Platifomu ya granite yagenewe ibyumba bisukuye: Nta irekurwa ry'icyuma rya ion, amahitamo meza ku bikoresho byo kugenzura wafer.

Mu rwego rwo kugenzura imashini zipima ifumbire ya semiconductor, ubuziranenge bw'ahantu ho gusukura bufitanye isano itaziguye n'umusaruro w'umusaruro. Uko uburyo bwo gukora imashini zipima ifumbire bukomeza gutera imbere, ibisabwa ku bikoresho byo gupima ifumbire bitwara ifumbire birimo kugenda birushaho gukomera. Imashini zipima ifumbire ya granite, zifite imiterere yo kutagira irekurwa rya ioni y'icyuma n'umwanda muke w'uduce, zarenze ibikoresho bisanzwe by'icyuma kitagira umugese kandi ziba igisubizo gikunzwe cyane ku bikoresho byo kugenzura ifumbire ya wafer.

Granite ni ibuye karemano rigizwe ahanini n'amabuye y'agaciro atari ay'icyuma nka quartz, feldspar na mica. Iyi miterere iha inyungu yo kurekura iyoni z'icyuma. Mu buryo bunyuranye, icyuma kitagira umugese, nk'icyuma gikozwe mu byuma nka icyuma, chromium na nikeli, gikunze kwangirika bitewe n'ibyuka by'amazi n'imyuka ya aside cyangwa alkaline mu cyumba gisukuye, bigatuma iyoni z'icyuma nka Fe²⁺ na Cr³⁺ zigwa. Iyo izoni nto zimaze gufatana ku buso bwa wafer, zizahindura imiterere y'amashanyarazi y'ibikoresho bya semiconductor mu bikorwa bikurikira nka photolithography na etching, bigatera threshold voltage drift ya transistor, ndetse bigatera circuits ngufi muri circuits. Amakuru y'ibizamini by'inzobere agaragaza ko nyuma y'uko platform ya granite ikomeje gushyirwa mu bushyuhe n'ubushuhe bw'icyumba (23±0.5℃, 45%±5% RH) mu gihe cy'amasaha 1000, kurekura iyoni z'icyuma byari munsi y'umupaka wo kubimenya (< 0.1ppb). Igipimo cy'ubusembwa bw'udupira twa wafer giterwa n'ubwandu bwa iyoni y'icyuma iyo hakoreshejwe ibyuma bitagira umugese gishobora kuba kiri hagati ya 15% na 20%.

Mu bijyanye no kugenzura ubwandu bw'uduce duto, urubuga rwa granite narwo rukora neza cyane. Ibyumba byo gusukura bifite ibisabwa cyane kugira ngo uduce duto duto duto duto duto duto duto duto duto duto duto duto duto duto duto duto duto duto duto duto. Urugero, mu byumba byo gusukura bya ISO Class 1, umubare w'uduce duto twa 0.1μm twemerewe kuri metero kibe nturenga 10. Nubwo urubuga rw'icyuma cya stainless steel rwaba rwarakorewe isuku, rushobora gukora imyanda y'icyuma cyangwa ingano ya okiside ikavaho bitewe n'imbaraga zo hanze nko guhindagura ibikoresho no gukora kw'abakozi, bishobora kubangamira inzira yo gutahura cyangwa gushwanyaguza ubuso bwa wafer. Inteko za granite, zifite imiterere yazo y'ubutare bwinshi (ubucucike ≥2.7g/cm³) n'ubukana bwinshi (6-7 ku gipimo cya Mohs), ntizikunda kwangirika cyangwa kwangirika mu gihe cyo gukoreshwa igihe kirekire. Ibipimo byapimwe bigaragaza ko zishobora kugabanya ubwinshi bw'uduce duto duto mu kirere cy'ibikoresho byo kuvumbura ku kigero kirenga 40% ugereranije n'inyubako za stainless steel, bityo zigakomeza neza amahame y'urwego rw'icyumba cyo gusukura.

Uretse imiterere yayo isukuye, imikorere yuzuye ya granite irarenze kure imikorere y'icyuma kidashonga. Ku bijyanye no kudahungabana k'ubushyuhe, ingano yayo yo kwaguka k'ubushyuhe ni (4-8) × 10⁻⁶/℃ gusa, munsi ya kimwe cya kabiri cy'icyuma kidashonga (hafi 17×10⁻⁶/℃), ibi bikaba bishobora gukomeza neza uburyo ibikoresho bivumbura bishyirwamo iyo ubushyuhe bwo mu cyumba gisukuye buhindagurika. Imiterere yo kugabanuka kw'amazi menshi (ikigereranyo cyo kudashonga > 0.05) ishobora kugabanya vuba guhinda kw'ibikoresho no kubuza icyuma gipima gutigita. Ubudahangarwa bwayo karemano butuma ikomeza guhindagurika nubwo yahura n'ibintu bisukura, imyuka itwika n'ibindi binyabutabire bitabaye ngombwa ko irinda gutwikirwa.

Kuri ubu, urubuga rwa granite rukoreshwa cyane mu nganda zikora wafer zigezweho. Amakuru agaragaza ko nyuma yo gukoresha urubuga rwa granite, igipimo cyo kubona uduce tw’ubuso bwa wafer cyagabanutseho 60%, igihe cyo gupima ibikoresho cyongereweho inshuro eshatu, kandi ikiguzi cy’umusaruro muri rusange cyagabanutseho 25%. Uko inganda za semiconductor zigenda zigana ku buhanga bwo hejuru, urubuga rwa granite, rufite ibyiza byarwo by’ingenzi nko kutagira irekurwa rya ion y’icyuma no kugabanuka k’umwanda w’uduce, ruzakomeza gutanga inkunga ihamye kandi yizewe yo kugenzura wafer, ikaba imbaraga ikomeye itera imbere mu nganda.