Ubuyobozi bwo guhangana n'ibidukikije ku buryo bwo gusuzuma neza ishingiro rya granite ry'itsinda rya siporo rikoresha ikoranabuhanga rya ultra-precision module.

Mu rwego rw'inganda zigezweho n'ubushakashatsi bwa siyansi bugezweho, module y'ingendo nziza cyane y'ikirere cyo mu kirere yabaye igikoresho cy'ingenzi cyo gukoresha neza no gupima hamwe n'imikorere yayo myiza cyane. Ishingiro ry'ubuziranenge bwa granite, nk'inkingi y'inkunga, rifite ibisabwa bikomeye ku bidukikije, kandi imiterere ikwiye y'ibidukikije ni yo shingiro ryo kwemeza imikorere yayo ihamye n'ingaruka nziza.

Ubwa mbere, kugenzura ubushyuhe: "stabilizer" igezweho
Nubwo granite izwiho kuba ihamye, ntabwo idashobora kwihanganira impinduka z'ubushyuhe. Nubwo ingano yayo y'ubushyuhe iri hasi, muri rusange 5-7 × 10⁻⁶/℃, mu buryo bwo kugenzura imikorere y'ubushyuhe, ihindagurika ry'ubushyuhe rishobora gutera impinduka mu buryo bw'ibipimo no kugira ingaruka ku buryo module ikora. Mu icupa ry'ibikoresho bya semiconductor chips, uburyo bwo gukora lithography busaba uburyo bwo gushyiramo danami, kandi ubushyuhe bw'ikirere buhinduka ho 1 ° C, kandi ishingiro rya granite rifite uburebure bwa metero 1 rishobora gutuma habaho kwaguka cyangwa kugabanuka kwa mikoroni 5-7. Iri hinduka rito rikwirakwizwa na module ya ultra-precision motion ya air float, ibi bikaba bihagije kugira ngo ihinduka ry'imiterere ya chip lithography rigabanuke cyane kandi rigabanye cyane umusaruro. Kubera iyo mpamvu, ifite ishingiro rya granite rihamye ry’umwuka ugenda neza cyane, ubushyuhe bwiza bwo gukoreraho bugomba kugenzurwa kuri 20 ° C ± 1 ° C, hifashishijwe ibikoresho by’ubushyuhe buhamye cyane, nk’ubushyuhe buhoraho n’ubukonje, gukurikirana no guhindura ubushyuhe buri mu kirere, kugira ngo hamenyekane ko ihindagurika ry’ubushyuhe mu rugero ruto cyane, rigumana ubuziranenge bw’ishingiro, kugira ngo hamenyekane ko module ikora neza cyane.
Icya kabiri, gucunga ubushuhe: urufunguzo rwo kurinda ubushuhe "ibuye"
Ubushuhe ni ikindi kintu cy'ingenzi bigira ingaruka ku mikorere y'ishingiro rya granite rigezweho. Mu hantu hari ubushuhe bwinshi, granite yoroshye kwinjiza umwuka w'amazi, bishobora gutuma amazi agwa ku buso, ibyo bikaba bitagira ingaruka gusa ku buryo granite igumana neza n'uburyo umwuka ugenda neza, ahubwo bishobora no gutera isuri ku buso no kugabanya ubushyuhe n'ubuziranenge mu gihe kirekire. Mu imashini isya lenzi z'amatara, iyo ubushuhe buri hejuru ya 60% RH mu gihe kirekire, umwuka w'amazi winjira ku buso bwa granite uzabangamira ingendo za slider ya gaze, bityo uburyo bwo gusya lenzi bugabanuke, kandi ubuso bugahinduka nabi. Kubwibyo, ubushuhe bw'aho bakorera bugomba kugenzurwa neza hagati ya 40% na 60% RH, bushobora gukurikiranwa no guhindurwa mu gihe nyacyo hakoreshejwe ibyuma bikuraho ubushuhe, ibikoresho bipima ubushuhe n'ibindi bikoresho kugira ngo hirindwe kwangirika kw'ishingiro rya granite bitewe n'ubushuhe bwinshi, kandi bitume module y'uburyo umwuka ugenda neza ikora neza.
Icya gatatu, garanti y'isuku: "umurinzi" w'ubuziranenge
Ingaruka z'uduce tw'umukungugu ku gice cy'umukungugu cy'imashini itunganya umwuka neza cyane mu buryo buhanitse ntizishobora gusuzugurwa. Iyo uduce duto twinjiye mu cyuho cya gazi kiri hagati y'agace gakoresha umwuka unyuramo n'igice cy'umukungugu, dushobora kwangiza imiterere y'agace gakoresha umwuka, kongera ukubiri, ndetse no gukurura ubuso bw'imashini, bigatuma imiterere y'umukungugu igabanuka. Mu imashini itunganya ikirere neza cyane, iyo uduce tw'umukungugu mu kirere tuguye ku gice cy'umukungugu, inzira y'igikoresho cyo gukora ishobora gutandukana, bigatuma imiterere y'imikoreshereze y'uduce ihinduka. Kubwibyo, aho gukorera hagomba kurangwa isuku cyane, hakagera ku rwego rwo hejuru rw'ibipimo by'isuku bigera ku 10.000 cyangwa ku rwego rwo hejuru, binyuze mu gushyiraho ibikoresho byo gusukura umwuka, nka filters z'umwuka zikoresha imbaraga nyinshi (HEPA), kuyungurura uduce tw'umukungugu mu kirere, icyarimwe, abakozi bagomba kwambara imyenda idafite umukungugu, udupfukanto tw'inkweto, nibindi, kugira ngo bagabanye umukungugu uzanwa n'abantu. Gukomeza imikorere y'agace gakoresha umwuka neza cyane n'agace gakoresha umwuka unyuramo neza cyane.

