1. Ibipimo bifatika
Uburinganire: uburinganire bwubuso bwibanze bugomba kugera kurwego rwo hejuru cyane, kandi ikosa ryo kureshya ntirishobora kurenga ± 0.5μm ahantu hose 100mm × 100mm; Ku ndege shingiro yose, ikosa rinini rigenzurwa muri ± 1μm. Ibi byemeza ko ibyingenzi byingenzi byibikoresho bya semiconductor, nkumutwe ugaragara wibikoresho bya lithographie hamwe nimbonerahamwe ya probe yibikoresho byerekana chip, bishobora gushyirwaho neza kandi bigakorerwa mu ndege ihanitse cyane, bikareba niba inzira ya optique ihuza imiyoboro y’ibikoresho, kandi ikirinda gutandukana kwimurwa ryibice biterwa nindege ikora neza hamwe na sisitemu ya semiconductor.
Kugororoka: Kugororoka kwa buri mpande zifatizo ni ngombwa. Mu cyerekezo cy'uburebure, ikosa ryo kugororoka ntirishobora ± 1μm kuri 1m; Ikosa rya diagonal rigororotse rigenzurwa muri ± 1.5μm. Gufata imashini isobanutse neza ya lithographie nkurugero, mugihe imbonerahamwe igenda ikurikira inzira ya gari ya moshi iyobora, kugororoka kwuruhande rwibanze bigira ingaruka ku buryo butaziguye inzira yimeza. Niba kugororoka kutari kurwego rusanzwe, uburyo bwa lithographie buzagoreka kandi buhindurwe, bigatuma umusaruro wibikorwa bya chip ugabanuka.
Kuringaniza: Ikosa rya parallelism yo hejuru no hepfo yubuso igomba kugenzurwa muri ± 1μm. Kubangikanya neza birashobora kwemeza ituze ryikigo rusange cyingufu nyuma yo gushyiramo ibikoresho, kandi imbaraga za buri kintu ni kimwe. Muri semiconductor wafer ibikoresho byo gukora, niba hejuru no hepfo yububiko bwibanze ntaho bihuriye, wafer izanyeganyega mugihe cyo kuyitunganya, bikagira ingaruka kumurongo umwe nko gutobora no gutwikira, bityo bikagira ingaruka kumikorere ya chip.
Icya kabiri, ibiranga ibintu
Ubukomere: Ubukomezi bwibikoresho fatizo bya granite bigomba kugera kuri Shore gukomera HS70 cyangwa hejuru. Gukomera cyane birashobora kunanira neza imyambarire iterwa no kugenda kenshi no guterana ibice mugihe cyo gukora ibikoresho, byemeza ko shingiro rishobora kugumana ubunini bwuzuye nyuma yo gukoresha igihe kirekire. Mu bikoresho bipakira chip, ukuboko kwa robo kenshi gufata no gushyira chip kuri base, kandi ubukana bwinshi bwikibanza burashobora kwemeza ko ubuso butoroshye kubyara ibishushanyo no gukomeza ukuri kwimikorere ya robo.
Ubucucike: Ubucucike bwibintu bugomba kuba hagati ya 2,6-3.1 g / cm³. Ubucucike bukwiye butuma shingiro rifite ireme ryiza, rishobora kwemeza gukomera gushigikira ibikoresho, kandi ntibizana ingorane mugushiraho no gutwara ibikoresho kubera uburemere bukabije. Mu bikoresho binini byo kugenzura igice kinini, ubwinshi bwibanze bufasha kugabanya ihererekanyabubasha mugihe cyo gukora ibikoresho no kunoza neza kumenya neza.
Ubushyuhe bwumuriro: coefficente yo kwagura umurongo iri munsi ya 5 × 10⁻⁶ / ℃. Ibikoresho bya Semiconductor byumva cyane ihinduka ryubushyuhe, kandi ubushyuhe bwumuriro bwibanze bufitanye isano itaziguye nukuri kwibikoresho. Mugihe cya lithographie, ihindagurika ryubushyuhe rishobora gutera kwaguka cyangwa kugabanuka kwifatizo, bikavamo gutandukana mubunini bwuburyo bugaragara. Ikibanza cya granite hamwe na coefficient yo kwaguka kumurongo irashobora kugenzura ihinduka ryubunini murwego ruto cyane mugihe ubushyuhe bwibikorwa byibikoresho bihindutse (muri rusange 20-30 ° C) kugirango imyandikire yukuri ibe.
