Ibyiza byibanze bya granite mubijyanye no kurwanya kunyeganyega hamwe nubushyuhe bwumuriro mubikoresho byo gukata wafer.

Mubikorwa byinganda za semiconductor zigenda zerekeza mubikorwa bya nanoscale, gukata wafer, nkumuhuza wingenzi mugukora chip, bifite ibisabwa cyane kugirango ibikoresho bihamye. Urufatiro rwa granite, hamwe nuburiganya bwarwo budasanzwe bwo guhindagurika hamwe nubushyuhe bwumuriro, byahindutse igice cyibanze cyibikoresho byo gukata wafer, bitanga garanti yizewe yo kugera kumurongo wogukora neza kandi neza. ?

Ibiranga cyane no kurwanya ibinyeganyega: Kurinda nano urwego rwo gukata neza
Iyo ibikoresho byo gukata wafer biri gukora, kuzunguruka kwihuta kwizunguruka rya spindle, kunyeganyega kwinshi kwigikoresho cyo gutema, hamwe no kunyeganyega kw ibidukikije byatewe nibikoresho bikikije byose bizagira ingaruka zikomeye muburyo bwo gukata neza. Imikorere idahwitse yibyuma gakondo bigarukira, bigatuma bigorana kwihuta kwihuta kunyeganyega, biganisha kuri micron yo murwego rwohejuru rwibikoresho byo gukata kandi bigatera mu buryo butaziguye inenge nkimpande zacagaguritse hamwe nuduce twa wafer. Ibiranga hejuru biranga granite base byakemuye mubyukuri iki kibazo. ?
Imyunyu ngugu yimbere ya granite irahujwe cyane, ikora imiterere yo gukwirakwiza ingufu kamere. Iyo kunyeganyega byandujwe shingiro, microstructure yimbere irashobora guhindura byihuse ingufu zinyeganyega mu mbaraga zumuriro, bikagera no kunyeganyega neza. Ubushakashatsi bwakozwe bwerekana ko mugihe kimwe cyo kunyeganyega, base ya granite irashobora guhuza amplitude ihindagurika hejuru ya 90% mumasegonda 0.5, mugihe icyuma gisaba amasegonda 3 kugeza kuri 5. Iyi mikorere idasanzwe yerekana neza ko igikoresho cyo gukata kiguma gihamye mugihe cyo gutema nanoscale, byemeza neza ko gukata wafer no kugabanya neza igipimo cyo gukata. Kurugero, mugikorwa cyo guca 5nm wafer, ibikoresho bifite base ya granite birashobora kugenzura ingano ya chipi muri 10 mm, ikaba irenga hejuru ya 40% ugereranije nibikoresho bifite icyuma. ?
Coefficient Ultra-low yo kwagura ubushyuhe: Irwanya ingaruka ziterwa nihindagurika
Mugihe cyo gukata wafer, ubushyuhe buterwa no guterana ibikoresho byo gutema, kugabanuka kwubushyuhe buturuka kumikorere yigihe kirekire yibikoresho, hamwe nimpinduka zubushyuhe bwibidukikije mumahugurwa bishobora gutera ihindagurika ryubushyuhe bwibikoresho. Coefficent yo kwagura ubushyuhe bwibikoresho byuma biri hejuru (hafi 12 × 10⁻⁶ / ℃). Iyo ubushyuhe buhindagurika kuri 5 ℃, icyuma cya metero 1 z'uburebure gishobora guhinduka de 60m, bigatuma imyanya yo gutemba ihinduka kandi bikagira ingaruka zikomeye ku gukata neza. ?
Coefficient yo kwagura ubushyuhe bwa base ya granite ni (4-8) × 10⁻⁶ / ℃, iri munsi ya kimwe cya gatatu cyibikoresho byibyuma. Munsi yubushyuhe bumwe, impinduka zayo zirashobora kwirengagizwa. Imibare yapimwe yikigo runaka gikora igice cya semiconductor yerekana ko mugihe cyamasaha 8 ikomeza ibikorwa byogukata cyane wafer, mugihe ubushyuhe bwibidukikije buhindagurika kuri 10 ℃, umwanya wo gutema ibikoresho bifite granite munsi ya 20μm, mugihe icyuma gifite ibikoresho byicyuma kirenga 60μm. Iyi mikorere ihamye yubushyuhe yemeza ko umwanya ugereranije hagati yigikoresho cyo gukata na wafer ukomeza kuba neza igihe cyose. Ndetse no mubikorwa byigihe kirekire bikomeza cyangwa impinduka zikomeye mubushyuhe bwibidukikije, guhora gukata neza birashobora gukomeza. ?
Gukomera no kwambara birwanya: Menya neza imikorere yigihe kirekire yibikoresho
Usibye ibyiza byo kurwanya ibinyeganyega hamwe nubushyuhe bwumuriro, gukomera kwinshi no kwambara birwanya granite base birusheho kongera ubwizerwe bwibikoresho byo gukata wafer. Granite ifite ubukana bwa 6 kugeza kuri 7 kurwego rwa Mohs nimbaraga zo kwikuramo zirenga 120MPa. Irashobora kwihanganira umuvuduko mwinshi ningaruka zingaruka mugihe cyo guca kandi ntabwo ikunda guhinduka. Hagati aho, imiterere yacyo yuzuye itanga imbaraga zo kwihanganira kwambara. Ndetse mugihe cyo gukata kenshi, ubuso bwibanze ntibushobora kwambara, byemeza ko ibikoresho bikomeza gukora neza-igihe kirekire. ?
Mubikorwa bifatika, inganda nyinshi zikora wafer zazamuye cyane umusaruro wibicuruzwa no gukora neza hifashishijwe ibikoresho byo gutema hamwe na granite. Imibare yavuye mu ruganda ruyobora isi yose yerekana ko nyuma yo kwinjiza ibikoresho fatizo bya granite, umusaruro wo kugabanya wafer wiyongereye uva kuri 88% ugera kuri 95%, uburyo bwo gufata neza ibikoresho bwongerewe inshuro eshatu, bigabanya neza ibiciro by’umusaruro no kuzamura isoko ku isoko. ?
Mu gusoza, base ya granite, hamwe nubwiza buhebuje bwo kunyeganyega, guhagarara neza kwubushyuhe, gukomera no kwambara, bitanga garanti yuzuye kubikoresho byo gukata wafer. Mugihe ikoranabuhanga rya semiconductor rigenda ritera imbere muburyo bunoze, base ya granite izagira uruhare runini mubijyanye no gukora wafer, iteza imbere iterambere rihoraho ryinganda zinganda.