Uruhare rw'ingenzi rwa Granite mu byiciro by'ubuziranenge bwa semiconductor na Metrology igezweho

Inganda zikora ibikoresho bya semiconductor ku isi ubu zirimo gukurikirana mu buryo budasubirwaho "Igihe cya Angstrom," aho ingano za transistor zipimirwa mu bugari bwa atome nke gusa. Uko lithography n'ibikoresho byo kugenzura bigenda bihinduka kuri izi minzani ntoya, icyifuzo cyo guhagarara neza mu miterere cyarahindutse kuva kuri "macro" kijya kuri "nano". Ishingiro ry'iyi mpinduramatwara ririmo ibintu bya kera nk'Isi ubwayo: Precision Granite.

Nubwo benshi babona granite nk'ibuye ryoroshye, mu rwego rwoIcyiciro cyo gushyiramo nanopositioncyangwa sisitemu yo kugenzura wafer yihuta cyane, ni ceramic igezweho. Gusobanukirwa itandukaniro riri hagati y'ibikoresho by'ibanze byo gupima n'ibikoresho bigezweho byo kugenda ni ingenzi ku bigo bitanga serivisi zo gukora ibintu bitandukanye bigamije kugabanya imbibi z'ibishoboka mu gukora silikoni.

Granite CMM vs. Granite Surface Plate: Gusobanukirwa impinduka mu buhanga

Mu ma laboratwari menshi agenzura ubuziranenge,Isahani yo hejuru ya Graniteni ikintu gikoreshwa ahantu hose—ni ikintu cyizewe kandi gihamye cyo gupima hakoreshejwe intoki. Ariko, hari igitekerezo gisanzwe cy’uko icyuma cyo hejuru n’icyuma gipima Granite CMM (Coordinate Measuring Machine) bishobora gusimburana. Ukurikije imiterere y’ubuhanga, bigaragaza urwego rubiri rw’ubugoranye.

Isahani yo hejuru yagenewe gutuza idahindagurika. Akazi kayo k'ibanze ni ugukomeza kuba ndende munsi y'umutwaro uhagaze. Ibinyuranye n'ibyo, ishingiro rya granite kuri CMM cyangwa icyiciro cyo gutunganya neza rigomba guhangana n'imizigo ihindagurika. Uko ikiraro cya CMM kigenda cyangwa moteri yihuta yihutisha icyiciro cya wafer kuri G nyinshi, granite igomba kudahinduka gusa, ahubwo no kurwanya torsion na harmonic resonance.

Injeniyeri za ZHHIMG zihitamo by’umwihariko "Black Granite" kugira ngo ikoreshwe mu buryo buhindagurika bitewe n’ubucucike bwayo bwinshi n’imiterere y’ibinyampeke byiza. Nubwo plate isanzwe ishobora gukoresha ubwoko bufite imyenge myinshi, ishingiro rya CMM risaba Young's Modulus yo hejuru ishoboka kugira ngo "ihindagurika" ry’ingendo yihuta ritavamo imiterere y’imiterere yangiza amakuru yo gupima.

Intambwe z'ubuziranenge mu gukora semiconductors: Ishingiro ry'umusaruro

Mu nganda zikora ibikoresho bya semiconductor, umusaruro uva mu nganda n'umusaruro ni byo bipimo bibiri by'ingenzi cyane. Byombi bishingiye ku mikorere yaintambwe z'ubuhangaByaba ari icyiciro cya wafer muri DUV/EUV lithography machine cyangwa sisitemu yo gushyiramo ibintu mu gikoresho cyikora cya Automated Optical Inspection (AOI), ibikoresho by'ibanze bigomba koroshya gusubiramo ibintu muri sub-nanometer.

Ikibazo cy’ingenzi muri uyu mushinga ni ubushyuhe. Moteri zikoresha umurongo n’ibikoresho bitanga ingufu nyinshi z’ubushyuhe. Iyo urufatiro rw’ikibuga rukorwa muri aluminiyumu cyangwa icyuma, kwaguka k’ubushyuhe kwatuma wafer ihinduka ikava mu murongo, bigatera "amakosa yo gutwikira" yangiza uduce twose tw’ibice.