Icya gatatu, ubuziranenge bwubuso
Ubukonje: Ubuso bwubuso Ra agaciro kibanze ntikurenza 0.05μm. Ubuso bwa ultra-yoroshye burashobora kugabanya adsorption yumukungugu numwanda kandi bikagabanya ingaruka kumasuku yibikorwa bya chipi ya semiconductor. Mu mahugurwa adafite umukungugu wo gukora chip, uduce duto dushobora gukurura inenge nkumuzunguruko mugufi wa chip, kandi ubuso bworoshye bwibanze bifasha kubungabunga ibidukikije bisukuye mumahugurwa no kuzamura umusaruro wa chip.
Inenge ya Microscopique: Ubuso bwibanze ntibwemerewe kugira ibice bigaragara, umwobo wumucanga, imyenge nizindi nenge. Kurwego rwa microscopique, umubare winenge ufite diameter irenze 1 mm kuri santimetero kare ntishobora kurenga 3 na microscopi electron. Izi nenge zizagira ingaruka kumiterere yimiterere nuburinganire bwuburinganire bwibanze, hanyuma bigire ingaruka kumyizerere nukuri kubikoresho.
Icya kane, gutuza no kurwanya ihungabana
Ihinduka ridahwitse: Mubidukikije bigereranywa byatewe no gukoresha ibikoresho bya semiconductor (intera yumurongo wa 10-1000Hz, amplitude 0.01-0.1mm), ihindagurika ryimyanya yibintu byingenzi byashyizwe kumurongo bigomba kugenzurwa muri ± 0.05μm. Gufata ibikoresho byikizamini cya semiconductor nkurugero, niba igikoresho cyacyo ubwacyo hamwe no kunyeganyega kw ibidukikije bikwirakwizwa mukibanza mugihe gikora, ibimenyetso byikizamini bishobora kubangamirwa. Ihinduka ryiza rihamye rishobora kwemeza ibisubizo byizewe.
Kurwanya imitingito: Urufatiro rugomba kugira imikorere myiza y’imitingito, kandi rushobora guhuza imbaraga n’ingufu zinyeganyega iyo zatewe no kunyeganyega gutunguranye gutunguranye (nko guhindagurika kwa seisimike), kandi ikemeza ko umwanya ugereranije n’ibice byingenzi bigize ibikoresho bihinduka muri ± 0.1μm. Mu nganda zikoresha imashanyarazi mu turere dukunze kwibasirwa n’umutingito, ibirindiro birwanya umutingito birashobora kurinda neza ibikoresho bihenze bya semiconductor, bikagabanya ibyago byo kwangirika kw ibikoresho no guhungabanya umusaruro bitewe no kunyeganyega.
5. Imiti ihamye
Kurwanya ruswa: Urufatiro rwa granite rugomba kwihanganira kwangirika kwimiti isanzwe ikoreshwa mubikorwa bya semiconductor, nka acide hydrofluoric, aqua regia, nibindi. Nyuma yo gushira mumashanyarazi ya hydrofluoric hamwe nigice kinini cya 40% mumasaha 24, igipimo cyubutaka bwubutaka ntigishobora kurenga 0.01%; Shira muri aqua regia (ingano yubunini bwa acide hydrochloric na aside nitric 3: 1) mumasaha 12, kandi nta kimenyetso kigaragara cyangirika hejuru. Igikorwa cyo gukora igice cya kabiri kirimo uburyo butandukanye bwo gutunganya imiti no gusukura, kandi kurwanya ruswa kwangirika kwishingiro birashobora kwemeza ko gukoresha igihe kirekire mubidukikije bya shimi bitangirika, kandi ubunyangamugayo nuburinganire byubahirizwa.
Kurwanya umwanda: Ibikoresho fatizo bifite uburyo buke cyane bwo kwanduza imyanda ihumanya ahantu hakorerwa inganda za semiconductor, nka gaze kama, ioni yicyuma, nibindi. Iyo bishyizwe mubidukikije birimo PPM 10 ya gaze kama (urugero, benzene, toluene) na 1ppm ya ioni yicyuma (urugero, ion z'umuringa, ioni fer) mumasaha 72, ihinduka ryimikorere iterwa no kwangirika kwimyanda. Ibi birinda umwanda kwimuka uva hejuru yubutaka ujya ahakorerwa chip kandi bikagira ingaruka kumiterere ya chip.
Igihe cyo kohereza: Werurwe-28-2025