Mu nganda zikora ibikoresho bya semiconductor, imashini ikoresha fotolithography ni igikoresho cy'ingenzi kigena uburyo ibyuma bipima neza, kandi ishingiro rya granite, rifite imiterere myinshi, ryabaye igice cy'ingenzi cy'imashini ikoresha fotolithography.
Ubushyuhe buhamye: "Ikibando" kirwanya impinduka z'ubushyuhe
Iyo imashini ikora fotolithography ikora, itanga ubushyuhe bwinshi. Ndetse n'ihindagurika ry'ubushyuhe rya 0.1℃ gusa rishobora gutuma ibice by'ibikoresho bihinduka kandi rikagira ingaruka ku buryo fotolithography ikora. Igipimo cy'ubushyuhe bwa granite ni gito cyane, ni 4-8 × 10⁻⁶/℃ gusa, bingana na 1/3 cy'icyuma na 1/5 cy'icyuma cya aluminiyumu. Ibi bituma ishingiro rya granite rigumana ubuziranenge mu gihe imashini ikora fotolithography igihe kirekire cyangwa iyo ubushyuhe bw'ibidukikije buhindutse, bigatuma ibice by'urumuri n'imiterere ya mashini bishyirwa neza.
Umusaruro ukomeye wo kurwanya guhindagura: "Isponji" ifata guhindagura
Mu ruganda rukora ibikoresho bya semiconductor, imikorere y'ibikoresho bikikije ndetse n'ingendo z'abantu byose bishobora gutuma habaho imitingito. Granite ifite ubucucike bwinshi n'imiterere ikomeye, kandi ifite ubushobozi bwiza bwo kugabanya imitingito, ifite igipimo cyo kugabanya imitingito inshuro 2 kugeza kuri 5 z'ibyuma. Iyo imitingito yo hanze yoherejwe ku ishingiro rya granite, ubwumvikane hagati ya kristu z'imbere zihindura ingufu zo kugabanya imitingito mo ingufu z'ubushyuhe kugira ngo zisenyuke, ibi bishobora kugabanya cyane imitingito mu gihe gito, bigatuma imashini ikora photolithography ishobora kugarura vuba umutekano no kwirinda ko imiterere ya photolithography ihinduka nabi bitewe no guhindagurika.
Gukomera ku binyabutabire: "Umurinzi" w'ibidukikije bisukuye
Imbere mu mashini ikora photolithography hahurira n'ibintu bitandukanye bya shimi, kandi ibikoresho bisanzwe by'icyuma bishobora kwangirika cyangwa kurekura uduce duto. Granite igizwe n'amabuye y'agaciro nka quartz na feldspar. Ifite imiterere ihamye ya shimi kandi irwanya kwangirika gukomeye. Nyuma yo kwinjizwa mu bisubizo bya aside na alkali, kwangirika kw'ubuso bwayo kuba guto cyane. Hagati aho, imiterere yayo ikomeye nta myanda cyangwa ivumbi ikora, yujuje ibisabwa n'amahame yo mu cyumba cyo gusukura kandi igabanya ibyago byo kwanduzwa na wafer.
Uburyo bwo gutunganya ibintu bushobora guhinduka: "Ibikoresho byiza" byo gukora ibipimo ngenderwaho nyabyo
Ibice by'ingenzi by'imashini ikora fotolithography bigomba gushyirwa ku buso bugezweho. Imiterere y'imbere ya granite ni imwe kandi yoroshye kuyitunganya neza cyane binyuze mu gusya, gusiga irangi n'ubundi buryo. Ubugari bwayo bushobora kugera kuri ≤0.5μm/m, kandi ubugari bw'ubuso bwa Ra ni ≤0.05μm, bitanga ishingiro ry'uburyo ibintu nk'amatara y'urumuri bishyirwamo neza.
Iramba kandi nta kubungabungwa: "Ibikoresho bityaye" byo kugabanya ikiguzi
Ugereranyije n'ibikoresho by'icyuma bikunze kunanirwa no kwangirika mu gihe kirekire, granite ntabwo ihinduka cyangwa ngo ivunike mu gihe ikoreshwa mu buryo busanzwe, kandi ntisaba gusukurwa ku buso, bityo ikirinda ibyago byo gusiga irangi no kwanduzwa. Mu bikorwa bifatika, nyuma yo gukoreshwa imyaka myinshi, ibimenyetso by'ingenzi by'imikorere y'ishingiro rya granite bishobora gukomeza kuba bihamye, bigabanura ikiguzi cyo gukoresha no kubungabunga ibikoresho.
Kuva ku guhagarara k'ubushyuhe, kudahindagurika kw'ingufu za shimi, imiterere myinshi y'ishingiro rya granite ihuye neza n'ibisabwa n'imashini ikora fotolithography. Uko inzira yo gukora chips ikomeza gutera imbere ikagera ku buhanga bwo hejuru, ishingiro rya granite rizakomeza kugira uruhare rudasimburwa mu rwego rwo gukora semiconductor.
Igihe cyo kohereza: Gicurasi-20-2025