Uburyo bwo gukoresha module imwe y'umwuka ugenda neza cyane hakoreshejwe ishingiro rya granite.

Gukora ibikoresho bya semiconductor: Mu gukora chips, fotolithography igomba kwimurira imiterere y'uruziga neza kuri wafer. Ishingiro rya granite ry'umwuka umwe ugenda neza cyane rishobora gutanga uburyo bwo gushyiramo neza no gushyigikira ameza ya wafer mu bikoresho bya lithography. Urugero, ASML n'abandi bakora imashini za lithography bazwi ku rwego mpuzamahanga bakoresha module za granite base air floating motion mu bikoresho byabo byo mu rwego rwo hejuru, bishobora kugenzura uburyo wafer igenda neza ku rwego rwa nanometer kugira ngo birebe neza uburyo lithography igenda neza, bityo bikanoza uburyo chip igenda neza.
Uburyo bwo gupima neza: CMM ni igikoresho gipima neza gikoreshwa cyane mu nganda, gikoreshwa mu gupima ingano, imiterere n'aho igikoresho giherereye. Uburyo bwo gupima neza cyane bw'umwuka umwe ugenda ku gasongero ka granite bushobora gukoreshwa nk'urubuga rw'uburyo bwo gupima neza rwa CMM, rushobora gukora ingendo nziza kandi rutanga inzira ihamye yo gupima. Urugero, CMM yo mu rwego rwo hejuru ya Hexagon ikoresha ubu buryo bwo gupima ibice binini kandi bigoye hamwe n'uburyo bwo gupima neza kugeza ku rwego rwa micron, bitanga icyizere gikomeye cyo kugenzura ubuziranenge bw'ibice mu nganda z'imodoka, mu by'indege no mu zindi nganda.
Urwego rw'indege: Mu gutunganya no kugerageza ibice by'indege, hakenewe ubushishozi bwinshi. Urugero, gutunganya ibyuma bya moteri y'indege bisaba kugenzura neza inzira y'igikoresho kugira ngo hamenyekane neza imiterere y'icyuma. Ishingiro rya granite ry'umurongo umwe w'umwuka ugenda neza ushobora gushyirwa ku gice cy'icyuma gifite umurongo umwe n'ibindi bikoresho kugira ngo habeho kugenzura neza imikorere y'igikoresho no kwemeza ko imiterere y'icyuma ishobora kuzuza ibisabwa mu gishushanyo. Muri icyo gihe, mu guteranya moteri y'ikirere, ni ngombwa kandi gukoresha ibikoresho bipima neza kugira ngo hamenyekane neza imiterere y'ibikoresho. Itsinda ry'ibikoresho bipima neza ry'umwuka w'ibanze rya granite rishobora gutanga inkunga ihamye n'ingendo nyayo ku bikoresho bipima kugira ngo hamenyekane ubwiza bw'icyuma.
Urwego rwo kugenzura urumuri: Mu gikorwa cyo gukora no gupima ibice by'urumuri, ni ngombwa gukora imiterere n'ibipimo by'ibice by'urumuri mu buryo bunoze. Urugero, mu gukora ibice by'urumuri mu buryo bunoze nka indorerwamo n'amatara, ni ngombwa gukoresha interferometer n'ibindi bikoresho kugira ngo hamenyekane imiterere y'ubuso. Ishingiro rya granite ry'umwuka umwe ugendera ku murongo ugororotse rishobora gukoreshwa nk'urubuga rwo kwimuka rwa interferometer, rushobora kubona imiterere y'aho ibintu biherereye muri sub-micron no gutanga amakuru nyayo yo kumenya ibice by'urumuri. Byongeye kandi, mu bikoresho bitunganya laser, ni ngombwa kandi gukoresha urubuga rwo kwimuka runoze kugira ngo rugenzure inzira yo gushakisha ya laser, ishingiro rya granite ry'umwuka ugenda ku kirere rishobora kuzuza ibi bisabwa, kugira ngo hagerwe ku gutunganya laser mu buryo bunoze.