Porogaramu Umwanya wa axis imwe ireremba ultra-precision icyerekezo module ukoresheje granite base.

Gukora Semiconductor: Mubikorwa byo gukora chip, inzira ya Photolithography ikenera kwimura imiterere yumuzingi neza kuri wafer. Ikibanza cya granite yumurongo umwe wikirere kireremba ultra-precision yimikorere module irashobora gutanga umwanya uhagaze neza hamwe ninkunga ihamye kumeza wafer mubikoresho bya lithographie. Kurugero, ASML hamwe nabandi bakora imashini zizwi cyane za lithographie zikoresha imashini zikoresha granite base air floating modules mubikoresho byabo byo mu rwego rwo hejuru, zishobora kugenzura neza aho wafer ihagaze neza kurwego rwa nanometero kugirango hamenyekane neza uburyo bw'imyandikire, bityo bitezimbere guhuza no gukora chip.
Umwanya wo gupima neza: CMM ni ibikoresho byo gupima neza bisanzwe bikoreshwa mubikorwa byinganda, bikoreshwa mugupima ingano, imiterere nukuri neza kubikorwa. Moderi ya ultra-precision yimyuka yumuyaga umwe ureremba hejuru ya granite irashobora gukoreshwa nkurubuga rwimikorere rwa CMM, rushobora gutahura umurongo uhamye kandi ugatanga inzira ihamye yo gupima iperereza. Kurugero, CMM yohejuru ya CMM ikoresha ubu buryo bwo gupima ibice binini kandi bigoye hamwe no gupima neza kugeza kurwego rwa micron, bitanga garanti ikomeye yo kugenzura ubuziranenge bwibinyabiziga mumodoka, mu kirere no mu zindi nganda.
Ikibuga cy'indege: Mu gutunganya no kugerageza ibice by'ikirere, birakenewe neza. Kurugero, gutunganya ibyuma byindege yindege bisaba kugenzura neza icyerekezo cyerekezo cyigikoresho kugirango umenye neza neza icyuma. Ikibanza cya granite yumurongo umwe wikirere kireremba ultra-precision icyerekezo module irashobora gukoreshwa mubigo bitanu bitunganya imashini hamwe nibindi bikoresho kugirango bigenzurwe neza neza nigikoresho kandi urebe neza ko imashini ikora neza ishobora kuzuza ibisabwa. Muri icyo gihe, mugikorwa cyo guteranya moteri ya aero, birakenewe kandi gukoresha ibikoresho bipima neza-neza kugirango tumenye neza neza ibice. Ikirere kireremba module ya granite irashobora gutanga inkunga ihamye no kugenda neza kubikoresho bipima kugirango ubuziranenge bwinteko.
Umwanya wo kugenzura neza: Mubikorwa byo gukora no kugerageza ibice bya optique, birakenewe gukora neza-guhagarara neza no gupima ibice bya optique. Kurugero, mugihe ukora optique-optique yibikoresho nkindorerwamo na lens, birakenewe gukoresha interterometero nibindi bikoresho kugirango umenye imiterere yubuso neza. Ikibanza cya granite yumuyaga umwe ureremba ultra-precision yimikorere module irashobora gukoreshwa nkurubuga rwimikorere ya interferometero, ishobora gutahura sub-micron ihagaze neza kandi igatanga amakuru yukuri yo kumenya ibice bya optique. Byongeye kandi, mubikoresho byo gutunganya lazeri, birakenewe kandi gukoresha urubuga rwimikorere ihanitse kugirango igenzure inzira yo gusikana urumuri rwa lazeri, base ya granite ya module ireremba ikirere irashobora kuzuza iki cyifuzo, kugirango itunganyirizwe neza.