Granite ni ubwoko bw'ibuye rikomeye ryabaye ibikoresho by'ingenzi mu nganda zikora ibikoresho bya semiconductor. Imiterere yaryo ituma rishobora kwihanganira ubushyuhe bwinshi, bigatuma riba ryiza cyane mu byiciro bitandukanye byo gukora ibikoresho bya semiconductor. Kubera iyo mpamvu, guteranya granite byabonye ahantu henshi hakoreshwa mu gukora ibikoresho bya semiconductor.
Imwe mu mikoreshereze ikoreshwa cyane mu guteranya granite ni mu kubaka ibikoresho by'imashini bifite ubuhanga buhanitse. Ubukomezi n'ubudahangarwa bya granite bituma bishoboka gukora ibikoresho bifite ubuziranenge kandi bidafite ubusumbane buhagije cyangwa nta na bumwe. Uru rwego rwo gukora neza ni ngombwa mu bikorwa bya semiconductor nko guteranya iron, aho umurambararo ugomba kwerekezwa neza kuri wafer.
Indi mikoreshereze y’iteranya rya granite mu nganda zikora ibikoresho bya metrology ni mu bwubatsi bw’ibikoresho bya metrology. Ibikoresho bya metrology ni ingenzi mu nganda zikora ibikoresho bya metrology kuko bipima kandi bigasuzuma neza uburyo ibikoresho bikorerwamo. Ubuziranenge bwa granite butuma ihinduka, ubushyuhe buke, hamwe n’ubushobozi bwiza bwo kudakoresha imitingito bituma iba ibikoresho bikundwa cyane mu bwubatsi bw’ibikoresho bya metrology. Ibi birimo ubuso bunini bwa granite bukoreshwa mu gutunganya no kugenzura wafers.
Ameza y'urumuri ni ikindi gice gikoreshwa cyane mu guteranya granite mu nganda za semiconductor. Ameza y'urumuri akoreshwa mu kugerageza ibikoresho by'urumuri nka waveguides zo gutumanaho amakuru. Uburemere bwa granite, kwaguka k'ubushyuhe buke, gukomera cyane, no kudahindagurika kwa mashini bituma itanga ubuso buhamye bwo gushyiraho no gushyira optique mu mwanya wayo. Ameza y'urumuri ya Granite ashobora gutanga gutuza no gukomera bikenewe kugira ngo hakorwe isuzuma ry'ibikoresho by'urumuri neza kandi neza.
Granite ikoreshwa kandi mu kubaka uduce twa wafer na stages. Mu gihe cyo gukora semiconductor, guhuza neza no kugenzura aho iherereye ni ingenzi cyane. Uduce twa wafer, dufata wafer mu mwanya wayo mu gihe cyo gutunganya, tugomba kugumana imiterere myiza mu gihe twihanganira ubushyuhe bwinshi n'ibihe byo gusohora umwuka. Granite ifite ubushobozi bwo kwihanganira ubushyuhe bwinshi kandi ishobora kwihanganira ibihe byo gusohora umwuka, bigatuma iba nziza mu kubaka uduce twa wafer. Ibyiciro bikoreshwa mu kugenda kwa wafer kuva ku mwanya umwe ujya ku wundi binyura mu ruhererekane rw'ingendo mu gihe cyo gukora semiconductor. Guteranya granite bitanga ituze no kuramba bikenewe kugira ngo bishobore kwihanganira ingendo zihoraho kandi zisubiramo.
Muri make, ikoreshwa ry'iteranya rya granite mu nganda zikora ibikoresho bya semiconductor ni rinini cyane. Imiterere yaryo nko kudahindagurika mu bipimo, kwaguka gake k'ubushyuhe, gukomera cyane, no kudahusha bituma riba ibikoresho byiza byo gukoreshwa mu byiciro bitandukanye byo gukora ibikoresho bya semiconductor. Kuva mu kubaka ibikoresho by'imashini bigezweho n'ibikoresho bya metrology kugeza ku meza y'amatara n'ibice bya wafer na chucks, imiterere ya granite igira uruhare runini mu gutanga ituze, ukuri, no gusubiramo bikenewe kugira ngo hagerwe ku gukora ibikoresho bya semiconductor byiza cyane.
Igihe cyo kohereza: Ukuboza-06-2023
