Granite isobanutse neza, hamwe nuburemere bwayo buhanitse, coefficente yo kwaguka kwinshi, imikorere myiza yo kugabanuka hamwe nibintu bisanzwe birwanya magnetique, bifite agaciro gakoreshwa muburyo budasubirwaho mubikorwa byo murwego rwohejuru hamwe nubushakashatsi bwa siyansi aho bisabwa cyane kandi bihamye. Ibikurikira nuburyo bwibanze bwo gukoresha hamwe nibyiza bya tekiniki:
I. Umwanya wibikoresho byo gutunganya Ultra-precision
Ibikoresho byo gukora Semiconductor
Ibisabwa byo gusaba: Imashini ya Lithography kumeza yakazi, ameza yimashini ya wafer, ibikoresho byo gupakira.
Agaciro tekinike:
Coefficient yo kwagura ubushyuhe bwa granite ni (0.5-1.0) × 10⁻⁶ / ℃, ishobora kurwanya ihindagurika ryubushyuhe mugihe nanoscale yerekanwe kumashini ya lithographie (ikosa ryo kwimura <0.1nm mubidukikije ± 0.1 ℃).
Imiterere ya micro-pore y'imbere ikora damping naturel (igipimo cya damping 0,05 kugeza 0.1), igahagarika kunyeganyega (amplitude <2μm) mugihe cyo guca umuvuduko mwinshi n'imashini ishushanya kandi ikemeza ko ubukana bwa Ra bwo gukata wafer butageze kuri 1 mm.
2. Imashini zisya neza kandi zihuza imashini zipima (CMM)
Urubanza rusaba:
Intandaro yimashini itatu yo gupima imashini ifata imiterere ya granite yuzuye, hamwe nuburinganire bwa ± 0.5μm / m. Ufatanije na gari ya moshi ireremba ikirere, igera kuri nano-urwego rwukuri (gusubiramo umwanya ± 0.1μm).
Imashini ikora ya optique yo gusya ifata imiterere igizwe na granite nicyuma. Iyo usya ikirahuri cya K9, uburinganire bwubuso buri munsi ya λ / 20 (λ = 632.8nm), bujuje ibyangombwa bitunganijwe neza bya lazeri.
Ii. Umwanya wa Optics na Photonics
Sisitemu ya telesikopi na sisitemu ya laser
Porogaramu zisanzwe:
Ihuriro rishyigikira ubuso bunini bwa telesikope ya radiyo ifata imiterere yubuki bwa granite, ikaba yoroheje mu buremere bwayo (ubucucike bwa 2.7g / cm³) kandi ifite imbaraga zo guhangana n’umuyaga ukomeye (deformasiyo <50μm munsi yumuyaga urwego 10).
Ihuriro rya optique ya laser interferometero ikoresha micro-porous granite. Imashanyarazi ikosorwa na vacuum adsorption, hamwe nikosa rinini ritarenze 5nm, ryemeza ituze ryikigereranyo cya ultra-precision optique nka gravitational wave detection.
2. Gutunganya neza neza ibikoresho
Ibyiza bya tekiniki:
Imiyoboro ya rukuruzi hamwe nu mashanyarazi ya platifike ya granite yegereye zeru, birinda ingaruka ziterwa na electronique ya magnetiki kubikorwa byuzuye nka ion beam polishing (IBF) hamwe na magnetorheologiya polishinge (MRF). Imiterere yubuso bwuzuye PV agaciro ka lensike yatunganijwe irashobora kugera kuri λ / 100.
Iii. Kugenzura Ikirere no Kugenzura neza
Ikibuga cyo kugenzura indege
Ibihe byo gusaba: Igenzura ryibice bitatu byindege, gupima imiterere no kwihanganira imyanya yindege ya aluminium alloy ibice byubaka.
Imikorere y'ingenzi:
Ubuso bwa platform ya granite buvurwa na ruswa ya electrolytike kugirango ibe ishusho nziza (hamwe nuburemere bwa Ra 0.4-0.8μm), ikwiranye nubushakashatsi bwimbitse bwimbitse, kandi ikosa ryo kumenya umwirondoro ntiri munsi ya 5 mm.
