Granite base: Kuki ari "Umufatanyabikorwa wa zahabu" ya mashini ya Photolithography?

Mu gukora semiconductor, imashini ya Photolithography nigikoresho cyingenzi kigena neza neza chip, kandi base ya granite, hamwe nibiranga byinshi, yabaye ikintu cyingenzi cyimashini ifotora.

Ubushyuhe bwumuriro: "Ingabo" irwanya Ubushyuhe
Iyo imashini ifotora ikora, itanga ubushyuhe bwinshi. Ndetse ihindagurika ryubushyuhe bwa 0.1 ℃ gusa rishobora gutera ihinduka ryibikoresho kandi bikagira ingaruka kuri Photolithography. Coefficient yo kwagura ubushyuhe bwa granite ni mike cyane, gusa 4-8 × 10⁻⁶ / ℃, ni hafi 1/3 cyibyuma na 1/5 cyumuti wa aluminium. Ibi bifasha granite ishingiro kugirango igumane ituze mugihe imashini ya Photolithography ikora igihe kinini cyangwa mugihe ubushyuhe bwibidukikije bwahindutse, bikerekana neza neza ibice bya optique hamwe nubukanishi.

Ibikorwa birwanya anti-vibration: "Sponge" ikurura kunyeganyega
Mu ruganda rwa semiconductor, imikorere yibikoresho bikikije hamwe no kugenda kwabantu byose bishobora kubyara. Granite ifite ubucucike bwinshi nuburyo bukomeye, kandi ifite ibintu byiza byo gusiba, hamwe nikigereranyo cyo kugabanuka inshuro 2 kugeza kuri 5 zicyuma. Iyo ihindagurika ryo hanze ryandujwe kuri granite base, ubushyamirane buri hagati yimyunyu ngugu ya minisiteri ihindura imbaraga zinyeganyeza imbaraga zubushyuhe kugirango zivemo, zishobora kugabanya cyane kunyeganyega mugihe gito, bigatuma imashini ifotora ishobora kugarura byihuse kandi ikirinda guhuzagurika cyangwa kudahuza uburyo bwa fotolitografiya bitewe no kunyeganyega.

Imiti ihamye: "Umurinzi" wibidukikije bisukuye
Imbere yimashini ifotora ihura nibitangazamakuru bitandukanye byimiti, kandi ibikoresho byuma bisanzwe bikunda kwangirika cyangwa kurekura ibice. Granite igizwe namabuye y'agaciro nka quartz na feldspar. Ifite imiti ihamye kandi irwanya ruswa. Nyuma yo gushiramo aside na alkali ibisubizo, kubora hejuru ni bito cyane. Hagati aho, imiterere yacyo yuzuye itanga imyanda cyangwa umukungugu, byujuje ibisabwa mu isuku yo mu rwego rwo hejuru kandi bigabanya ibyago byo kwanduza wafer.

Gutunganya imihindagurikire y'ikirere: "Ikintu cyiza" cyo gukora ibipimo nyabyo
Ibice byingenzi bigize imashini ya Photolithography bigomba gushyirwaho hejuru-yerekana neza. Imiterere yimbere ya granite ni imwe kandi biroroshye gutunganywa neza cyane binyuze mu gusya, gusya hamwe nubundi buhanga. Uburinganire bwacyo bushobora kugera kuri ≤0.5μm / m, naho hejuru ya Ra ni .050.05μm, bitanga ishingiro ryukuri ryo gushiraho ibice nka lens optique.

Kuramba kuramba no kubungabunga-ubusa: "ibikoresho bikarishye" byo kugabanya ibiciro
Ugereranije n'ibikoresho by'icyuma bikunda kunanirwa no gucika igihe kirekire, granite ntishobora guhura na plastike cyangwa kuvunika munsi yumutwaro usanzwe, kandi ntibisaba kuvurwa hejuru, bityo wirinda ibyago byo gutwikira ibishishwa no kwanduza. Mubikorwa bifatika, nyuma yo gukoreshwa mumyaka myinshi, ibyingenzi byingenzi byerekana imikorere ya granite irashobora gukomeza guhagarara neza, kugabanya imikorere no gufata neza ibikoresho.

Uhereye ku bushyuhe bwumuriro, kunyeganyega kudahangarwa kwimiti, ibintu byinshi biranga base ya granite byujuje neza ibisabwa na mashini ya Photolithography. Mugihe ibikorwa byo gukora chip bikomeje gutera imbere muburyo bunoze, base granite izakomeza kugira uruhare rudasubirwaho mubijyanye no gukora semiconductor.