Mu rwego rwo gukora neza nubushakashatsi bwa siyansi, uburinganire bwa granite yibibanza ni ikimenyetso cyingenzi kugirango harebwe niba ibikoresho neza. Ibikurikira nintangiriro irambuye kuburyo butandukanye bwo kumenya inzira nuburyo bukoreshwa kuri wewe. ?
I. Uburyo bwo kumenya Laser interferometero
Laser interferometero nigikoresho cyatoranijwe kugirango tumenye neza neza. Fata urugero rwa ZYGO GPI XP laser interferometero nkurugero, imyanzuro yayo irashobora kugera kuri 0.1nm. Mugihe ukora ubushakashatsi, banza uhuze isoko yumucyo wa interferometero hamwe na platifomu hanyuma ugabanye ubuso bwa platform muri 50mm × 50mm ya gride. Icyakurikiyeho, amakuru yo kwivanga yakusanyirijwe hamwe ingingo ku yindi, kandi amakuru yarashyizweho kandi arasesengurwa hakoreshejwe Zernike polinomial kugirango abone ikosa ryuzuye. Ubu buryo burakoreshwa murwego rwohejuru kandi rushobora kumenya amakosa ya ≤0.5μm / m². Bikunze gukoreshwa mugushakisha imashini zifotora hamwe na mashini yo murwego rwohejuru-itatu-yo guhuza imashini. ?
Ii. Urwego rwa elegitoronike Array Uburyo
Urwego rwa elegitoronike rwerekana ibintu byoroshye gukora kandi neza. Urwego rwa TESA A2 urwego rwa elegitoronike (rufite imiterere ya 0.01μm / m) rwaratoranijwe kandi rutondekanya muri 9 × 9 umurongo ugana icyerekezo cya X / Y icyerekezo cya platifomu. Mugihe cyo gukusanya amakuru yegeranye ya buri rwego hanyuma ugakoresha uburyo buke bwa kare bwo kubara, agaciro kangana karashobora kuboneka neza. Ubu buryo bushobora kumenya neza imiterere yaho hamwe nubusobekerane bwurubuga. Kurugero, ihindagurika rya 0.2μm murwego rwa 50mm naryo rishobora kuboneka, rikwiranye no gutahura vuba mubikorwa byinshi. ?
Iii. Uburyo bwiza bwa kristu
Uburyo bwiza bwa optique ya kristu ikwiranye no kumenya ahantu hato. Ongeraho optique ya kristu ya optique hejuru yubuso kugirango ugerageze kuri platifomu hanyuma urebe impande zivanze hagati yazo munsi yo kumurika isoko yumucyo umwe (nk'itara rya sodium). Niba imirongo ibangikanye imirongo igororotse, byerekana uburinganire bwiza. Niba imirongo igoramye igaragara, ubare ikosa riringaniye ukurikije urwego rugoramye. Buri murongo uhetamye ugereranya uburebure bwa 0.316 mm, kandi amakuru arashobora kuboneka binyuze muburyo bworoshye bwo guhinduka. ?
Bane. Uburyo butatu bwo guhuza imashini Igenzura uburyo bwo kugenzura
Imashini itatu yo guhuza imashini irashobora kugera kubipimo bihanitse neza mumwanya-itatu. Shira urubuga rwa granite kumurimo wimashini ipima hanyuma ukoreshe iperereza kugirango ukusanyirize hamwe amakuru kuva ahantu henshi bapimye hejuru ya platifomu. Sisitemu yo gupima imashini itunganya kandi igasesengura aya makuru kugirango itange raporo iringaniye. Ubu buryo ntibushobora kumenya gusa uburinganire, ariko kandi bushobora no kubona ibindi bipimo bya geometrike icyarimwe icyarimwe, kandi birakwiriye kugirango tumenye neza ibinini binini bya granite. ?
Kumenya ubu buryo bwo gutahura birashobora kugufasha gusuzuma neza uburinganire bwa platform ya granite kandi bigatanga garanti yizewe kumikorere ihamye yibikoresho byuzuye.
Igihe cyo kohereza: Gicurasi-29-2025