Mu rwego rwo gukora inganda zo mu rwego rwo hejuru no gukora ubushakashatsi bugezweho bwa siyansi, module ya ultra-precision yimikorere yikirere ireremba yahindutse ibikoresho byingenzi byo gukora neza no gupima hamwe nibikorwa byayo byiza. Ikibanza cya granite, nkibikoresho byingirakamaro, bifite ibisabwa bikomeye kubidukikije bikora, kandi ibidukikije bikwiye nibyo shingiro kugirango imikorere ihamye n'ingaruka nziza.
Ubwa mbere, kugenzura ubushyuhe: neza "stabilisateur"
Nubwo granite izwiho guhagarara neza, ntabwo irinda rwose ihindagurika ryubushyuhe. Nubwo coefficente yayo yo kwaguka yubushyuhe ari muke, muri rusange 5-7 × 10⁻⁶ / ℃, mugihe cyo kugenzura ibintu birenze urugero, ihindagurika ryubushyuhe bworoshye rishobora gutera impinduka zingana kandi bikagira ingaruka kumyizerere. Mu mahugurwa yo gukora chip ya semiconductor, inzira ya lithographie isaba neza neza urwego rwa danami, kandi ubushyuhe bwibidukikije buhindagurika kuri 1 ° C, kandi granite base ifite uburebure bwa metero 1 irashobora kubyara umurongo cyangwa kugabanuka kwa microni 5-7. Ihinduka rito ryanduzwa na ultra-precision yimikorere module yikirere ireremba, birahagije kugirango chip lithographie yerekana gutandukana kandi bigabanye cyane umusaruro. Kubera iyo mpamvu, ifite ibikoresho bya granite byuzuye byumuyaga ureremba ultra-precision module module, ubushyuhe bwiza bwibidukikije bukora bugomba kugenzurwa kuri 20 ° C ± 1 ° C, hifashishijwe ibikoresho bihoraho byubushyuhe burigihe, nkubushyuhe burigihe nubushyuhe bwo guhumeka ikirere, guhora ukurikirana no guhindura ubushyuhe bwibidukikije, kugirango habeho ihindagurika ryubushyuhe buke.
Icya kabiri, gucunga ubuhehere: urufunguzo rwo kurinda ubushuhe "ibuye"
Ubushuhe ni ikindi kintu cyingenzi kigira ingaruka kumikorere ya granite yibanze. Ahantu h’ubushuhe buhebuje, granite iroroshye gukurura imyuka y’amazi, ishobora gutuma habaho kwiyegeranya hejuru, ibyo ntibigire ingaruka gusa ku guhuza imiyoboro ya granite hamwe na moderi ya ultra-precision yimikorere yikirere ireremba, ariko kandi bishobora gutera isuri kandi bikagabanya ububengerane nukuri mugihe kirekire. Mu mahugurwa yo gusya ya optique, niba ubuhehere buri hejuru ya 60% RH mugihe kirekire, imyuka y'amazi yamamajwe hejuru yikibanza cya granite izabangamira urujya n'uruza rwa gazi ireremba, kugirango lens yo gusya neza igabanuke, kandi ubuso bufite amakosa. Kubwibyo, ubuhehere bugereranije bwibidukikije bikora bugomba kugenzurwa cyane hagati ya 40% -60% RH, ishobora gukurikiranwa no guhindurwa mugihe nyacyo ushyiraho ibyuma byangiza imyanda, ibyuma bifata ibyuma n’ibindi bikoresho kugirango wirinde kwangirika kwa base ya granite kubera ubuhehere bwinshi, kandi bikore neza imikorere yimikorere ya ultra-precision ya module ireremba ikirere.
Icya gatatu, garanti yisuku: "umurinzi" wuzuye
Ingaruka ziterwa nu mukungugu kuri granite yibanze ya moderi ya ultra-precision yimikorere yimiterere yikirere ntishobora gusuzugurwa. Iyo uduce duto tumaze kwinjira mu cyuho cya firime ya gazi hagati ya gazi ireremba hejuru ya granite na base ya granite, birashobora gusenya uburinganire bwa firime ya gaze, bikongera ubushyamirane, ndetse bikanashushanya hejuru yikibanza, bigatuma kugabanuka kwukuri. Mu mahugurwa ya ultra-precision yo gutunganya ibice byikirere, niba umukungugu wumukungugu wo mu kirere uguye kuri granite base, inzira yimikorere yigikoresho gishobora guteshuka, bikagira ingaruka kumikorere yibice. Kubwibyo, ahakorerwa hagomba guhora hasukuye cyane, bigera ku 10,000 cyangwa birenze urwego rwo hejuru rwisuku, binyuze mugushiraho ibikoresho byogeza ikirere, nko kuyungurura ikirere (HEPA), kuyungurura ibice byumukungugu mwikirere, icyarimwe, abakozi bakeneye kwambara imyenda itagira ivumbi, ibipfukisho byinkweto, nibindi, kugirango bagabanye umukungugu uzanwa nabantu. Komeza ibidukikije bikora neza bya granite base hamwe nikirere kireremba ultra-precision module.
Bane, kunyeganyega kunyeganyega: imikorere myiza ya "shitingi"
Kunyeganyega hanze ni umwanzi wibisobanuro bya module ya ultra-precision yimikorere yikirere ireremba. Nubwo granite yibanze ifite ubushobozi bwo kunyeganyega, imbaraga-zo kunyeganyega zirashobora gukomeza kurenga imipaka. Kunyeganyega bituruka ku kinyabiziga gikikije uruganda no gukora ibikoresho binini bya mashini byoherezwa mu kigo cya granite binyuze mu butaka, bikazabangamira icyerekezo cy’imikorere ya ultra-precision yimikorere yikirere ireremba. Muri CMM yo mu rwego rwo hejuru, kunyeganyega birashobora gutuma habaho guhuza hagati yiperereza ryapimwe nigikorwa cyapimwe kugirango kidahungabana, bikaviramo gutandukana kwamakuru yo gupima. Kugira ngo iki kibazo gikemuke, birakenewe ko hafatwa ingamba zifatika zo kwigunga, nko gushyira ibipapuro byo kwiherera byifashishwa ahantu hashyizweho ibikoresho, kubaka urufatiro rwo kwihererana, cyangwa gukoresha uburyo bwo kwiherera bwitandukanya kugira ngo bihoshe kunyeganyega hanze, kandi hashyizweho ahantu hatuje kandi hatuje kugirango habeho icyerekezo cya granite hamwe na module ireremba ultra-precision module module.
Gusa mu kuzuza byuzuye ibisabwa mubidukikije byubushyuhe, ubushuhe, isuku no kugenzura ibinyeganyega, granite precision base ya ultra-precision moteri module yikirere ireremba irashobora gutanga umukino wuzuye kubikorwa byayo, bigatanga garanti yizewe kubikorwa bya ultra-precision mubikorwa bitandukanye, kandi bigafasha inganda kugana murwego rwo hejuru rukora neza nubushakashatsi bwubumenyi.
Igihe cyo kohereza: Apr-08-2025