Nigute base ya granite igira ingaruka kumyizerere yikizamini kidasenya cya wafer? ?

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Mwisi yuzuye yibikorwa bya semiconductor, igeragezwa ridasenya wafer ni ihuriro ryingenzi kugirango hamenyekane ubwiza bwa chip. Intangiriro ya granite isa nkaho idafite agaciro mubyukuri "intwari itaririmbwe" igena ukuri gutahura. Nigute kwisi bigira ingaruka kubisubizo? Iyi ngingo izakora isesengura ryimbitse kuva mubipimo nkibintu bifatika hamwe nigishushanyo mbonera. ?
1. Urufatiro ruhamye: Ibyiza bya granite byashizeho urufatiro rukomeye rwukuri
1. Imikorere myiza yimitingito
Mugihe cyo gukora wafer ibikoresho byo gupima bidasenya, kuzunguruka kwa moteri no kugenda kwimashini zose bizabyara kunyeganyega. Niba uku kunyeganyega kudahagaritswe neza, bizabangamira cyane ibizamini byukuri. Imbere ya granite ihujwe cyane na kirisiti ya minisiteri nka quartz na feldspar. Imiterere yihariye yayo iha ubushobozi bwo kwinjiza ibintu bisanzwe, bushobora kwinjiza hejuru ya 90% yingufu zo kunyeganyeza ibikoresho. Amakuru nyayo yo gupimwa yumushinga runaka wa semiconductor yerekana ko nyuma yo gukoresha base ya granite, amplitude yo kunyeganyega yibikoresho byo gutahura yagabanutse kuva kuri 12 mm kugeza kuri 2 mm, birinda rwose gutandukana nikimenyetso cyo gutahura cyatewe no kunyeganyega. ?
2. Coefficient nkeya cyane yo kwagura ubushyuhe
Mugihe cyo gutahura, ibintu nko gushyushya ibikoresho nimpinduka zubushyuhe bwibidukikije byose bizagira ingaruka kumiterere yimashini. Ibikoresho bisanzwe byaguka cyane iyo bishyushye, ariko coefficent yo kwagura ubushyuhe bwa granite ni 1/5 cyicyuma. Nubwo ubushyuhe bwibidukikije buhindagurika kuri 10 ℃, ihinduka ryayo rirashobora kwirengagizwa. Ibi bifasha granite base gutanga urubuga ruhamye rwibikoresho byubugenzuzi, bikareba ko umwanya ugereranije hagati yiperereza ryakozwe na wafer ukomeza kuba ukuri igihe cyose kandi ukirinda amakosa yubugenzuzi yatewe no guhindura ubushyuhe. ?
Icya kabiri, igishushanyo mbonera: Kunoza imiterere byongera ubwizerwe bwo gutahura
Gutunganya neza-neza no gutanga ingwate
Ikirangantego cyiza cya granite gitunganywa nubuhanga butanu-axis ihuza tekinoroji ya CNC, hamwe nuburinganire bwa ± 0.5μm / m, itanga ibikoresho byerekana ibikoresho byo kugenzura. Mu igenzura rya wafer, uburebure nuburinganire bwiperereza ni ngombwa kubisubizo byubugenzuzi. Ikibanza cyiza cya granite kirashobora kwemeza neza aho iperereza rihagaze, bigatuma amakuru yubugenzuzi arushaho kuba meza kandi yizewe. ?
2. Guhindura imiterere yihariye
Imashini ya Granite irashobora gutegekwa kubikoresho bitandukanye bya wafer bidasenya hamwe nibisabwa. Kurugero, kugirango wuzuze ibisabwa ibikoresho byo kugenzura optique kugirango bigaragaze urumuri, hejuru yimashini irashobora kuvurwa byumwihariko; Kugirango wuzuze ibisabwa byo kwishyiriraho ibikoresho byo gupima ultrasonic, shingiro irashobora gutegurwa neza nu mwobo usobanutse neza hamwe nu murongo wa kabili, bigafasha kwishyiriraho byihuse kandi neza ibikoresho no kugabanya gutandukana gutahurwa biterwa namakosa yo kwishyiriraho. ?
Iii. Iterambere rirambye: Kugabanya igihombo cyuzuye giterwa no gufata neza ibikoresho
Granite ifite ubukana bwinshi kandi irwanya kwambara cyane, hamwe na Mohs ikomeye ya 6 kugeza 7, ikubye inshuro eshatu kwihanganira kwambara ibyuma bisanzwe. Mugihe cyibikorwa byigihe kirekire byo kugenzura, ubuso bwimashini ntabwo bukunda kwambara kandi burashobora guhora bugumanye imiterere myiza. Ibinyuranyo, ibishingwe bikozwe mubindi bikoresho birashobora gutera impinduka mugushiraho ibikoresho byerekeranye no kwambara no kurira, bityo bikagira ingaruka kubimenyekanisha kandi bigasaba kalibrasi no kuyitaho kenshi. Ubuzima burebure bwa serivisi hamwe no guhagarara neza kwa base ya granite kugabanya neza inshuro zo gufata neza ibikoresho no kugabanya ibyago byo gutakaza neza bishobora kubaho mugihe cyo kubungabunga. ?
Kuva mukurwanya ihungabana, kurwanya ubushyuhe kugera kubishushanyo mbonera, buri kintu cyose kiranga granite kirinda ukuri kwipimisha ridasenya wafers. Muri iki gihe cya semiconductor yinganda ikurikirana neza neza, guhitamo urwego rwohejuru rwa granite ni nko kongeramo urwego rukomeye rwubwishingizi kubwukuri kandi bwizewe bwibisubizo. ?