Uburyo bwo kumenya uburyo ibyuma bipima neza granite biramba.

Mu bijyanye no gukora ibikoresho neza n'ubushakashatsi bwa siyansi, ubugari bw'ibikoresho bya granite ni ikimenyetso cy'ingenzi cyo kwemeza ko ibikoresho ari ukuri. Ibi bikurikira ni intangiriro irambuye ku buryo butandukanye bwo kumenya ibikoresho n'uburyo bwo kubikoresha.
I. Uburyo bwo gupima interferometer ya laser
Interferometer ya laser ni igikoresho gikunzwe cyane mu gupima ubugari bw'urumuri mu buryo bunoze. Fata urugero rwa interferometer ya laser ya ZYGO GPI XP, ubushobozi bwayo bushobora kugera kuri 0.1nm. Mu gihe usuzuma, banza ushyire urumuri rw'interferometer ku rumuri n'urumuri hanyuma ugabanye ubuso bw'urumuri mu duce twa 50mm × 50mm. Nyuma yaho, amakuru y'impande zombi yakusanyijwe ingingo ku yindi, maze amakuru ashyirwamo kandi asesengurwa hakoreshejwe polynomial ya Zernike kugira ngo haboneke ikosa ry'ubugari bw'urumuri. Ubu buryo bukoreshwa ku mpande zombi kandi bushobora kubona amakosa y'ubugari bw'urumuri ya ≤0.5μm / m². Bukunze gukoreshwa mu gupima imashini zipima fotolithography n'izindi mpande zombi zipima ibyuma.
Ii. Uburyo bwo gutondeka ku rwego rwa elegitoroniki
Gupima urwego rw'ikoranabuhanga biroroshye gukoresha kandi bikora neza cyane. Urwego rw'ikoranabuhanga rwa TESA A2 (rufite ubushobozi bwa 0.01μm/m) rwatoranijwe kandi rushyirwa mu cyiciro cya 9×9 ku cyerekezo cya X/Y cy'urukuta. Mu gukusanya amakuru y'uburyo buri rwego ruhagaze hanyuma hagakoreshwa uburyo bwa kare kare mu kubara, agaciro k'ubugari gashobora kuboneka neza. Ubu buryo bushobora kumenya neza imiterere y'aho urukuta ruherereye n'imiterere y'ubugari. Urugero, ihindagurika rya 0.2μm mu rugero rwa 50mm naryo rishobora kumenyekana, rikwiriye kuvumburwa vuba mu musaruro mwinshi.
Iii. Uburyo bwa Optical Flat crystal
Uburyo bwa optique flat crystal bukwiriye mu kumenya ahantu hato. Shyira optique flat crystal ku buso bugomba kugeragezwa kuri platform kandi urebe impande z’uruvange zigizwe hagati yazo munsi y’urumuri rw’urumuri rwa monochromatic (nk’itara rya sodium). Niba imirongo ari imirongo igororotse ingana, bigaragaza ko igororotse neza. Niba imirongo igoramye igaragaye, banza ubare ikosa ry’imiterere y’imiterere ukurikije urugero rw’imiterere y’imirongo. Buri murongo ugoramye ugaragaza itandukaniro ry’uburebure rya 0.316μm, kandi amakuru y’imiterere ...
Uburyo bwa kane. Uburyo bwo kugenzura imashini zipima ibice bitatu
Imashini ipima ifite ibice bitatu ishobora gupima neza mu mwanya w’ibice bitatu. Shyira urubuga rwa granite ku meza y’imashini ipima hanyuma ukoreshe icyuma gipima kugira ngo ukusanye amakuru aturutse ahantu henshi ho gupima ku buso bw’urukuta. Sisitemu y’imashini ipima itunganya kandi igasesengura aya makuru kugira ngo ikore raporo y’ubugari bw’urukuta. Ubu buryo ntibushobora gusa kumenya ubugari, ahubwo bunabona ibindi bipimo bya geometrike by’urukuta icyarimwe, kandi bukwiriye mu gupima neza urubuga runini rwa granite.
Kumenya neza ubu buryo bwo gupima bishobora kugufasha gusuzuma neza uburyo urubuga rwa granite rufite ubuziranenge kandi bigatanga icyizere cyizewe cy'imikorere ihamye y'ibikoresho bifite ubuziranenge.