Kuva ku burinzi bwa elegitoroniki kugeza ku butarimo ingufuri: Ni gute ishingiro rya granite ririnda ibidukikije bipima bya sensors zifite ubuhanga buhanitse?

Mu nzego zigezweho nko gukora utumashini duto two mu bwoko bwa semiconductor chips no kugenzura neza optique, ibikoresho byo gupima neza cyane ni byo bikoresho by'ingenzi byo kubona amakuru y'ingenzi. Ariko, ibidukikije bigoye bya elegitoroniki hamwe n'imiterere idahamye y'umubiri akenshi bituma habaho amakuru atari yo yo gupima. Ishingiro rya granite, rifite imiterere idakomeye kandi irinda kandi rihamye, ryubaka ahantu heza ho gupima sensor.

Imiterere idakoresha ingufu za rukuruzi igabanya isoko y'ingaruka mbi
Utumashini dupima neza cyane nka utwuma dupima ibintu dukoresha imbaraga n'utundi dupima imbaraga za rukuruzi birakomeye cyane iyo bihuye n'impinduka mu mbaraga za rukuruzi. Ubushobozi bwa rukuruzi bw'ibikoresho bisanzwe by'icyuma (nk'icyuma n'icyuma cya aluminiyumu) ​​bushobora gutuma ingufu za rukuruzi zibangamira urusobe rw'ibintu. Iyo utwuma dupima ibintu turimo gukora, ingufu za rukuruzi zo hanze zikorana n'imbaraga za rukuruzi zo imbere, ibyo bikaba bishobora gutuma amakuru ahindagurika mu buryo bworoshye.

Granite, nk'ibuye karemano ry'umukungugu, igizwe n'amabuye y'agaciro nka quartz, feldspar na mica. Imiterere yayo y'imbere igaragaza ko nta rukuruzi ifite na gato. Shyira sensor ku gice cya granite kugira ngo ukureho ingaruka mbi za rukuruzi z'ibanze mu mizi. Mu bikoresho by'ubuhanga nka mikorosikopi za elegitoroniki na resonance ya nyukirezi, igice cya granite cyemeza ko sensor ifata neza impinduka nto z'ikintu kigamije, hirindwa amakosa yo gupima aterwa no kubangamira rukuruzi.
Imiterere y'imiterere ihuzwa n'uburinzi bwa elegitoroniki
Nubwo granite idafite ubushobozi bwo kurinda amashanyarazi nk'ibyuma, imiterere yayo yihariye ishobora no gutuma ingufu za electromagnetic zigabanuka. Granite irakomeye mu miterere yayo kandi ifite imiterere myinshi. Imiterere y'amabuye y'agaciro ifatanye ikora uruzitiro rufatika. Iyo imiraba ya electromagnetic yo hanze ikwirakwira mu gice cy'inyuma, igice cy'ingufu cyinjizwa na kristalo maze kigahinduka ingufu z'ubushyuhe, hanyuma igice kigaragara kigakwirakwira ku buso bwa kristalo, bityo bigabanura ubukana bw'imiraba ya electromagnetic igera kuri sensor.

Mu bikorwa bifatika, ishingiro rya granite rikunze guhuzwa n'inshundura z'icyuma kugira ngo habeho imiterere ivanze. Uduce tw'icyuma dufunga imiraba ya electromagnetic ifite frequency nyinshi, kandi granite irushaho kugabanya imbaraga zisigaye mu gihe itanga inkunga ihamye. Mu nganda zikora ibikoresho by'ikoranabuhanga birimo ibyuma bihindura frequency na moteri, uru ruvange rutuma ibikoresho bipima amashanyarazi bikorana neza ndetse no mu kirere gikomeye cya electromagnetic.
Gutuza imiterere y'umubiri no kongera uburyo bwo gupima bwizewe
Igipimo cy’ubushyuhe bwa granite kiri hasi cyane (ni (4-8) × 10⁻⁶/℃ gusa), kandi ingano yayo ihinduka gato cyane iyo ubushyuhe buhindagurika, bigatuma aho sensor ishyirwa haguma neza. Imikorere yayo myiza yo kugabanya ubushyuhe ishobora guhita yigarurira imitingito y’ibidukikije no kugabanya ingaruka z’imikoreshereze y’ibikoresho ku bipimo. Mu gupima neza, ishingiro rya granite rishobora gukumira inzira y’urumuri iterwa no guhinduka kw’ubushyuhe no guhindagura, rikemeza ko amakuru yo gupima ari ukuri kandi ashobora gusubiramo.

Mu gihe cyo gupima ubunini bwa wafer ya semiconductor, nyuma y'uko ikigo runaka gikoresheje ishingiro rya granite, ikosa ryo gupima ryagabanutse kuva kuri ± 5μm kugera kuri ± 1μm. Mu isuzuma ry'imiterere n'aho ibice by'indege bihagaze, sisitemu yo gupima ikoresheje ishingiro rya granite yongereye ubushobozi bwo gusubiramo amakuru ku kigero kirenga 30%. Ibi bimenyetso bigaragaza neza ko ishingiro rya granite ryongera cyane icyizere cyo gupima ibikoresho bifite ubuhanga bwo hejuru binyuze mu gukuraho ingaruka za elegitoroniki no gutuza ibidukikije, bigatuma biba ingenzi cyane mu ishami rigezweho ryo gupima neza.