Ese?
Mu rwego rwo gukora ibikoresho bya semiconductor, nk'ibikoresho by'ingenzi bigena uburyo bwo gukora chips neza, uburyo ibidukikije by'imbere mu mashini ya photolithography bihagaze neza ni ingenzi cyane. Kuva ku gushyushya urumuri rwinshi rwa ultraviolet kugeza ku mikorere ya nanoscale precision motion platform, nta gutandukana na gato gushobora kubaho muri buri sano. Ishingiro rya granite, rifite imiterere yihariye, rigaragaza ibyiza bidasanzwe mu kwemeza ko imashini za photolithography zikora neza kandi zikongera uburyo photolithography ikora neza.
Imikorere myiza cyane yo kurinda amashanyarazi
Imbere mu mashini ikora fotolithography yuzuyemo ibidukikije bigoye cyane bya electromagnetic. Interference ya electromagnetic (EMI) ikorwa n'ibice nk'urumuri rwa ultraviolet rukabije, moteri zitwara, n'amashanyarazi afite frequency nyinshi, iyo bidagenzuwe neza, bigira ingaruka zikomeye ku mikorere y'ibice by'ikoranabuhanga bigezweho na sisitemu y'urumuri mu bikoresho. Urugero, interference ishobora gutera ihindagurika rito mu miterere ya fotolithography. Mu nganda zigezweho, ibi birahagije kugira ngo habeho guhuza transistor nabi kuri chip, bigabanya cyane umusaruro wa chip.
Granite ni ibikoresho bitari icyuma kandi ntabwo ikora amashanyarazi ubwayo. Nta kintu na kimwe gitera amashanyarazi giterwa no kugenda kwa electron zigenga imbere nko mu bikoresho by'icyuma. Iki kintu gituma iba umubiri usanzwe ukingira electron, ushobora kuzibira inzira yo kohereza electron zibangamira amashanyarazi imbere. Iyo imbaraga za rukuruzi zisimburana zikomoka ku isoko y'amashanyarazi zikwirakwira mu gice cy'ubutaka cya granite, kubera ko granite idakoresha rukuruzi kandi idashobora gukoreshwa rukuruzi, imbaraga za rukuruzi zisimburana ziragorana kwinjiramo, bityo bikarinda ibice by'ingenzi by'imashini ikoresha fotolithography byashyizwe ku gice cy'ibanze, nk'ibikoresho bipima neza n'ibikoresho byo guhindura lenzi z'urumuri, ingaruka za electron zibangamira amashanyarazi kandi zigatuma uburyo bwo kwimura imiterere bugenda neza mu gihe cyo gufotolithography bugenda neza.
Ubushobozi bwiza bwo gukora isuku y'umwuka
Kubera ko urumuri rwinshi rwa ultraviolet (EUV) rworoshye kwinjira mu bintu byose, harimo n'umwuka, imashini zikora lithography za EUV zigomba gukora ahantu hatagaragara umwuka. Muri iki gihe, guhuza ibikoresho n'ahantu hatagaragara umwuka biba ingenzi cyane. Mu ifu, ibikoresho bishobora gushonga, gukuramo umwuka no kurekura umwuka. Ifu irekuwe ntabwo ifata urumuri rwa EUV gusa, ikagabanya ubukana n'ubushobozi bwo kohereza urumuri, ahubwo ishobora no kwanduza lens z'urumuri. Urugero, umwuka w'amazi ushobora gukaraba lens, na hydrocarbons zishobora gushyira urwego rwa karuboni ku lens, bigira ingaruka zikomeye ku bwiza bwa lithography.
Granite ifite ubushobozi buhamye bwo gukora shimi kandi ntirekura gaze mu buryo busanzwe. Dukurikije ibizamini by’abahanga, mu buryo bwa fotolithography ikoreshwa mu gusohora gaze (nk’ahantu hasukuye cyane aho sisitemu y’urumuri n’uburyo bwo gufata amashusho mu cyumba kinini biherereye, bisaba H₂O < 10⁻⁵ Pa, CₓHᵧ < 10⁻⁷ Pa), igipimo cyo kurenga imyuka y’ibanze ya granite kiri hasi cyane, kiri hasi cyane ugereranyije n’ibindi bikoresho nk’ibyuma. Ibi bituma imbere muri mashini ikoresha fotolithography kugumana ubuziranenge n’isuku igihe kirekire, bikanatuma urumuri rwa EUV rukwirakwira cyane mu gihe cyo kohereza gaze kandi ibidukikije bikoresha fotolithography bisukuye cyane, bikongera igihe cy’imikorere ya sisitemu y’urumuri, kandi bikongera imikorere rusange ya mashini ikoresha fotolithography.
Ubudahangarwa bukomeye bwo guhinda no kudahungabana k'ubushyuhe
Mu gihe cyo gufotora, ubuziranenge ku rwego rwa nanometero busaba ko imashini ifotora igomba kuba ifite ubushyuhe cyangwa impinduka mu bushyuhe. Ubwinshi bw'ibidukikije buterwa n'imikorere y'ibindi bikoresho n'ingendo z'abakozi mu icupa, ndetse n'ubushyuhe butangwa n'imashini ifotora ubwayo mu gihe cyo gukora, byose bishobora kubangamira ubuziranenge bwa fotora. Granite ifite ubucucike bwinshi n'imiterere ikomeye, kandi ifite ubushobozi bwo guhangana n'ihindagurika. Imiterere yayo y'imbere ya kristu ni nto, ishobora kugabanya imbaraga zo guhinda no gukumira vuba ikwirakwira ry'ihindagurika. Amakuru y'igerageza agaragaza ko munsi y'isoko imwe y'ihindagurika, ishingiro rya granite rishobora kugabanya ubunini bw'ihindagurika ku kigero kirenga 90% mu masegonda 0.5. Ugereranyije n'ishingiro ry'icyuma, ishobora gusubiza ibikoresho ku buryo buhamye vuba, ikagenzura aho iherereye neza hagati y'ikirahuri cya fotora n'agace ka wafer, kandi ikirinda ko ishusho idahinduka cyangwa ihindagurika nabi bitewe no guhinda.
Hagati aho, igipimo cyo kwaguka k'ubushyuhe bwa granite kiri hasi cyane, hafi (4-8) × 10⁻⁶/℃, kikaba kiri hasi cyane ugereranyije n'ibikoresho by'icyuma. Mu gihe cy'ikoreshwa ry'imashini ikora fotolithography, nubwo ubushyuhe bw'imbere bwaba buhindagurika bitewe n'ibintu nko gusohora ubushyuhe buturutse ku isoko y'urumuri no kwangirika kw'ibice bya mekanike, ishingiro rya granite rishobora kugumana ubuziranenge bw'ibipimo kandi ntirizahinduka cyane bitewe no kwaguka no guhindagurika k'ubushyuhe. Ritanga inkunga ihamye kandi yizewe kuri sisitemu y'urumuri n'urwego rw'imikorere ihamye, rigakomeza kugira ubuziranenge bwa fotolithography.
Igihe cyo kohereza: Gicurasi-20-2025