Ni gute wagenzura neza urubuga rwa granite? Urebe neza niba ukuri ari ko bisanzwe?

Mu nzego nko mu gukora ibikoresho bya semiconductor no gupima neza, ubuziranenge bw'ibikoresho bya granite bugena neza imikorere y'ibikoresho. Kugira ngo hamenyekane ko ubuziranenge bw'ibikoresho byujuje ibisabwa, hagomba gushyirwa imbaraga mu bintu bibiri: kumenya ibimenyetso by'ingenzi no kubahiriza amahame ngenderwaho.

Gupima ibimenyetso by'ingenzi: Kugenzura uburyo ibintu bitunganye mu buryo butandukanye
Gupima ubugari: Kumenya "ubugari" bw'ikimenyetso cy'aho ibintu biherereye
Ubugari ni cyo kimenyetso cy'ingenzi cy'imiterere y'urukuta rwa granite, kandi ubusanzwe gipimwa hakoreshejwe interferometer za laser cyangwa urwego rwa elegitoroniki. Interferometer ya laser ishobora gupima neza imivuduko y'iminota ku buso bwa platform isohora urumuri rwa laser kandi ikoresheje ihame ryo kubangamira urumuri, hamwe n'uburiganya bugera ku rwego rwa sub-micron. Urwego rwa elegitoroniki rupima inshuro nyinshi kandi rushushanya ikarita y'imiterere y'urukuta ifite imiterere itatu kugira ngo rumenye niba hari aho ibintu biherereye cyangwa aho bibohotse. Urugero, imiterere ya granite ikoreshwa mu mashini zipima imiterere y'urukuta isabwa kugira ubugari bwa ± 0.5μm/m, bivuze ko itandukaniro ry'uburebure buri muri metero 1 ritagomba kurenza igice cya micrometer. Ibi bikoresho byo kumenya neza ni byo byonyine bishobora kwemezwa.
2. Gutahura uburyo ibintu bigororotse: Menya neza ko "uburyo ibintu bigenda neza"
Ku mbuga zitwara ibice byimuka neza, kugororoka ni ingenzi cyane. Uburyo busanzwe bwo kumenya ni uburyo bw'insinga cyangwa laser collimator. Uburyo bw'insinga bukubiyemo guhagarika insinga z'icyuma zikora neza cyane no kugereranya icyuho kiri hagati y'ubuso bw'urukuta n'insinga z'icyuma kugira ngo hamenyekane kugororoka. Laser collimator ikoresha imiterere ya linear propagation ya laser kugira ngo imenye ikosa ry'umurongo w'ubuso bw'ishyirwaho ry'umurongo w'ubuyobozi bw'urukuta. Iyo kugororoka kutujuje ubuziranenge, bizatuma ibikoresho bihinduka mu gihe cyo kugenda, bigira ingaruka ku gutunganya cyangwa gupima neza.
3. Gupima ubukana bw'ubuso: Menya neza ko "ubugari" bw'aho buhurira
Ubukana bw'ubuso bw'urukuta bugira ingaruka ku buryo ibice bishyirwamo. Muri rusange, icyuma gipima ubukana bw'urukuta cyangwa mikorosikopi y'urukuta gikoreshwa mu gutahura. Igikoresho cyo mu bwoko bwa stylus cyandika impinduka z'uburebure bw'urukuta rwa mikorosikopi gikoresheje icyuma gito. Mikorosikopi y'urukuta ishobora kureba neza imiterere y'ubuso. Mu buryo bunoze cyane, ubukana bw'ubuso bw'urukuta rwa granite bugomba kugenzurwa kuri Ra≤0.05μm, bingana n'ingaruka nk'iz'indorerwamo, bikareba ko ibice binoze bihuye neza mu gihe cyo gushyiraho no kwirinda guhinda cyangwa kwimuka bitewe n'icyuho.
Amahame ngenderwaho y’ubuhanga akurikiza: amahame mpuzamahanga n’igenzura ry’imbere ry’ikigo
Kugeza ubu, ku rwego mpuzamahanga, amahame ya ISO 25178 na GB/T 24632 akunze gukoreshwa nk'ishingiro ryo kumenya neza imiterere y'imbuga za granite, kandi hari uburyo busobanutse bwo gushyira mu byiciro ibimenyetso nko kuba ndende no kuba ndende. Byongeye kandi, inganda zikora ibikoresho byo mu rwego rwo hejuru zikunze gushyiraho amahame akomeye yo kugenzura imbere. Urugero, ibisabwa ku buryo imiterere y'imbuga za granite z'imashini ikora fotolithography biri hejuru ya 30% ugereranyije n'amahame mpuzamahanga. Mu gihe cyo gukora ibizamini, amakuru yapimwe agomba kugereranywa n'amahame abigenga. Imbuga zujuje ibisabwa gusa ni zo zishobora kwemeza ko ibikoresho bifite imikorere ihamye.
Gusuzuma neza uburyo platifomu zitunganya granite zimeze ni umushinga ukorwa mu buryo bunoze. Gusa, gusuzuma neza ibipimo by'ingenzi nko kugorora, kugorora, no kugorama k'ubuso, no kubahiriza amahame mpuzamahanga n'ay'ibigo, ni byo bishobora kwemezwa ko platifomu ikora neza kandi yizewe, bigashyiraho urufatiro rukomeye rw'inganda zikora ibintu byo mu rwego rwo hejuru nka semiconductors n'ibikoresho bitunganya neza.