Icya kane, kwitandukanya kw'imitingito: imikorere myiza ya "shock pad"
Kunyeganyega kw'inyuma ni umwanzi w'uburyo bugezweho bwo gukora neza cyane mu kirere. Nubwo ishingiro rya granite rishobora kugabanya kunyeganyega, kunyeganyega kw'imbaraga nyinshi gushobora kugabanya umupaka waryo. Kunyeganyega guterwa n'urujya n'uruza rw'uruganda n'imikorere y'ibikoresho binini bya mekanike byoherezwa ku gice cya granite binyuze mu butaka, ibyo bikabangamira uburyo buboneye bwo gukora neza mu gice cya module yo gukora neza mu kirere. Muri CMM yo mu rwego rwo hejuru, kunyeganyega gushobora gutuma aho probe ipima n'igikoresho gipimirwa hapimwa hadahamye, bigatuma amakuru yo gupima ahinduka. Kugira ngo iki kibazo gikemuke, ni ngombwa gukoresha ingamba zo kwitandukanya neza mu buryo bufatika, nko gushyira udupapuro two kwitandukanya mu gice gishyirwamo ibikoresho, kubaka umusingi wo kwitandukanya mu buryo bufatika, cyangwa gukoresha sisitemu yo kwitandukanya mu buryo bufatika kugira ngo habeho uburyo bwo gukora neza mu gihe cyo kwitandukanya hanze, no gushyiraho ahantu hatuje kandi hahamye ho gukorera ku gice cy'ubuziranenge bwa granite n'igice cy'ubuziranenge bwa module yo kwitandukanya mu kirere.
Gusa iyo byujuje ibisabwa ku bidukikije nk'ubushyuhe, ubushuhe, isuku no kugenzura imitingito, ishingiro ry'ubuziranenge bwa granite rya module y'ikirere ikora neza cyane rishobora guha agaciro imikorere yaryo, rigatanga icyizere cyizewe ku bikorwa byayo mu nzego zitandukanye, kandi rigafasha inganda kugera ku rwego rwo hejuru rw'inganda n'ubushakashatsi bwa siyansi.