo gushyigikira igisekuru kizaza cyo gukora semiconductor, harimo 2nm ndetse na tekinoroji ya tekinoroji.

isahani yo hejuru

Mu nganda aho ibisobanuro bisobanura bishoboka, ZHHIMG ikomeje gushyiraho ibipimo bya ultra-precision granite yibigize. Guhuza ubumenyi bwa siyansi yibikoresho, igipimo cyo gukora (20.000 buri kwezi), hamwe no kugenzura ubuziranenge butavuguruzanya byadushizeho nk'umufatanyabikorwa wo guhitamo ibigo bisunika imbibi zinganda zateye imbere. Nkuko abakora semiconductor bahura ningorabahizi za node ntoya, ubucucike buri hejuru, hamwe nububiko bukomeye bwa 3D, barashobora kwishingikiriza kuri ZHHIMG ibisubizo bya granite kugirango batange umusingi uhamye uzashingirwaho ejo hazaza h’ikoranabuhanga.

For technical specifications, certification documentation, or to discuss custom solutions for your precision manufacturing challenges, contact our engineering team at info@zhhimg.com or visit our technology center in Jinan, where we maintain a fully equipped demonstration lab showcasing our latest innovations in ultra-precision measurement and manufacturing.


Igihe cyo kohereza: Ukwakira-31-2025