Mu ruhererekane nyarwo rwo gukora semiconductor, sisitemu yo kohereza wafer ni nk "" umurongo wubuzima bwumurongo wa chip ", kandi ituze kandi yukuri igena neza umusaruro wimbuto. Igisekuru gishya cya sisitemu yo kwimura wafer ihinduranya ihuza moteri yumurongo hamwe na granite shingiro, kandi ibyiza byihariye byibikoresho bya granite nukuri kode yibanze yo gufungura imikorere ikabije.
?
Granite base: Kubaka "urufatiro rukomeye" rwo kwanduza bihamye
Granite, imaze imyaka miriyoni amagana yo gutunganya geologiya, igaragaramo imyunyu ngugu yimbere kandi imwe. Ibi biranga kamere bituma iba ibikoresho fatizo bya sisitemu yo kohereza wafer. Mubidukikije bigoye byubwiherero bwa semiconductor, granite, hamwe na coefficient ya ultra-low yo kwaguka kwinshi (5-7 × 10⁻⁶ / ℃ gusa), irashobora kurwanya ubushyuhe butangwa mugihe cyibikoresho ndetse n’imihindagurikire y’ubushyuhe bw’ibidukikije, bigatuma ihagarikwa ry’ubunini fatizo kandi rikirinda gutandukana kw’inzira zatewe no guhindagurika. Igikorwa cyacyo cyiza cyane cyo kunyeganyega kirashobora kwihutisha kwinjiza imashini zikoreshwa mugihe cyo gutangira, guhagarika no kwihuta kwa moteri yumurongo, hamwe nimbogamizi ziva hanze zazanywe no gukoresha ibindi bikoresho mumahugurwa, bitanga urubuga ruhamye hamwe na "zero shake" yo kohereza wafer. ?
Hagati aho, imiti ihamye ya granite iremeza ko idashobora kwangirika cyangwa ngo ibe ingese mu mahugurwa ya semiconductor aho reagent ya aside na alkali ihindagurika kandi hasabwa isuku nyinshi, bityo ukirinda ingaruka ziterwa no kwanduza ibintu bitewe no gusaza kw'ibintu cyangwa kwanduza ibintu. Ibiranga ubuso bworoshye kandi bwuzuye birashobora kugabanya neza gufata ivumbi, byujuje ubuziranenge bwumukungugu wibyumba bisukuye kandi bikuraho ibyago byo kwanduza wafer kuva mumuzi. ?
Ingaruka "ubufatanye bwa zahabu" ya moteri yumurongo na granite
Moteri ifite umurongo, hamwe nibiranga nta mashanyarazi yoherejwe, kwihuta cyane n'umuvuduko mwinshi wo gusubiza, guha wafer kwanduza ibyiza bya "byihuse, byukuri kandi bihamye". Urufatiro rwa granite rutanga urubuga rukomeye kandi rwizewe kuri rwo. Bombi bakorera hamwe kugirango bagere ku gusimbuka mu mikorere. Iyo moteri itwara umurongo itwara wafer kugirango ikore kumurongo wa granite, gukomera gukomeye no guhagarara kwibanze bituma ihererekanyabubasha ryimbaraga za moteri, birinda gutakaza ingufu cyangwa gutinda kwatewe no guhindura ibintu. ?
Bitewe nibisabwa na nanoscale neza, moteri yumurongo irashobora kugera kuri micron-urwego rwo kwimura. Ibiranga neza-biranga gutunganya ibiranga granite (hamwe namakosa yibintu bigenzurwa muri ± 1μm) bihuye neza nigenzura ryukuri rya moteri yumurongo, hamwe no kwemeza ko ikosa ryimyanya mugihe cyo kohereza wafer ritarenze ± 5μm. Niba ari umuvuduko mwinshi mubikoresho bitandukanye bitunganyirizwa cyangwa guhagarara neza kugirango uhererekane wafer, guhuza moteri yumurongo hamwe na base ya granite birashobora kwemeza "gutandukana kwa zeru na zeru zeru" mugukwirakwiza wafer. ?
Kugenzura imyitozo yinganda: Gutezimbere kabiri mubikorwa no gutanga umusaruro
Nyuma yo kuzamura sisitemu yo kohereza wafer, uruganda rukomeye rwa semiconductor ku isi rwemeje igisubizo cy’umurongo wa moteri + granite ishingiro, cyongereye uburyo bwo kohereza wafer ku kigero cya 40%, kigabanya igipimo cy’amakosa nko kugongana no kuzimya mu gihe cyo kohereza ku kigero cya 85%, kandi kizamura umusaruro rusange w’ibicuruzwa kuri 6%. Inyuma yamakuru hari garanti yumutekano woherejwe utangwa na granite base hamwe ningaruka yihuse kandi isobanutse neza ya moteri yumurongo, bigabanya cyane igihombo namakosa mugikorwa cyo kohereza wafer. ?
Kuva mubintu bifatika kugeza mubikorwa byuzuye, kuva mubikorwa byiza kugeza kugenzura bifatika, guhuza moteri y'umurongo hamwe na base ya granite byasobanuye ibipimo bya sisitemu yo kohereza wafer. Mugihe kizaza iyo tekinoroji ya semiconductor igenda itera imbere kuri 3nm na 2nm, ibikoresho bya granite rwose bizakomeza gutera imbaraga zikomeye mu iterambere ryinganda nibyiza byabo bidasubirwaho.
Igihe cyo kohereza: Gicurasi-14-2025