Nibihe bice bya sisitemu yo kohereza wafer ikoreshwa ibikoresho bya granite?

Ibikoresho bya Granite bikoreshwa cyane mu nganda ziciriritse bitewe n’imiterere yabyo nziza, nko guhagarara neza, kwaguka kwinshi, no kurwanya ruswa.Iyi mitungo ikora granite ibikoresho byiza byo kubaka ibice-byuzuye muri sisitemu yo kohereza.

Mubikorwa byo gukora igice cya kabiri, sisitemu yo kohereza wafer igira uruhare runini mugutwara waferi mubyiciro bitandukanye byuburyo bwo gukora.Ubusobanuro nukuri nibyo bisabwa byingenzi kuri sisitemu kuko no gutandukana gato bishobora kubangamira inzira zose.Kubwibyo, ibice muri sisitemu yo kohereza wafer bigomba gukorwa mubikoresho byujuje ubuziranenge, kandi granite yujuje ibyo bipimo.

Ibice bimwe bya sisitemu yo kohereza wafer ikozwe mubikoresho bya granite harimo:

1. Imbonerahamwe ya Vacuum Chuck

Imbonerahamwe ya vacuum ikoreshwa mugufata wafer mugihe cyibikorwa, kandi igomba kuba ifite ubuso buhamye kugirango wafer itangirika.Granite nigikoresho cyiza cyo gukora iyi mbonerahamwe kuko ifite igorofa iringaniye, idafite uburinganire butanga umutekano muke kandi neza.Byongeye kandi, granite ifite coefficient nkeya yo kwagura ubushyuhe, bigatuma irwanya ihindagurika ryubushyuhe rishobora gutera impinduka zingana muri wafer.

Icyiciro cyo gutwara ikirere

Icyiciro cyo gutwara ikirere gikoreshwa mu gutwara wafer mu byiciro bitandukanye byo gukora.Icyiciro cyakozwe kugirango gitange urujya n'uruza, rusaba ibisobanuro bihamye kandi bihamye.Granite ikoreshwa muriyi porogaramu kuko ni ibuye rikomeye kandi rikomeye, kandi rirwanya guhindagurika no kwambara mugihe.

3. Imirongo ngenderwaho

Imirongo yerekana icyerekezo ikoreshwa mu kuyobora ikirere gitwara ikirere, kandi igomba kuba ihagaze neza kugirango igabanye amakosa.Granite ikoreshwa mukubaka ubu buyobozi kuko ifite imashini ihamye kandi ikomeye.Ibikoresho kandi birwanya ruswa, byemeza kuramba kwa sisitemu yo kuyobora.

4. Ibikoresho bya Metrology

Ibikoresho bya Metrology bikoreshwa mugupima ibipimo n'imiterere ya wafer mugihe cyo gukora.Granite nigikoresho cyiza cyo kubaka ibi bikoresho kuko ifite ubukana bwinshi, kwaguka gake, hamwe no guhindura ibintu munsi yumutwaro.Byongeye kandi, ubushyuhe bwa granite butuma ibikoresho bya metero biguma bihamye kandi neza mugihe runaka.

Mu gusoza, inganda za semiconductor zishingiye ku busobanuro nukuri, kandi ibikoresho bya granite byagaragaye ko byizewe kandi bihamye mubikorwa byo gukora.Hamwe nibintu byinshi byingenzi muri sisitemu yo kohereza wafer isaba guhagarara neza, neza, no kwagura ubushyuhe buke, injeniyeri zahinduye ibikoresho bya granite kugirango zuzuze ibyo bisabwa bikomeye.