Yapimye ubushyuhe bw'inyubako za granite mu bikoresho byo gupima ibikoresho bya semiconductor.

Ese?
Mu rwego rwo gukora ibikoresho bya semiconductor, ubuziranenge ni wo muyoboro w'ubuzima bw'umusaruro n'imikorere yawo. Ibikoresho byo gupima ibikoresho bya semiconductor, nk'umuyoboro w'ingenzi wo kwemeza ko umusaruro utunganye, bishyiraho ibisabwa bikomeye ku buryo ibice byabyo by'ingenzi biguma neza. Muri byo, urubuga rwa granite, rufite ubushyuhe buhamye, rugira uruhare runini mu bikoresho bya semiconductor. Iyi nkuru izakora isesengura ryimbitse ry'imikorere y'ubushyuhe ku bikoresho bya granite mu bikoresho bya semiconductor binyuze mu makuru nyayo y'ibizamini.
Ibisabwa bikomeye kugira ngo ibikoresho bipimisha bibe bihamye mu nganda zikora ibikoresho bya semiconductor bibe bihagaze neza
Uburyo bwo gukora ibikoresho bya semiconductor buragoye cyane kandi ni bworoshye, kandi ubugari bw'imirongo y'uruziga kuri chip bwinjiye mu rwego rwa nanometer. Muri ubwo buryo bwo gukora neza cyane, n'impinduka ntoya z'ubushyuhe zishobora gutera kwaguka no guhindagurika kw'ibice by'ibikoresho, bityo bigatera amakosa yo gupima. Urugero, muri gahunda ya photolithography, niba ukuri kw'ibikoresho bya metering birenga kuri nanometer 1, bishobora guteza ibibazo bikomeye nko gufunga imiyoboro migufi cyangwa imiyoboro ifunguye mu miyoboro iri kuri chip, bigatuma chip icika. Dukurikije imibare y'inganda, kuri buri hindagurika rya 1℃ mu bushyuhe, urubuga rusanzwe rw'ibikoresho bya metering by'icyuma rushobora guhinduka mu buryo bwa nanometer nyinshi. Ariko, gukora semiconductor bisaba ko ukuri kw'ibipimo kugenzurwa muri nanometer ± 0.1, bituma ubushyuhe buguma neza ari ikintu cy'ingenzi mu kumenya niba ibikoresho bya metering bishobora guhaza ibyo bikora semiconductor.

Ibyiza by'inyigisho zo kudahungabana k'ubushyuhe bw'imbuga za granite
Granite, nk'ubwoko bw'ibuye karemano, ifite ubutare buto bw'imbere, imiterere y'ubushyuhe bwinshi kandi ingana, kandi ifite akarusho karemano ko kudahungabana k'ubushyuhe. Ku bijyanye n'uburyo ubushyuhe bukwirakwira, uburyo ubushyuhe bukwirakwira bwa granite ni buke cyane, muri rusange buri hagati ya 4.5 na 6.5 × 10⁻⁶/K. Mu buryo bunyuranye, uburyo ubushyuhe bukwirakwira mu bikoresho bisanzwe by'icyuma nka aluminiyumu bungana na 23.8 × 10⁻⁶/K, ni ukuvuga inshuro nyinshi ubushyuhe bungana na granite. Ibi bivuze ko mu gihe cy'impinduka z'ubushyuhe bumwe, impinduka z'urwego rwa granite ni nto cyane ugereranyije n'urw'urwego rw'icyuma, bishobora gutanga icyerekezo gihamye cyo gupima ibikoresho byo gupima semiconductor.
Byongeye kandi, imiterere ya kristu ya granite iwuha uburyo bwiza bwo gutwara ubushyuhe. Iyo ibikoresho bikoresha ubushyuhe cyangwa ubushyuhe bugahinduka, urubuga rwa granite rushobora gutwara ubushyuhe vuba kandi ku buryo bungana, rukirinda ubushyuhe bukabije cyangwa gukonja cyane, bityo rugakomeza ubushyuhe muri rusange no gukomeza kwemeza ko ubushyuhe buhamye.
Uburyo n'uburyo bwo gupima ubushyuhe buhamye
Kugira ngo dusuzume neza ubushyuhe bw'urukuta rwa granite mu bikoresho byo gupima ibikoresho bya semiconductor, twakoze gahunda yo gupima neza. Hitamo igikoresho cyo gupima cya semiconductor wafer gifite ubuhanga bwo hejuru, gifite urubuga rwa granite rwatunganyijwe neza cyane. Mu igerageza, ihinduka ry'ubushyuhe risanzwe mu iduka ry'inganda za semiconductor ryakozwe nk'iry'igerageza, ni ukuvuga gushyushya buhoro buhoro kuva kuri 20℃ kugeza kuri 35℃ hanyuma bigakonja bikongera bigasubira kuri 20℃. Igikorwa cyose cyamaze amasaha 8.
