Ibyiza byo guhitamo granite base ya semiconductor wafer yipimisha.

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Mu nganda za semiconductor, ubugenzuzi bwa wafer ni ihuriro ryingenzi kugirango hamenyekane ubuziranenge n’imikorere ya chip, kandi ukuri no gushikama kumeza yubugenzuzi bigira uruhare runini mubisubizo byo gutahura. Granite shingiro hamwe nibiranga byihariye, ube ihitamo ryiza kumeza ya semiconductor wafer yo kugenzura, ibikurikira uhereye kubisesengura byinshi kuri wewe. ?

Icya mbere, ibipimo byerekana neza
1. Ultra-high flatness and straightness: base ya granite itunganywa nubuhanga buhanitse bwo gutunganya, kandi uburinganire bushobora kugera kuri ± 0.001mm / m cyangwa se hejuru yukuri, kandi kugororoka nabyo ni byiza. Mubikorwa byo kugenzura wafer, indege ihanitse itanga ubufasha buhamye kuri wafer kandi ikanemeza ko habaho imikoranire nyayo hagati yubushakashatsi bwibikoresho byubugenzuzi hamwe n’ibicuruzwa byagurishijwe hejuru ya wafer. ?
2. Coefficient nkeya cyane yo kwagura ubushyuhe: gukora semiconductor yunvikana nihindagurika ryubushyuhe, kandi coefficente yo kwagura ubushyuhe bwa granite ni mike cyane, mubisanzwe nka 5 × 10⁻⁶ / ℃. Iyo porogaramu yo gutahura ikora, niyo ubushyuhe bwibidukikije buhindagurika, ingano ya granite ishingiro ihinduka bike cyane. Kurugero, mumahugurwa yubushyuhe bwo hejuru mugihe cyizuba, ubushyuhe bwikibanza gisanzwe cyo gutahura ibyuma bishobora gutera umwanya ugereranije wafer hamwe nibikoresho byo gutahura bihinduka, bikagira ingaruka kumyumvire; Ihuriro rya granite base rishobora gukomeza gushikama, kwemeza neza aho ibikoresho bya wafer byifashe neza mugihe cyo gutahura, kandi bigatanga ibidukikije bihamye kugirango bimenyekane neza. ?
Icya kabiri, igipimo gihamye
1. Imiterere ihamye hamwe no kurwanya kunyeganyega: Granite nyuma yimyaka miriyoni yimikorere ya geologiya, imiterere yimbere ni yuzuye kandi imwe. Mubidukikije bigoye byuruganda rwa semiconductor, kunyeganyega guterwa nigikorwa cyibikoresho bya peripheri hamwe nabakozi bagenda bazenguruka neza na base ya granite. ?
2. Gukoresha igihe kirekire: ugereranije nibindi bikoresho, granite ifite ubukana bwinshi, irwanya kwambara cyane, kandi ubukana bwa Mohs burashobora kugera kuri 6-7. Ubuso bwibanze bwa granite ntabwo bwambarwa byoroshye mugihe gikunze gukorerwa wafer, gupakurura no kugenzura. Ukurikije imikoreshereze nyayo yimibare yamakuru, ikoreshwa ryimbonerahamwe ya granite yipimisha, gukora ubudahwema nyuma yamasaha 5000, uburinganire nuburinganire burashobora gukomeza kubikwa hejuru ya 98% yukuri kwambere, kugabanya ibikoresho bitewe no kwambara shingiro biterwa na kalibrasi isanzwe nigihe cyo kuyitaho, kugabanya ibiciro byubucuruzi, kugirango ibikorwa byigihe kirekire bihamye. ?

Icya gatatu, isuku kandi irwanya kwivanga
. Mugihe cyo gukora ikizamini cyibizamini, umukungugu utangwa nifatizo wirindwa kwanduza wafer, kandi ibyago byo kuzunguruka bigufi hamwe nizunguruka zifunguye biterwa nuduce twumukungugu biragabanuka. Ahantu ho kugenzura wafer mumahugurwa adafite ivumbi, kwibanda kumukungugu ukikije ameza yubugenzuzi bwa granite buri gihe bigenzurwa kurwego rwo hasi cyane, byujuje ibisabwa byogukora isuku yinganda zikoresha amashanyarazi. ?
. Mugukoresha ibikoresho bya elegitoroniki hamwe nubundi buryo bwikoranabuhanga bwo kwipimisha bisaba ibidukikije bya elegitoroniki nini cyane, base ya granite ituma ihererekanyabubasha ryikimenyetso cya elegitoroniki cyibikoresho byo gutahura kandi ikemeza neza ibisubizo by'ibizamini. Kurugero, mugihe wafer igeragejwe kugirango ikore neza-amashanyarazi, sisitemu ya granite itari magnetique yirinda kwivanga mubyuma byerekana amashanyarazi na voltage, kugirango amakuru yo gutahura agaragaze mubyukuri ibiranga amashanyarazi ya wafer.