Ibyiza by'ibice bya granite mu bijyanye no kudahindagurika no kudahindagurika k'ubushyuhe mu bikoresho byo gukata wafer.

Mu gihe inganda zikora ibikoresho bya semiconductor zigenda zigana ku nganda zikora ibikoresho bya nanoscale, gukata wafer, nk'ihuriro ry'ingenzi mu gukora chips, bifite ibisabwa bikomeye cyane kugira ngo ibikoresho bihamye. Ishingiro rya granite, rifite ubushobozi bwo kudahindagurika no kudahindagurika kw'ubushyuhe, ryabaye igice cy'ingenzi cy'ibikoresho byo gukata wafer, bitanga icyizere cyizewe cyo kugera ku gutunganya wafer neza kandi neza.

Ibiranga ubushyuhe bwinshi no kurwanya gutigita: Kurinda uburyo bwo gukata neza ku rwego rwa nano
Iyo ibikoresho byo gukata wafer bitangiye gukora, kuzunguruka kw'umuvuduko mwinshi w'icyuma gikata, kuzunguruka kw'igikoresho gikata inshuro nyinshi, ndetse no kuzunguruka kw'ibidukikije biva mu bikoresho bikikije byose bigira ingaruka zikomeye ku buryo bwo gukata neza. Imikorere y'ibyuma gakondo yo gushonga ni mike, bigatuma bigorana kugabanya vuba imitingito, bigatuma ibikoresho byo gukata bihindagurika ku rwego rwa micron kandi bigatera inenge nk'impande zacitse n'imivuniko ku macupa. Imiterere y'ishingiro rya granite yo gushonga cyane yakemuye iki kibazo.
Amabuye y’agaciro y’imbere ya granite afatanye cyane, akora imiterere karemano yo gukwirakwiza ingufu. Iyo guhindagurika kwoherejwe ku ishingiro, imiterere yayo y’imbere ishobora guhindura vuba ingufu zo guhindagurika mo ingufu z’ubushyuhe, bigatuma guhindagurika neza. Amakuru y’igerageza agaragaza ko munsi y’ikirere kimwe cyo guhindagurika, ishingiro rya granite rishobora kugabanya amplitude y’ihindagurika ku kigero kirenga 90% mu masegonda 0.5, mu gihe ishingiro ry’icyuma risaba amasegonda 3 kugeza kuri 5. Ubu buryo bwiza bwo gushonga butuma igikoresho cyo gukata kiguma gihamye mu gihe cyo gukata nanoscale, bikerekana ko inkombe y’isukari igenda neza kandi bikagabanya neza igipimo cyo gucika. Urugero, mu gikorwa cyo gukata wafer ya 5nm, ibikoresho bifite ishingiro rya granite bishobora kugenzura ingano ya gucika muri 10μm, iri hejuru ya 40% kurusha ibikoresho bifite ishingiro ry’icyuma.
Ingano nto cyane y'ubushyuhe: Irwanya ingaruka z'ihindagurika ry'ubushyuhe
Mu gihe cyo gukata wafer, ubushyuhe buterwa no gukururana kw'ibikoresho byo gukata, gushonga k'ubushyuhe buturutse ku mikorere y'igihe kirekire y'ibikoresho, ndetse n'impinduka mu bushyuhe bw'aho bakorera byose bishobora gutera guhinduka k'ubushyuhe bw'ibice by'ibikoresho. Igipimo cy'ubushyuhe bw'ibikoresho by'icyuma kiba kiri hejuru cyane (hafi 12 × 10⁻⁶/℃). Iyo ubushyuhe buhindutseho 5℃, icyuma gifite uburebure bwa metero 1 gishobora guhindukaho 60μm, bigatuma aho gikata hahinduka kandi bigagira ingaruka zikomeye ku buryo gikata neza.
Igipimo cy’ubushyuhe bw’ishingiro rya granite ni (4-8) × 10⁻⁶/℃ gusa, kiri munsi ya kimwe cya gatatu cy’ibikoresho by’icyuma. Mu gihe cy’impinduka z’ubushyuhe zimwe, impinduka z’ingano zabyo zishobora kwirengagizwa. Amakuru yapimwe y’ikigo runaka gikora ibikoresho bya semiconductor agaragaza ko mu gihe cy’amasaha 8 cyo gukata wafer mu buryo bukabije, iyo ubushyuhe bw’ikirere buhindagurika ho 10℃, aho ibikoresho bifite ishingiro rya granite biri munsi ya 20μm, mu gihe ibikoresho bifite ishingiro ry’icyuma birenga 60μm. Ubu bushyuhe buhamye bwemeza ko umwanya uri hagati y’igikoresho cyo gukata na wafer uguma ari mwiza igihe cyose. Ndetse no mu gihe cy’igihe kirekire cyangwa impinduka zikomeye mu bushyuhe bw’ibidukikije, imiterere y’ubuziranenge bw’ibice ishobora kugumaho.
Ubukomezi n'ubudasaza: Bituma ibikoresho bihora bikora neza igihe kirekire
Uretse ibyiza byo kudacika intege no kudacika intege mu bushyuhe, gukomera no kudacika intege kw'ifatizo rya granite byongera uburyo ibikoresho byo gukata bya wafer byizewe. Granite ifite ubukana bwa 6 kugeza kuri 7 ku gipimo cya Mohs n'imbaraga zo gukanda zirenga 120MPa. Ishobora kwihanganira igitutu gikomeye n'imbaraga zo gukubita mu gihe cyo gukata kandi ntishobora kwangirika. Hagati aho, imiterere yayo ikomeye irayiha ubushobozi bwo kudacika intege neza. Ndetse no mu gihe cyo gukata kenshi, ubuso bw'ifatizo ntibushobora kwangirika, bigatuma ibikoresho bikomeza gukora neza igihe kirekire.
Mu bikorwa bifatika, inganda nyinshi zikora wafer zazamuye umusaruro n'umusaruro binyuze mu gukoresha ibikoresho byo gukata bifite ishingiro rya granite. Amakuru aturuka mu ruganda rukora ibikoresho bikomeye ku isi agaragaza ko nyuma yo gushyiraho ibikoresho byo gukata wafer byazamutse kuva kuri 88% kugera hejuru ya 95%, igihe cyo kubungabunga ibikoresho cyongerewe inshuro eshatu, bigabanya neza ikiguzi cyo gukora no kunoza ipiganwa ku isoko.
Mu gusoza, ishingiro rya granite, rifite ubushobozi bwo kudahindagurika cyane, ubushyuhe budahindagurika, gukomera cyane no kudashira, ritanga garanti yuzuye y’imikorere ku bikoresho byo gukata wafer. Uko ikoranabuhanga rya semiconductor rigenda rirushaho kunoza imikorere, ishingiro rya granite rizagira uruhare runini mu bijyanye no gukora wafer, rigateza imbere iterambere rirambye ry’inganda za semiconductor.