Kuva kuri electromagnetic kwivanga kugeza vacuum ihuza: Gusimburwa kwibanze rya granite mumashini ya lithographie.

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Mu rwego rwo gukora semiconductor, nkibikoresho byibanze bigena neza imikorere yimikorere ya chip, ituze ryimiterere yimbere yimashini ifotora ni ngombwa cyane. Uhereye kubyishimo bya ultraviolet yumucyo ukabije kugeza kumikorere ya nanoscale yerekana neza, ntihashobora gutandukana na gato muri buri murongo. Ibishingwe bya Granite, hamwe nuruhererekane rwimiterere yihariye, byerekana ibyiza bitagereranywa mugukora neza imashini yimashini ifotora no kuzamura amafoto yukuri. ?
Imikorere idasanzwe ya electromagnetic ikingira imikorere
Imbere yimashini ifotora yuzuye ibidukikije bigoye. Kwivanga kwa Electromagnetic (EMI) byakozwe nibice nkumucyo ukabije wa ultraviolet, moteri ya moteri, hamwe n’amashanyarazi menshi, niba bitagenzuwe neza, bizagira ingaruka zikomeye kumikorere yibikoresho bya elegitoroniki na sisitemu ya optique mubikoresho. Kurugero, kwivanga bishobora gutera gutandukana gake muburyo bwa fotolitografiya. Mubikorwa byiterambere byiterambere, ibi birahagije kugirango biganisha kuri transistor itari yo kuri chip, bigabanya cyane umusaruro wa chip. ?
Granite ni ibikoresho bitari ibyuma kandi ntabwo ikora amashanyarazi yonyine. Nta kintu cyitwa electromagnetic induction cyatewe no kugenda kwa electroni yubusa imbere nko mubikoresho byuma. Ibi biranga bituma umubiri wa elegitoroniki ukingira umubiri, ushobora guhagarika neza inzira yo kwanduza imbere ya electronique. Iyo insimburangingo ya magnetiki ihindagurika ituruka kumasoko yo hanze ya electromagnetiki yivanga ikwirakwira kuri granite base, kubera ko granite itari magnetique kandi ntishobora gukoreshwa na magnetique, umurima wa magneti uhinduranya biragoye kuwinjiramo, bityo ukarinda ibice byingenzi bigize imashini ya fotolitografiya yashyizwe kumurongo, nkibikoresho byerekana ibyuma bifata ibyuma bifata amashanyarazi kandi bigahindura uburyo bwo gukwirakwiza amashanyarazi. ?

Guhuza vacuum nziza cyane
Kubera ko urumuri rukabije rwa ultraviolet (EUV) rwakirwa byoroshye nibintu byose, harimo ikirere, imashini za lithographie EUV zigomba gukorera mubidukikije. Kuri iyi ngingo, guhuza ibikoresho bigize ibikoresho nibidukikije bya vacuum biba ngombwa cyane. Mu cyuho, ibikoresho birashobora gushonga, desorb no kurekura gaze. Gazi yasohotse ntabwo ikurura urumuri rwa EUV gusa, igabanya ubukana nogukwirakwiza kwurumuri, ariko kandi irashobora kwanduza lensike optique. Kurugero, imyuka yamazi irashobora okiside lens, kandi hydrocarbone irashobora gushira ibice bya karubone kumurongo, bikagira ingaruka zikomeye kumiterere ya lithographie. ?
Granite ifite imiti ihamye kandi irekura gaze mubidukikije. Dukurikije ibizamini by’umwuga, mu buryo bwigana imashini ya fotolithographe yimashini ya vacuum (nkibidukikije bya ultra-clean vacuum aho sisitemu yo kumurika optique hamwe na sisitemu ya optique yo mucyumba kinini giherereyemo, bisaba H₂O <10⁻⁵ Pa, CₓHᵧ <10⁻⁷ Pa), igipimo cyo gusohora cya granite kiri hasi cyane, ugereranije n’ibindi bikoresho nk’ibyuma. Ibi bifasha imbere yimashini ya Photolithography kugirango igumane urugero rwinshi rwumuvuduko nisuku mugihe kirekire, itume ihererekanyabubasha ryinshi ryumucyo wa EUV mugihe cyoherejwe hamwe n’ibidukikije bikoresha isuku ya lensike optique, byongerera ubuzima serivisi ya sisitemu ya optique, kandi bikazamura imikorere rusange yimashini ifotora. ?
Kurwanya ihindagurika rikomeye hamwe nubushyuhe bwumuriro
Mugihe cyo gufotora, ibisobanuro kurwego rwa nanometero bisaba ko imashini ya Photolithography itagomba kugira ihindagurika na gato cyangwa ihindagurika ryumuriro. Kunyeganyega kw'ibidukikije biterwa no gukoresha ibindi bikoresho no kugenda kw'abakozi mu mahugurwa, hamwe n'ubushyuhe butangwa n'imashini ifotora ubwayo mu gihe ikora, byose bishobora kubangamira ukuri kwa fotolitografiya. Granite ifite ubucucike buri hejuru nuburyo bukomeye, kandi ifite imbaraga zo kurwanya ihindagurika. Imiterere yimbere yimyunyu ngugu irahuzagurika, irashobora guhuza neza imbaraga zinyeganyega kandi igahagarika byihuse ikwirakwizwa ryayo. Ubushakashatsi bwakozwe bwerekana ko munsi yisoko imwe yinyeganyeza, base ya granite irashobora kugabanya amplitione yinyeganyeza hejuru ya 90% mumasegonda 0.5. Ugereranije nicyuma, kirashobora kugarura ibikoresho muburyo bwihuse, bikerekana neza neza isano iri hagati yinteguza ya fotolitografiya na wafer, kandi ikirinda gushushanya cyangwa kudahuza biterwa no kunyeganyega. ?
Hagati aho, coefficient yo kwagura ubushyuhe bwa granite iri hasi cyane, hafi (4-8) × 10⁻⁶ / ℃, iri munsi cyane ugereranije nibikoresho byuma. Mugihe cyo gukora imashini ya Photolithography, nubwo ubushyuhe bwimbere bwihindagurika bitewe nimpamvu nko kubyara ubushyuhe buturuka kumucyo no guterana biva mubikoresho bya mashini, base ya granite irashobora kugumya guhagarara neza kandi ntizigera ihinduka cyane kubera kwaguka kwinshi no kugabanuka. Itanga inkunga ihamye kandi yizewe kuri sisitemu ya optique hamwe na platifike yerekana neza, ikomeza guhuza neza na fotolitografiya.