Ni gute ishingiro rya granite rigira ingaruka ku buryo bwo gupima neza wafers mu buryo budasenya?

Ese?
Ese?
Mu isi nyayo y’inganda zikora ibikoresho bya semiconductor, isuzuma rya wafers ritangiza ibidukikije ni ingenzi cyane kugira ngo harebwe ubuziranenge bwa chips. Ishingiro rya granite risa n’aho ridafite agaciro mu by’ukuri ni "intwari idahimbwe" igena ukuri kw'ivumburwa. Ni gute bigira ingaruka ku bisubizo by'ibizamini? Iyi nkuru izakora isesengura ryimbitse uhereye ku bipimo nk'imiterere y'ibikoresho n'imiterere y'inyubako.
1. Ishingiro Rihamye: Ibyiza karemano bya granite bishyiraho urufatiro rukomeye rwo gukora neza
1. Imikorere myiza cyane ya 'seismic'
Mu gihe cy'ikoreshwa ry'ibikoresho byo gupima bidasenya bya wafer, kuzenguruka kwa moteri no kugenda kw'ibice bya mekanike byose bizatera imitingito. Iyo ibyo bitingito bidahagaritswe neza, bizabangamira cyane uburyo bwo gupima. Imbere muri granite hafatanye cyane na kristu z'amabuye y'agaciro nka quartz na feldspar. Imiterere yayo yihariye ituma ibasha gufata imitingito karemano, ikabasha kwinjiza hejuru ya 90% by'ingufu zo gupima ibikoresho. Amakuru nyayo y'ibipimo by'uruganda runaka rwa semiconductor agaragaza ko nyuma yo gukoresha ishingiro rya granite, uburebure bw'imitingito y'ibikoresho byo gupima bwagabanutse kuva kuri 12μm kugera kuri 2μm, birinda kunyura mu kimenyetso cyo gupima giterwa no guhindagurika.
2. Ingano nto cyane y'ubushyuhe bwo kwaguka
Mu gihe cyo kuvumbura, ibintu nko gushyushya ibikoresho n'impinduka mu bushyuhe bw'ibidukikije byose bigira ingaruka ku buryo icyuma gishyushye gihagaze. Ibikoresho bisanzwe byaguka cyane iyo bishyushye, ariko igipimo cyo kwaguka k'ubushyuhe bwa granite ni 1/5 gusa cy'icyuma. Nubwo ubushyuhe bw'ikirere bwahinduka ho 10°C, guhinduka kwayo bishobora kwirengagizwa. Ibi bituma icyuma gishyushye gitanga urubuga ruhamye rw'ibikoresho byo kugenzura, bikerekana ko aho giherereye hagati y'icyuma gipima n'icyuma gipima amazi gikomeza kuba nyacyo igihe cyose kandi birinda amakosa yo kugenzura aterwa no guhinduka k'ubushyuhe.
Icya kabiri, igishushanyo mbonera nyacyo: Kunoza imiterere y'inyubako birushaho kongera icyizere cyo kubimenya
Gutunganya neza cyane no kwemeza ko ibintu bihagaze neza
Urufatiro rwa granite rwiza rutunganywa hakoreshejwe ikoranabuhanga rya CNC rigezweho rya CNC rifite amashami atanu, rifite ubugari bwa ± 0.5μm/m, ritanga icyerekezo cyo gushyiraho ibikoresho byo kugenzura. Mu igenzura rya wafer, uburebure n'ubugari bw'icyuma gipima ni ingenzi ku bisubizo by'igenzura. Urufatiro rwa granite rufite ubuziranenge buhanitse rushobora kwemeza aho icyuma gipima giherereye neza, bigatuma amakuru y'igenzura arushaho kuba meza kandi yizewe.
2. Guhindura imiterere y'inyubako mu buryo bwihariye
Imashini zikoreshwa mu gupima imashini za granite zishobora guhindurwa kugira ngo zikoreshwe mu bikoresho bitandukanye byo gupima bidasenya ndetse n'ibisabwa mu buryo bwo kuzikoresha. Urugero, kugira ngo zuzuze ibisabwa n'ibikoresho byo kugenzura urumuri kugira ngo urumuri rugaragare, ubuso bw'imashini bushobora gutunganywa by'umwihariko; Kugira ngo zuzuze ibisabwa mu gushyiraho ibikoresho byo gupima ikoranabuhanga, imashini ishobora gushyirwaho imyobo ihamye yo gushyiraho n'udusanduku tw'insinga, bigatuma ibikoresho bishyirwamo byihuse kandi neza kandi bigabanye amakosa yo kubikoresha.
Iii. Gutuza igihe kirekire: Kugabanya igihombo giterwa no kubungabunga ibikoresho
Granite ifite ubukana bwinshi kandi idashobora kwangirika cyane, ifite ubukana bwa Mohs kuva kuri 6 kugeza kuri 7, bikubye gatatu ubukana bw'icyuma gisanzwe. Mu gihe cy'igenzura ry'igihe kirekire, ubuso bw'imashini ntibukunda kwangirika kandi bushobora guhora bufite imiterere myiza. Mu buryo bunyuranye, ishingiro rikozwe mu bindi bikoresho rishobora guteza impinduka mu gushyiraho ibikoresho bitewe no kwangirika no gucika, bityo bigira ingaruka ku buryo bwo kubitahura no kubibungabunga kenshi. Igihe kirekire cyo gukora ndetse no kudacika intege kw'ishingiro rya granite bigabanya cyane inshuro zo kubungabunga ibikoresho kandi bigagabanya ibyago byo gutakaza imiterere bishobora kubaho mu gihe cyo kubisana.
Kuva ku gushyuha kw'ingufu, kudashyuha kugeza ku gishushanyo nyacyo, buri kintu cyose kiri mu ishingiro rya granite kirinda ubuziranenge bw'igeragezwa ry'ama-wafers adasenya. Muri iki gihe cyo gukora ibikoresho bya semiconductor giharanira ubuziranenge busesuye, guhitamo ishingiro rya granite ryiza ni nko kongeramo urwego rukomeye rw'ubwishingizi ku buziranenge n'ubwizerwe bw'ibisubizo by'ibizamini.