Ubushyuhe buke cyane bwa Granite (CTE) butuma nubwo moteri zishyuha cyane, "ikarita" ifatika y'urwego ikomeza kuba nta yindi. Byongeye kandi, ZHHIMG itanga ibice bya granite byihariye bifite uburyo bwo gushyiramo umwuka. Kubera ko granite ishobora gufatirwa ku buryo bungana n'indorerwamo, ikora nk'ishusho nziza y'impande zombi z'umwuka, bigatuma ingazi "zireremba" ku gahu k'umwuka gato nta gukururana na zeru.

Fiziki y'Icyiciro cya Nanopositioning

Iyo twinjiye mu bwami bwaIcyiciro cyo gushyiramo nanoposition, turimo guhangana n'ingendo ntoya kurusha umusatsi w'umuntu ku kigero cya 10.000. Kuri uru rwego, guhindagura ni umwanzi. Inzu zisanzwe z'inganda zihora zihinda umushyitsi bitewe na sisitemu za HVAC, urujya n'uruza rw'amaguru, n'imashini ziri hafi aho.

Granite ikora nk'akayunguruzo gakomeye gatuma ibintu binyura mu buryo bworoshye. Bitewe n'uburemere bwayo bwinshi n'ubushyuhe bwinshi bw'imbere, isanzwe yinjiza imivuduko yo mu buryo bwo hejuru mbere yuko igera kuri sensor cyangwa wafer ubwayo. Iyi "kwitandukanya kw'ibintu" ni yo mpamvu abacuruza lithography bakomeye ku isi bishingikiriza kuri ZHHIMG kugira ngo batange urufatiro ruremereye kandi ruhamye rw'ibyiciro byayo bihuye n'ibyuka. Granite yacu yatunganyijwe by'umwihariko kugira ngo itagira imyuka isohoka, bigatuma ikwiriye ahantu hafite ibyuka byinshi bikenewe mu mikorere ya electron-beam na EUV.

Guhuza kugeza ku mupaka: Akamaro ka ZHHIMG

Guhinduka kuva ku ibuye risanzwe kugeza ku gice cy’imashini zitunganya utuntu duto ni urugendo rwo kwihangana cyane. Nubwo gusya CNC bitugeza hafi, amanota ya nyuma ya "Super-Precision" agerwaho binyuze mu gukubitana intoki. Iyi ni inzira aho abatekinisiye ba ZHHIMG bakoresha udupira two gukaraba no gukora ingendo n'intoki kugira ngo bogoshe ibice bya micron icyarimwe.

KuriIcyiciro cyo gushyiramo nanoposition, ubugari si bwo bwonyine busabwa; ubugari n'ubugari bw'ubuso bw'ubuyobozi nabyo ni ingenzi cyane. Ikigo cyacu gikoresha ibyuma bikurikirana imiyoboro ya laser n'urwego rw'ikoranabuhanga bifite ubushobozi bwa 0.1 arc-segonda kugira ngo harebwe ko buri murongo ugororotse neza. Uru rwego rw'ubuhanga rutuma iyo umukiriya ashyizeho moteri ze zigororotse na encoders, ishingiro rya mekanike riba hafi "ryuzuye" nkuko fiziki ibimwemerera.

Guhamya iby'ejo hazaza

Uko inganda zigenda zigana ku nsinga za 2nm no kurenzaho, ibisabwa kugira ngo ibikoresho bibe bisukuye kandi bigire ubuziranenge bizakomeza kwiyongera. Guhuza granite n'ibindi bikoresho bigezweho—nk'ibiraro bya fibre ya karubone cyangwa utubumbe twa ceramic—ni byo bizakurikiraho mu kugenzura ingendo.

ZHHIMG ikomeje kwiyemeza kuba ibirenze kuba umutanga gusa; turi abafatanyabikorwa mu bufatanye mu ruhererekane rw'ibikoresho bya semiconductor ku isi. Mu gutanga ishingiro rihamye rikenewe mu cyiciro gikurikira cy'ibipimo by'ubuhanga, turimo gufasha kubaka imashini zubaka ejo hazaza.