Imashini itajegajega kandi yuzuye - imashini nini yo gupima (CMMs) kugeza ku bikoresho bigezweho bya semiconductor lithographie - ishingiye kuri fondasiyo ya granite. Iyo ukorana na monolithic shingiro yubunini bugaragara, cyangwa ibice byinshi bya Granite Flat Panel, guteranya no kuyishyiraho nibyingenzi nkibikorwa ubwabyo. Gushyira gusa ikibanza cyarangiye ntibihagije; Ibidukikije byihariye nibisabwa bigomba kuba byujujwe kugirango bibungabunge kandi bikoreshe icyerekezo cyemewe cya sub-micron.
1. Urufatiro: Substrate ihamye, Urwego
Igitekerezo gikunze kugaragara ni uko panne ya granite isobanutse neza, nk'iyakozwe mu bucucike bwinshi bwa ZHHIMG® Black Granite (3100 kg / m³), irashobora gukosora hasi idahungabana. Mugihe granite itanga ubukana budasanzwe, igomba gushyigikirwa nuburyo bwakozwe muburyo buke bwo gutandukana.
Ahantu ho guteranira hagomba kuba harimo insimburangingo ya beto itari murwego gusa ahubwo yanakize neza, akenshi mubyiciro bya gisirikare byerekana ubunini n'ubucucike - bikerekana amadolari 1000mm $ yubugari, hasi ya beto ikomeye cyane muri salle ya ZHHIMG. Byibanze, iyi substrate igomba gutandukanywa nisoko yo kunyeganyega hanze. Mu gishushanyo mbonera cyimashini nini nini, dushyiramo ibitekerezo nka moat anti-vibration moat ikikije ibyumba byacu bya metero kugirango tumenye neza ko fondasiyo ubwayo ihagaze kandi yitaruye.
2. Urwego rwo kwigunga: Gutaka no Kuringaniza
Guhuza bitaziguye hagati ya granite panel na fondasiyo ifatika biririndwa rwose. Urufatiro rwa granite rugomba gushyigikirwa kubintu byihariye, bibarwa mu mibare kugirango uhagarike imihangayiko yimbere kandi ukomeze geometrie yemewe. Ibi bisaba sisitemu yo kuringaniza umwuga hamwe na grouting layer.
Iyo ikibaho kimaze guhagarikwa neza ukoresheje jack cyangwa wedge ishobora kugereranywa, imbaraga-nyinshi, zidagabanuka, grout itomoye isunikwa mumwobo uri hagati ya granite na substrate. Iyi grout kabuhariwe ikiza kugirango ikore ubucucike buringaniye, buringaniye bukwirakwiza burundu uburemere bwikibaho, bikarinda kugabanuka cyangwa kugoreka bishobora kuzana imitekerereze yimbere kandi bikabangamira uburinganire bwigihe. Iyi ntambwe ihindura neza granite panel na fondasiyo muburyo bumwe, bufatanije, kandi bukomeye.
3. Kuringaniza Ubushyuhe nigihe gito
Nka hamwe nibikorwa byose byo hejuru-metrology akazi, kwihangana nibyingenzi. Ikibaho cya granite, ibikoresho byo gutaka, hamwe na beto ya beto bigomba kuba byose bigera kuburinganire bwumuriro hamwe nibidukikije bikora mbere yuko igenzura rya nyuma rikorwa. Iyi nzira irashobora gufata iminsi kumwanya munini cyane.
Byongeye kandi, kuringaniza kuringaniza-bikorwa hakoreshejwe ibikoresho nka laser interferometero hamwe nurwego rwa elegitoronike - bigomba gukorwa muburyo bwihuse, umunota wiyongera, bigatuma umwanya wibikoresho bikemuka. Abatekinisiye bacu b'abahanga, bubahiriza ibipimo ngenderwaho bya metero ku isi (DIN, ASME), basobanukiwe ko kwihutisha urwego rwa nyuma bishobora kuzana imihangayiko yihishe, izagaragara nyuma nkikigenda neza.
4. Guhuriza hamwe Ibigize hamwe ninteko yihariye
Kubisanzwe bya ZHHIMG Ibigize Granite cyangwa Panel ya Granite Flat ihuza moteri yumurongo, ibyuma byo mu kirere, cyangwa gari ya moshi ya CMM, inteko yanyuma isaba isuku yuzuye. Ibyumba byacu byateranirizwamo isuku, bigana ibikoresho bya semiconductor ibidukikije, birakenewe kuko nuduce duto twa microscopique dufatiwe hagati ya granite nicyuma gishobora gutera micro-deflection. Imigaragarire yose igomba guhanagurwa neza no kugenzurwa mbere yo gufunga bwa nyuma, kwemeza ko ibice bigize ihame ryimurwa byimikorere muri sisitemu yimashini ubwayo.
Mu kubahiriza ibyo bisabwa bikomeye, abakiriya bemeza ko badashyizeho ibice gusa, ahubwo basobanura neza Datum yanyuma kubikoresho byabo bya ultra-precision-fondasiyo yemejwe na siyansi yubumenyi bwa ZHHIMG nubuhanga bwo gukora.
Igihe cyo kohereza: Ukwakira-29-2025