Gupima ubushyuhe bwumuriro wa granite platform mubikoresho bipima semiconductor.

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Mubyerekeranye no gukora semiconductor, precision nubuzima bwiza bwibicuruzwa nibikorwa. Ibikoresho byo gupima Semiconductor, nkumuhuza wingenzi kugirango umusaruro ube mwiza, ushyiraho ibisabwa hafi yingutu yibice byingenzi. Muri byo, urubuga rwa granite, hamwe n’ubushyuhe buhebuje bw’ubushyuhe, rufite uruhare rukomeye mu bikoresho byo gupima igice cya kabiri. Iyi ngingo izakora isesengura ryimbitse ryimikorere yubushyuhe bwumuriro wa granite ya platform mu bikoresho bipima semiconductor binyuze mumibare yikizamini. ?
Ibisabwa bikaze kugirango ubushyuhe bwumuriro bwibikoresho bipima inganda zikora
Igikorwa cyo gukora igice cya kabiri kiragoye cyane kandi kirasobanutse, kandi ubugari bwimirongo yumuzingi kuri chip bwinjiye murwego rwa nanometero. Muri ubwo buryo bwo gukora neza cyane, niyo ihinduka ryubushyuhe rito rishobora gutera kwaguka kwinshi no kugabanuka kwibikoresho, bityo bigatera amakosa yo gupima. Kurugero, mugikorwa cyo gufotora, niba ibipimo byukuri byo gupima ibikoresho bipima bitandukanijwe na nanometero 1, birashobora gutera ibibazo bikomeye nkumuzunguruko mugufi cyangwa imiyoboro ifunguye mumuzunguruko kuri chip, biganisha ku gusiba chip. Dukurikije imibare y’inganda, kuri buri 1 ℃ ihindagurika ryubushyuhe, ibikoresho gakondo bipima ibikoresho byuma bishobora guhinduka mubipimo bya nanometero nyinshi. Nyamara, gukora semiconductor bisaba gupima neza ibipimo bigenzurwa muri nan 0.1 nanometero, ibyo bigatuma ubushyuhe bwumuriro bugira uruhare runini mukumenya niba ibikoresho bipima bishobora kuzuza ibyifuzo byinganda zikora. ?

Ibyiza bya Teoretiki yubushyuhe bwumuriro wa granite
Granite, nkubwoko bwamabuye karemano, ifite imyunyu ngugu yimbere yimbere, kuringaniza kandi imiterere imwe, kandi ifite inyungu karemano yubushyuhe bwumuriro. Kubijyanye na coefficient yo kwagura ubushyuhe, coefficent yo kwagura ubushyuhe bwa granite iri hasi cyane, mubisanzwe kuva kuri 4.5 kugeza 6.5 × 10⁻⁶ / K. Ibinyuranye, coefficente yo kwagura ubushyuhe bwibikoresho bisanzwe byuma nka aluminiyumu ya aluminiyumu igera kuri 23.8 × 10⁻⁶ / K, ikubye inshuro nyinshi za granite. Ibi bivuze ko mubihe bimwe byubushyuhe butandukanye, ihinduka ryurwego rwa granite ruto ni ruto cyane ugereranije nurwego rwicyuma, rushobora gutanga ibipimo bihamye byo gupima ibikoresho byapima igice. ?
Mubyongeyeho, imiterere ya kristu ya granite irayiha uburinganire buhebuje bwo gutwara ubushyuhe. Iyo imikorere yibikoresho ibyara ubushyuhe cyangwa impinduka zubushyuhe bwibidukikije, platform ya granite irashobora gutwara vuba kandi kuringaniza gutwara ubushyuhe, ikirinda ubushyuhe bukabije bwaho cyangwa ubukonje bukabije, bityo bikagumya gukomeza ubushyuhe muri rusange kuri platifomu kandi bikarushaho gukomera kugirango ibipimo bifatika. ?
Inzira nuburyo bwo gupima ubushyuhe bwumuriro
Kugirango dusuzume neza ubushyuhe bwumuriro wa platform ya granite mubikoresho bipima semiconductor, twateguye gahunda yo gupima ikomeye. Hitamo igikoresho kinini cyo gupima icyuma gipima ibikoresho, gifite ibikoresho bya granite ya super-precision. Mubidukikije byubushakashatsi, ubushyuhe busanzwe bwo guhinduranya ubushyuhe mumahugurwa yo gukora igice cya kabiri cyigana, ni ukuvuga, buhoro buhoro kuva kuri 20 ℃ kugeza kuri 35 ℃ hanyuma ugakonja ukagera kuri 20 ℃. Inzira yose yamaze amasaha 8. ?