Ku rubuga rwa granite rw'igikoresho cyo gupimisha, hashyirwamo utubati twa silikoni dusanzwe twizewe cyane, kandi ibikoresho byo kwimura bifite ubuziranenge bwa nanoscale bikoreshwa mu gukurikirana impinduka ziri hagati ya utubati twa silikoni n'urupapuro mu gihe nyacyo. Hagati aho, ibikoresho byinshi byo kwimura ubushyuhe biri ahantu hatandukanye kuri urwo rubuga kugira ngo bikurikirane uko ubushyuhe bukwirakwira ku buso bwarwo. Mu gihe cy'igerageza, amakuru y'imurwa n'amakuru y'ubushyuhe byafashwe buri minota 15 kugira ngo harebwe ko amakuru yuzuye kandi ari ukuri.
Amakuru yapimwe n'isesengura ry'ibyavuye mu bushakashatsi
Isano iri hagati y'impinduka z'ubushyuhe n'impinduka z'ingano y'urutonde
Amakuru y’igerageza agaragaza ko iyo ubushyuhe buzamutse kuva kuri dogere 20 kugeza kuri dogere 35, impinduka mu bunini bw’umurongo wa granite iba nto cyane. Nyuma yo kubara, mu gihe cyose cyo gushyushya, kwaguka ntarengwa k’umurongo wa platifomu ni nanometero 0.3 gusa, bikaba biri hasi cyane ugereranije n’urugero rwo kwihanganira amakosa mu gupima neza mu mikorere ya semiconductor. Mu gihe cyo gukonjesha, ingano ya platifomu ishobora kugaruka burundu ku buryo bwa mbere, kandi ikintu cyo gutinda cyo guhindura ingano gishobora kwirengagizwa. Iki kimenyetso cyo kugumana impinduka nke cyane mu ngero ndetse no mu gihe cy’ihindagurika rikomeye ry’ubushyuhe cyemeza neza ubushyuhe budasanzwe bwa platifomu ya granite.
Isesengura ry'ubushyuhe bungana ku buso bw'urutonde
Amakuru yakusanyijwe n'icyuma gipima ubushyuhe agaragaza ko mu gihe cy'imikorere y'ibikoresho no mu gihe cy'impinduka z'ubushyuhe, ikwirakwizwa ry'ubushyuhe ku buso bwa granite riba ringana cyane. Ndetse no mu gihe ubushyuhe buhinduka cyane, itandukaniro ry'ubushyuhe hagati ya buri gice cyo gupima ku buso bwa platform rihora rigenzurwa muri ± 0.1℃. Ikwirakwizwa ry'ubushyuhe rimwe ryirinda kwangirika kw'urubuga guterwa n'ubushyuhe butaringaniye, rituma ubuso bw'igipimo buhora bugororotse kandi buhamye, kandi rigatanga ibidukikije byizewe byo gupima ibikoresho bya semiconductor metrology.
Ugereranyije n'ibikoresho bisanzwe
Amakuru yapimwe ku rubuga rwa granite yagereranyijwe n'ay'ibikoresho bya semiconductor bipima ubwoko bumwe hakoreshejwe urubuga rwa aloyi ya aluminiyumu, kandi itandukaniro ryari rinini. Mu gihe cy'impinduka z'ubushyuhe zimwe, kwaguka k'umurongo w'urukuta rwa aloyi ya aluminiyumu kungana na nanometero 2.5, bikubye inshuro zirenga umunani ugereranyije n'urubuga rwa granite. Hagati aho, ikwirakwizwa ry'ubushyuhe ku buso bw'urubuga rwa aloyi ya aluminiyumu ntiringana, aho itandukaniro ry'ubushyuhe ntarengwa rigera kuri 0.8°C, bigatuma urukuta ruhinduka kandi bigira ingaruka zikomeye ku buryo bufatika bwo gupima.
Mu isi nyayo y’ibikoresho bya semiconductor metrology, platform za granite, hamwe n’ubushyuhe bwazo buhamye, byabaye ingenzi mu kwemeza ko ibipimo ari ukuri. Amakuru yapimwe agaragaza cyane imikorere myiza ya granite mu gusubiza impinduka mu bushyuhe, atanga inkunga yizewe ya tekiniki ku nganda zikora semiconductor. Uko ibikorwa byo gukora semiconductor bigenda birushaho kunoza imiterere y’ubushyuhe, inyungu yo kudatezuka ku bushyuhe ya platform za granite izarushaho kugaragara, ikomeze guteza imbere udushya mu ikoranabuhanga n’iterambere mu nganda.