Irashobora kwihanganira umutwaro urenga 200kg yibigize indege, kandi ihinduka rihindagurika nyuma yo gukoresha igihe kirekire ntiri munsi ya 2μm / m, ryujuje ibyangombwa bisabwa neza byo mu cyiciro cya 10 mu nganda zo mu kirere.
2. Calibibasi yibikoresho byo kugendagenda neza
Ibisabwa bya tekiniki: Calibisation ihagaze yibikoresho bidafite imbaraga nka giroskopi na moteri yihuta bisaba urubuga ruhamye cyane.
Igisubizo: platform ya granite ihujwe na sisitemu ikora yo kunyeganyega ikora (inshuro karemano <1Hz), igera kuri kalibrasi yuzuye ya zero-offset itajegajega yibice bidafite imbaraga <0.01 ° / h mubidukikije hamwe no kwihuta kwihuta <1 × 10⁻⁴g.
Iv. Nanotehnologiya na Biomedicine
Gusikana porogaramu ya microscope (SPM)
Imikorere yibanze: Nka shingiro rya microscopi yingufu za atome (AFM) hamwe na scanning tunneling microscopie (STM), igomba kwitandukanya no kunyeganyega kw ibidukikije no gutwarwa nubushyuhe.
Ibipimo ngenderwaho:
Ihuriro rya granite, rifatanije n'amaguru yo kwiherera ya pneumatike yo mu bwigunge, irashobora kugabanya umuvuduko wogukwirakwiza kwinyeganyeza zo hanze (1-100Hz) kugeza munsi ya 5%, ukagera kumashusho ya atome yerekana amashusho ya AFM mubidukikije (ikirere <0.1nm).
Ubushyuhe bukabije buri munsi ya 0.05μm / ℃, bujuje ibisabwa kugirango nanoscale yitegereze ingero z’ibinyabuzima mu bushyuhe buhoraho (37 ℃ ± 0.1 ℃).
2. Ibikoresho byo gupakira biochip
Urubanza rusaba: Ihuriro rihanitse ryerekana imiyoboro ya ADN ikurikirana ibyuma bifata imiyoboro ya granite yo mu kirere ireremba, ifite aho ihagaze kuri ± 0.5μm, ikemeza ko sub-micron ihuza umuyoboro wa microfluidic na electrode yo kumenya.
V. Ibihe Byihutirwa
Ibikoresho bya comptabilite
Ibibazo bya tekiniki: Gukoresha Qubit bisaba ubushyuhe buke cyane (mK urwego) hamwe nibidukikije bikabije.
Igisubizo: Umutungo muke cyane wo kwagura ubushyuhe bwa granite (igipimo cyo kwaguka <1ppm kuva -200 ℃ kugeza ubushyuhe bwicyumba) urashobora guhuza ibimenyetso biranga kugabanuka kwubushyuhe bukabije bwikigereranyo cya magnetiki, bigatuma guhuza neza mugihe cyo gupakira kwa chipi.
2. Sisitemu ya Electron Beam Lithography (EBL) sisitemu
Imikorere yingenzi: Umutungo wimikorere ya granite platform (resistance> 10¹³Ω · m) irinda urumuri rwa electron. Hamwe na disiki ya electrostatike ya spindle, igera ku buryo bunonosoye bwa lithographie yerekana hamwe n'ubugari bwa nanoscale (<10nm).
Incamake
Ikoreshwa rya porogaramu ya granite yuzuye yavuye mumashini gakondo itomora kugeza kumirima igezweho nka nanotehnologiya, physic physics, na biomedicine. Ihiganwa ryibanze ryibanze muburyo bwo guhuza ibintu hamwe nibisabwa mubuhanga. Mu bihe biri imbere, hamwe noguhuza tekinoroji yo kongera imbaraga (nka graphene-granite nanocomposite) hamwe nubuhanga bwogukoresha ubwenge, urubuga rwa granite ruzacamo mu cyerekezo cyukuri cya atome, ubushyuhe bwuzuye bwuzuye, hamwe no guhuza ibikorwa byinshi, bigahinduka ibyingenzi shingiro bishyigikira igisekuru kizaza cyibikorwa bya ultra-precision.
Igihe cyo kohereza: Gicurasi-28-2025