Ibice bya Granite bifasha XYZT itunganijwe neza ya gantry yimikorere kugirango yizere neza ko inganda zikora neza.

Mu mahugurwa yo gukora semiconductor, ibisabwa mubikorwa byo gukora chip kugirango ibidukikije bishoboke kandi ibikoresho birarenze, kandi gutandukana kwose bishobora gutuma igabanuka ryinshi ryumusaruro wa chip. Ihuriro rya XYZT risobanutse neza rishingiye kubice bya granite kugirango bifatanye nibindi bice byurubuga kugirango hubakwe urufatiro rukomeye rwo kugera kuri nanoscale neza.
Ibintu byiza cyane byo kunyeganyega
Mu mahugurwa yo gukora igice cya kabiri, imikorere yibikoresho bya peripheri hamwe nabakozi bagenda bishobora gutera kunyeganyega. Imiterere yimbere yibigize granite yuzuye kandi irasa, hamwe nibintu bisanzwe biranga damping, nkibinyeganyega neza "barrière". Iyo ihindagurika ryo hanze ryandujwe kuri platform ya XYZT, igice cya granite kirashobora guhuza neza ingufu zirenga 80% zingufu zinyeganyeza kandi bikagabanya kwivanga kwinyeganyeza kumurongo wukuri. Muri icyo gihe, urubuga rufite ibikoresho bihanitse byo mu kirere bireremba sisitemu, ikora ifatanije n'ibigize granite. Ikirere kireremba mu kirere gikoresha firime ya gaze ihamye ikorwa na gaze yumuvuduko mwinshi kugirango umenye urujya n'uruza rwo guhagarika ibice byimuka bya platifomu no kugabanya ihindagurika rito riterwa no guterana imashini. Hamwe na hamwe, byombi byemeza ko umwanya uhagaze neza kuri platifomu uhora ubungabunzwe kurwego rwa nanometero mubikorwa byingenzi nka chip lithographie na etching, kandi ukirinda gutandukana kwinzira zumuzingi ziterwa no kunyeganyega.
Umutekano mwiza cyane
Ihindagurika ry'ubushyuhe n'ubukonje mu mahugurwa bigira uruhare runini ku bijyanye n'ibikoresho byo gukora chip. Ubushyuhe bwo kwagura ubushyuhe bwa granite ni buke cyane, muri 5-7 × 10⁻⁶ / ℃, ubunini ntibuba buhindutse iyo ubushyuhe buhindutse. Nubwo itandukaniro ryubushyuhe hagati yumunsi nijoro mw'amahugurwa cyangwa kubyara ubushyuhe bwibikoresho bituma ubushyuhe bwibidukikije buhindagurika, ibice bya granite birashobora kuguma bihamye kugirango birinde ihindagurika ryurubuga bitewe no kwaguka kwinshi no kugabanuka. Muri icyo gihe, sisitemu yo kugenzura ubushyuhe bwubwenge ifite ibikoresho ikurikirana ikurikirana ubushyuhe bwibidukikije mugihe nyacyo, igahita ihindura ibyuma bikonjesha hamwe nogukwirakwiza ubushyuhe, kandi ikagumana ubushyuhe bwamahugurwa kuri 20 ° C ± 1 ° C. Ufatanije nibyiza byo guhagarika ubushyuhe bwa granite, urebe neza ko urubuga rukora igihe kirekire, ibipimo byerekana uburebure bwa chipi ya nanometero yerekana neza niba ibipimo byerekana neza ibipimo byerekana ibipimo byerekana neza.
Huza ibikenewe bidukikije bisukuye
Amaduka acururizwamo igice gikenera gukomeza kugira isuku murwego rwo hejuru kugirango umukungugu utanduza chip. Ibikoresho bya Granite ubwabyo ntabwo bitanga umukungugu, kandi hejuru biroroshye, ntabwo byoroshye gukuramo umukungugu. Ihuriro muri rusange ryemera imiterere yuzuye ifunze cyangwa igice cyafunzwe kugirango igabanye kwinjiza ivumbi ryo hanze. Sisitemu yo kuzenguruka ikirere imbere ihujwe na sisitemu yo guhumeka neza y’amahugurwa kugira ngo isuku y’ikirere igere ku rwego rusabwa n’inganda zikora chip. Muri ibi bidukikije bisukuye, ibice bya granite ntibizagira ingaruka kumikorere kubera isuri, kandi ibice byingenzi nkibikoresho byerekana neza na moteri hamwe na moteri ya platifomu nabyo birashobora gukora neza, bigatanga garanti yizewe kandi yizewe ya nanoscale yerekana neza ko ikora chip, kandi igafasha inganda za semiconductor kwimuka murwego rwo hejuru.