Mu rwego rwo kugenzura wafer ya semiconductor, ubuziranenge bwibidukikije bwisuku bifitanye isano itaziguye numusaruro wibicuruzwa. Mugihe ubusobanuro bwibikorwa byo gukora chip bikomeje gutera imbere, ibisabwa kubikoresho bitwara ibikoresho byo gutahura biragenda bikomera. Ibikoresho bya Granite, hamwe nibiranga zeru zeru zirekurwa hamwe n’umwanda muke, byarenze ibikoresho byuma bidafite ingese kandi byabaye igisubizo cyatoranijwe kubikoresho byo kugenzura wafer.
Granite ni urutare rusanzwe rwaka cyane rugizwe nubutare butari ubutare nka quartz, feldspar na mika. Ibi biranga biha inyungu zeru zeru zirekura. Ibinyuranye na byo, ibyuma bitagira umwanda, nk'uruvange rw'ibyuma nk'icyuma, chromium na nikel, bikunda kwangirika kw'amashanyarazi ku butaka bwayo bitewe no gutwarwa n'umwuka w'amazi hamwe na gaze ya acide cyangwa alkaline mu isuku, bikaviramo kugwa mu byuma bya ion nka Fe²⁺ na Cr³⁺. Iyo utuntu duto tumaze kwizirika hejuru ya wafer, bazahindura imiterere yumuriro wibikoresho bya semiconductor mubikorwa bizakurikiraho nka Photolithography na etching, bitera umuvuduko ukabije wa transistor, ndetse biganisha kumuzingo mugufi. Ikizamini cy’ibigo by’umwuga cyerekana ko nyuma ya platform ya granite yakomeje guhura nubushyuhe bwicyumba cy’icyumba cy’ubushyuhe hamwe n’ibidukikije (23 ± 0.5 ℃, 45% ± 5% RH) mu gihe cy’amasaha 1000, irekurwa ry’icyuma ryari munsi y’ikimenyetso cyo kumenya (<0.1ppb). Igipimo cyubusembwa bwa wafer cyatewe nicyuma cyanduye mugihe ukoresheje ibyuma bidafite ingese birashobora kugera kuri 15% kugeza kuri 20%.
Kubijyanye no kugenzura ibice byanduye, platform ya granite nayo ikora neza bidasanzwe. Ubwiherero bufite byinshi bisabwa cyane kugirango habeho kwibumbira mu kirere. Kurugero, mu bwiherero bwa ISO Icyiciro cya 1, umubare wa 0.1μm uduce twemerewe kuri metero kibe nturenga 10. Nubwo icyuma cyuma kitagira umuyonga cyakorewe imiti ya polishinge, kirashobora kubyara imyanda cyangwa igipimo cya oxyde ikuramo bitewe nimbaraga zo hanze nko kunyeganyeza ibikoresho no gukora abakozi, bishobora kubangamira inzira ya optique cyangwa gushushanya hejuru ya wafer. Ibikoresho bya Granite, hamwe nuburinganire bwa minerval (ubucucike ≥2.7g / cm³) hamwe nubukomere bukabije (6-7 kurwego rwa Mohs), ntibakunda kwambara cyangwa kumeneka mugihe kirekire. Ibipimo byapimwe byerekana ko bishobora kugabanya ubunini bwibice byahagaritswe mu kirere cy’ibikoresho byo gutahura hejuru ya 40% ugereranije n’ibyuma bitagira umwanda, bikomeza neza igipimo cy’isuku.
Usibye ibiranga isuku, imikorere yuzuye ya platform ya granite nayo irenze kure iy'ibyuma bitagira umwanda. Kubijyanye nubushyuhe bwumuriro, coefficente yayo yo kwagura ubushyuhe ni (4-8) × 10⁻⁶ / ℃, munsi ya kimwe cya kabiri cyibyuma bitagira umwanda (hafi 17 × 10⁻⁶ / ℃), bishobora gukomeza neza neza neza aho ibikoresho byamenyekanye mugihe ubushyuhe bwicyumba gisukuye buhindagurika. Ikirangantego cyo hejuru kiranga (igipimo cya damping> 0.05) kirashobora kwihuta kwihuta kwinyeganyeza ryibikoresho no gukumira iperereza ryerekana ko ridahungabana. Kurwanya ruswa kwayo ituma ishobora kuguma itekanye nubwo ihura n’umuti wa fotora, imyuka ya gaze hamwe nindi miti idakenewe gukingirwa.
Kugeza ubu, urubuga rwa granite rukoreshwa cyane mu nganda zikora za wafer. Imibare irerekana ko nyuma yo kwemeza urubuga rwa granite, igipimo cyo guca imanza zitari nke za wafer zagaragaye zagabanutseho 60%, ibikoresho byo guhinduranya ibikoresho byongerewe inshuro eshatu, kandi muri rusange igiciro cy’umusaruro cyaragabanutseho 25%. Mugihe inganda za semiconductor zigenda zigana muburyo bunoze, urubuga rwa granite, hamwe nibyiza byingenzi nko kurekura ibyuma bya zeru no kwanduza uduce duto duto, bizakomeza gutanga inkunga ihamye kandi yizewe yo kugenzura wafer, bibe imbaraga zingenzi zitera iterambere ryinganda.
Igihe cyo kohereza: Gicurasi-20-2025