Mu bikoresho bya semiconductor, ni izihe subsystems z'ibanze granite ikoreshwa cyane cyane?

Granite ni kimwe mu bikoresho bikunzwe cyane bikoreshwa mu bikoresho bya semiconductor. Ni ubwoko bw'amabuye akomeye kandi akomoka ku ivu, aboneka mu mabara atandukanye y'ikijuju, umutuku n'umweru. Granite izwiho kuramba kwayo, ubushobozi bwo kwaguka kw'ubushyuhe buke, ndetse n'ubushobozi bwo gutwara ubushyuhe bwiza, bigatuma iba ibikoresho byiza byo gukoreshwa mu bikoresho bya semiconductor.

Imwe mu miterere y’ibanze ikoresha granite mu bikoresho bya semiconductor ni sisitemu yo gucunga no gutunganya wafer. Iyi sisitemu ifite uruhare runini mu gukora ibikoresho bya semiconductor. Wafer ni yo shingiro ry’igikoresho, kandi sisitemu yo gucunga no gutunganya ifite inshingano zo kohereza wafer hagati y’ibyumba bitandukanye n’ibikoresho byo gutunganya. Granite ikoreshwa mu gukora ubuso bwo gucunga wafer bufite imiterere ihamye kandi irambuye kandi itanga urubuga ruhamye rwo gutunganya wafer.

Indi mashini y'ingenzi ikoresha granite ni mashini ikoresha vacuum. Mu bikoresho bya semiconductor, ibyuma bikoresha vacuum bikoreshwa mu kwirinda kwanduzanya mu gihe cyo gukora. Kugira ngo iyi mashini ikore neza, icyuma kigomba kuba gifunze neza, ari naho granite yinjira. Granite ni ibikoresho byiza ku byumba bikoresha vacuum kuko ifite igipimo gito cyane cyo gusohora imyuka kandi ishobora kubungabunga ibidukikije bikoresha vacuum neza. Byongeye kandi, ubuhanga bwinshi bwo gukora granite butuma habaho agapfundikizo gatunganye, gatanga ibidukikije byizewe byo gutunganya wafer.

Sisitemu yo guhuza ni ubundi buryo bw'ingenzi bukoresha imiterere yihariye ya granite. Ubu buryo bushinzwe guhuza ibice bitandukanye by'ibikoresho bya semiconductor mu buryo bunoze kandi bunoze. Granite ikoreshwa mu gushushanya no kubaka ibyiciro byo guhuza kugira ngo ihamye kandi ihamye. Ubukana bwinshi bwa granite bufasha kugera ku buryo bwo guhuza neza, bigatuma habaho ibikoresho bya semiconductor binoze kandi byizewe.

Hanyuma, sisitemu ntoya ya metrology ni ubundi buryo bw'ibikoresho bya semiconductor bikoresha granite. Metrology igira uruhare runini mu gutunganya wafer, kandi ukuri kw'iyi sisitemu ntoya ni ingenzi mu kwemeza ubuziranenge bw'igikoresho. Granite itanga urubuga ruhamye kandi rukomeye rufasha mu kugabanya imitingito no kugabanya ingaruka z'ihindagurika ry'ubushyuhe. Ibi, bifasha mu kugera ku bipimo nyabyo cyane muri sisitemu ntoya ya metrology, biganisha ku gukora ibikoresho bya semiconductor byiza cyane.

Mu gusoza, granite ni igikoresho cy'ingenzi mu gukora ibikoresho bya semiconductor. Imiterere yayo yihariye nko gukomera cyane, kwaguka k'ubushyuhe buke, no gutwara neza ubushyuhe bituma iba ibikoresho byiza cyane ku bikoresho byinshi bya semiconductor, harimo gukoresha no gutunganya wafer, vacuum subsystem, alignment subsystem, na metrology subsystem. Byongeye kandi, ikoreshwa rya granite mu bikoresho bya semiconductor ryafashije mu gukora ibikoresho bigezweho, byizewe kandi bikora neza byahinduye inganda nyinshi.