Kuri platifike ya granite igikoresho cyo gupimisha, hashyizwe hejuru ya silikoni ya silikoni isanzwe, kandi ibyuma byimura hamwe na nanoscale byukuri bikoreshwa mugukurikirana ihinduka ryimyanya ihindagurika hagati ya wafer ya silicon na platform mugihe nyacyo. Hagati aho, ibyuma byinshi byerekana ubushyuhe bukabije byateguwe ahantu hatandukanye kuri platifomu kugirango ikurikirane ikwirakwizwa ryubushyuhe hejuru yububiko. Mugihe cyigeragezwa, amakuru yimurwa hamwe nubushyuhe bwanditse buri minota 15 kugirango amakuru yuzuye kandi yuzuye. ?
Ibipimo byapimwe hamwe nisesengura ryibisubizo
Isano iri hagati yubushyuhe nubunini bwa platform
Ubushakashatsi bwakozwe bwerekana ko iyo ubushyuhe buzamutse buva kuri 20 ℃ bukagera kuri 35 ℃, ihinduka ryubunini bwumurongo wa granite platform ni nto cyane. Nyuma yo kubara, muburyo bwose bwo gushyushya, kwaguka kumurongo ntarengwa kwaguka kuri platifomu ni nanometero 0.3 gusa, ikaba iri munsi yurwego rwo kwihanganira amakosa kugirango ibipimo bibe byuzuye mubikorwa byo gukora semiconductor. Mugihe cyo gukonjesha, ingano ya platifomu irashobora gusubira rwose muburyo bwambere, kandi ibintu bitinze byubunini bishobora kwirengagizwa. Ibi biranga kubungabunga impinduka nkeya cyane nubwo haba hari ihindagurika ryinshi ryubushuhe byemeza byimazeyo ituze ryumuriro wa granite. ?
Isesengura ryubushyuhe buringaniye kuri platifomu
Amakuru yakusanyijwe na sensor sensor yerekana ko mugihe cyo gukora ibikoresho hamwe nuburyo bwo guhindura ubushyuhe, ikwirakwizwa ryubushyuhe hejuru yikibanza cya granite ni kimwe cyane. Ndetse mugihe cyicyiciro iyo ubushyuhe buhindutse cyane, itandukaniro ryubushyuhe hagati ya buri ngingo yo gupimwa hejuru yububiko buri gihe igenzurwa muri ± 0.1 ℃. Ikwirakwizwa ry'ubushyuhe bumwe ryirinda rwose guhindura imikorere ya platifomu iterwa no guhangayikishwa n'ubushyuhe butaringaniye, kwemeza uburinganire n'ubwuzuzanye bw'uburinganire bw'ibipimo, no gutanga ibidukikije byizewe byo gupima ibikoresho bya metero nini. ?
Ugereranije nibikoresho gakondo
Amakuru yapimwe ya platform ya granite yagereranijwe nay'ibikoresho byo gupima semiconductor yo mu bwoko bumwe ukoresheje platifike ya aluminium, kandi itandukaniro ryari rikomeye. Mubihe bimwe byo guhindura ubushyuhe, kwaguka kumurongo wa aluminiyumu ya aluminiyumu ni hejuru ya nanometero 2,5, zikubye inshuro zirenga umunani urwego rwa granite. Hagati aho, ikwirakwizwa ryubushyuhe hejuru yububiko bwa aluminiyumu ya aluminiyumu ntiruringaniye, hamwe n’ubushyuhe ntarengwa bugera kuri 0.8 ℃, bikavamo ihinduka rigaragara rya platifomu kandi bigira ingaruka zikomeye ku gupima neza. ?
Mwisi yuzuye yibikoresho bya metero nini, ibikoresho bya granite, hamwe nubushuhe buhebuje bwumuriro, byabaye intandaro yo kumenya neza ibipimo. Ibipimo byapimwe byerekana neza imikorere yibikorwa bya granite mugusubiza ihindagurika ryubushyuhe, bitanga inkunga ya tekiniki yizewe yinganda zikora inganda. Mugihe ibikorwa bya semiconductor bigenda bitera imbere bigasobanuka neza, ibyiza byumuriro wumuriro wa granite bizagenda bigaragara cyane, bikomeza guteza imbere ikoranabuhanga niterambere mu nganda.