Mubice nkibikorwa bya semiconductor hamwe nibikoresho bipima neza, uburinganire bwibibanza bya granite byerekana neza imikorere yibikoresho. Kugirango umenye neza ko urubuga rwujuje ubuziranenge, hagomba gushyirwaho ingufu mu bintu bibiri: kumenya ibipimo ngenderwaho no kubahiriza amahame asanzwe. ?
Kugaragaza ibipimo fatizo: Kugenzura byinshi-kugenzura ukuri
Kumenya neza: Kumenya "uburinganire" bw'indege yerekanwe
Flatness nicyo kintu cyerekana ibipimo bya granite itomoye, kandi mubisanzwe bipimwa na laser interferometero cyangwa urwego rwa elegitoroniki. Interineti ya lazeri irashobora gupima neza umunota uhindagurika hejuru yikibanza cyohereza urumuri rwa lazeri no gukoresha ihame ryo kuvanga urumuri, hamwe nukuri kugera kurwego rwa micron. Urwego rwa elegitoronike rupima kwimuka inshuro nyinshi kandi rugashushanya ikarita-itatu yerekana ikarita yubuso bwa platifomu kugirango hamenyekane niba hari aho usanga cyangwa kwiheba. Kurugero, porogaramu ya granite ikoreshwa mumashini ya semiconductor Photolithography isabwa kugira uburinganire bwa ± 0.5μm / m, bivuze ko itandukaniro ryuburebure muburebure bwa metero 1 ritagomba kurenza kimwe cya kabiri cya micrometero. Gusa hifashishijwe ibikoresho byo gutahura neza neza birashobora gukurikizwa. ?
2. Kugaragaza neza: Menya neza "kugororoka" kugendagenda kumurongo
Kurubuga rutwara ibice byimuka neza, kugororoka nibyingenzi. Uburyo busanzwe bwo gutahura nuburyo bwinsinga cyangwa laser collimator. Uburyo bwinsinga burimo guhagarika insinga zicyuma zisobanutse neza no kugereranya ikinyuranyo hagati yubuso bwa platifomu nicyuma kugirango umenye neza. Laser collimator ikoresha umurongo wo gukwirakwiza ibiranga laser kugirango umenye ikosa ryumurongo wubuso bwububiko bwa gari ya moshi. Niba ubugororangingo butujuje ubuziranenge, bizatera ibikoresho guhinduka mugihe cyo kugenda, bigira ingaruka kubikorwa cyangwa kubipima neza. ?
3. Kugaragaza ububobere buke hejuru: Menya neza "ubwiza" bwo guhura
Ubuso bwubuso bwa platform bugira ingaruka muburyo bwo kwishyiriraho ibice. Mubisanzwe, metero yububiko bwa stylus cyangwa microscope optique ikoreshwa mugutahura. Igikoresho cyubwoko bwa stylus cyandika uburebure bwuburebure bwa microscopique muguhuza urubuga hamwe na probe nziza. Mikorosikopi optique irashobora kwitegereza neza imiterere yimiterere. Mubisobanuro bihanitse cyane, ubuso bwubuso bwibibanza bya granite bigomba kugenzurwa kuri Ra≤0.05μm, ibyo bikaba bihwanye ningaruka zimeze nkindorerwamo, byemeza ko ibice byuzuye bihuye neza mugihe cyo kwishyiriraho no kwirinda kunyeganyega cyangwa kwimuka biterwa nu cyuho. ?
Ibipimo nyabyo bikurikiza: amahame mpuzamahanga no kugenzura imbere munganda
Kugeza ubu, ku rwego mpuzamahanga, ibipimo bya ISO 25178 na GB / T 24632 bikunze gukoreshwa nk'ishingiro ryo kumenya ukuri kwa platifike ya granite, kandi hariho ibyiciro bisobanutse kubipimo nko kuringaniza no kugororoka. Mubyongeyeho, inganda zo murwego rwohejuru zikora inganda zishyiraho amahame akomeye yo kugenzura imbere. Kurugero, ibisabwa bisabwa kuri granite platform ya mashini ya Photolithography iri hejuru ya 30% kurenza urwego mpuzamahanga. Mugihe ukora ibizamini, amakuru yapimwe agomba kugereranwa nibipimo bihuye. Gusa urubuga rwujuje ubuziranenge rushobora kwemeza imikorere ihamye mubikoresho byuzuye. ?
Kugenzura neza ibibanza bya granite byuzuye ni umushinga utunganijwe. Gusa mugupima byimazeyo ibipimo ngenderwaho nkuburinganire, kugororoka, hamwe nubusumbane bwubuso, no gukurikiza amahame mpuzamahanga n’ibigo, birashobora kwemezwa neza kandi neza kwizerwa ryurubuga, bigashyiraho urufatiro rukomeye rwinganda zikora inganda zo mu rwego rwo hejuru nka semiconductor hamwe nibikoresho byabigenewe.
Igihe cyo kohereza: Gicurasi-21-2025