Urubuga rwo gupima ibikoresho bya semiconductor: Ni izihe nyungu zo gukoresha granite kuruta ibikoresho by'icyuma?

Mu rwego rwo gupima ibikoresho bya semiconductor, guhitamo ibikoresho bya platform yo gupima bigira uruhare runini mu gukora neza kw'igerageza no mu buryo ibikoresho bihamye. Ugereranyije n'ibikoresho bisanzwe by'icyuma gikozwe mu cyuma, granite irahinduka amahitamo meza ku platform zo gupima semiconductor bitewe n'imikorere yayo ihebuje.
Ubudahangarwa bw'ingufu butuma habaho imikorere ihamye igihe kirekire
Mu gihe cyo gupima semiconductor, hakunze kubaho ibintu bitandukanye bigabanya ubushyuhe, nk'umuti wa potasiyumu hidroksidi (KOH) ukoreshwa mu guteza imbere ubudahangarwa bw'izuba, hamwe n'ibintu bihumanya cyane nka aside hydrofluoric (HF) na aside nitrique (HNO₃) mu gukata. Ibyuma bicuzwe ahanini bigizwe n'ibintu by'icyuma. Muri ubwo buryo bw'ibinyabutabire, ingaruka zo kugabanya ubushyuhe zishobora kubaho cyane. Atome z'icyuma zitakaza elektroni kandi zigahura n'ibintu bidafite aside mu gisubizo, bigatera kwangirika vuba k'ubuso, bigatera ingese n'ibyihebe, kandi bikangiza ubugari n'ubuziranenge bw'urusobe rw'ibintu.

Ibinyuranye n'ibyo, imiterere y'amabuye y'agaciro ya granite iha imbaraga zidasanzwe zo kurwanya ingese. Igice cyayo cy'ingenzi, quartz (SiO₂), ifite imiterere ihamye cyane ya shimi kandi ntigira ingaruka cyane ku bijyanye na aside n'ibice bisanzwe. Amabuye y'agaciro nka feldspar nayo ntakora neza mu bidukikije bya shimi muri rusange. Igerageza ryinshi ryagaragaje ko mu bidukikije bimwe bya shimi byo gupima ibyuma bya semiconductor, imbaraga zo kurwanya ingese za granite ziruta inshuro zirenga 15 iz'icyuma gishongeshejwe. Ibi bivuze ko gukoresha urubuga rwa granite bishobora kugabanya cyane inshuro n'ikiguzi cyo kubungabunga ibikoresho biterwa no kwangirika, kongera igihe cyo gukora ibikoresho, no kwemeza ko uburyo bwo kubitahura burambye.
Ituje cyane, ihura n'ibisabwa kugira ngo imenye neza urwego rwa nanometer
Isuzuma rya semiconductor rifite ibisabwa byinshi cyane kugira ngo urubuga ruhamye kandi rigomba gupima neza imiterere ya chip kuri nanoscale. Igipimo cyo kwaguka k'ubushyuhe bw'icyuma gishongeshejwe ni kinini, hafi 10-12 × 10⁻⁶/℃. Ubushyuhe buturuka ku mikorere y'ibikoresho byo gupima cyangwa ihindagurika ry'ubushyuhe bw'ikirere bizatuma ubushyuhe burushaho kwaguka no kugabanuka k'urubuga rw'icyuma gishongeshejwe, bigatuma habaho itandukaniro hagati y'aho probe igenzura n'icyuma gishongeshejwe bikagira ingaruka ku buryo bwo gupima.

Igipimo cy’ubushyuhe bwa granite ni 0.6-5 × 10⁻⁶/℃ gusa, ari nacyo gice cyangwa kiri munsi y’icy’icyuma gishongeshejwe. Imiterere yacyo ni myinshi cyane. Imihangayiko y’imbere yakuweho binyuze mu gusaza karemano kandi ikagira ingaruka nke cyane ku mpinduka z’ubushyuhe. Byongeye kandi, granite ifite ubukana bukomeye, ifite ubukana buruta inshuro 2 kugeza kuri 3 bw’icyuma gishongeshejwe (kingana na HRC > 51), ishobora kurwanya ingaruka zo hanze no guhindagura no kugumana ubugari n’ubugari bw’urukuta. Urugero, mu gupima neza urukuta rw’amashanyarazi, urubuga rwa granite rushobora kugenzura ikosa ry’ubugari muri ± 0.5μm/m, rukareba ko ibikoresho byo gupima bishobora kubona ubuziranenge bwa nanoscale mu bidukikije bigoye.
Imiterere idasanzwe yo kurwanya rukuruzi, ikora ahantu ho gushakisha neza
Ibice by'ikoranabuhanga n'ibikoresho byo gupima mu bikoresho bya semiconductor bikunze kwangirika cyane iyo amashanyarazi avanze. Ibyuma bishongeshejwe bifite urugero runaka rwa rukuruzi. Mu kirere cy'amashanyarazi, bizatanga imbaraga rukuruzi ziterwa, zizabangamira ibimenyetso bya rukuruzi by'ibikoresho byo gupima, bigatera guhindagurika kw'ibimenyetso n'amakuru adasanzwe yo kubitahura.

Ku rundi ruhande, granite ni ikintu kirwanya rukuruzi kandi ntigishobora kwangirika cyane n’imbaraga rukuruzi zo hanze. Electron z’imbere ziba mu matsinda abiri mu migozi ya shimi, kandi imiterere yazo irahamye, ntizibangamirwa n’imbaraga rukuruzi zo hanze. Mu kirere gikomeye cya rukuruzi cya 10mT, imbaraga rukuruzi ziterwa n’imbaraga rukuruzi ku buso bwa granite ni munsi ya 0.001mT, mu gihe ku buso bw’icyuma gishongeshejwe ari hejuru ya 8mT. Iyi miterere ituma urubuga rwa granite rukora ibidukikije byiza bya electromagnetic ku bikoresho byo gutahura, cyane cyane bibereye ibintu bifite ibisabwa bikomeye ku rusaku rwa electromagnetic nko kubona quantum chip no kubona circuit analog neza cyane, bikongera uburyo bwo kwizerwa no guhuza ibisubizo byo kumenya.

Mu kubaka ibyuma bipima ibikoresho bya semiconductor, granite yarushije ibikoresho by'icyuma bicukurwaho cyane bitewe n'inyungu zayo zikomeye nko kurwanya ingese, kudahungabana no kurwanya magnetism. Uko ikoranabuhanga rya semiconductor rigenda ritera imbere mu buhanga, granite izagira uruhare runini mu kwemeza imikorere y'ibikoresho byo gupima no guteza imbere iterambere ry'inganda za semiconductor.