Kuramo "imbaraga za rutare" inyuma yinganda zikora - Nigute granite yibice byahinduye imbibi zukuri zogukora chip?

Impinduramatwara ya Precision mubikorwa bya semiconductor: Iyo granite ihuye na tekinoroji ya micron
1.1 Ubuvumbuzi butunguranye mubikoresho siyanse
Raporo y’ishyirahamwe mpuzamahanga rya Semiconductor ya SEMI 2023, ivuga ko 63% bya fabs zateye imbere ku isi batangiye gukoresha ibirindiro bya granite aho gukoresha ibyuma gakondo. Iri buye risanzwe, rikomoka kuri magma yegeranye cyane mu Isi, ryandika amateka y’inganda zikoresha igice cya kabiri kubera imiterere yihariye y’umubiri:

Inyungu yubushuhe bwumuriro: coefficente yo kwagura ubushyuhe bwa granite 4.5 × 10⁻⁶ / ℃ ni 1/5 gusa cyicyuma kitagira umwanda, kandi ihame rya ± 0.001mm rigumaho mumirimo ikomeza yimashini ya lithographie

Ibiranga kunyeganyega biranga: coefficente yimbere yimbere yikubye inshuro 15 kurenza iy'icyuma, ikurura neza ibikoresho micro-vibrasiya

Kamere ya magnetisme ya zeru: ikuraho burundu ikosa rya magneti mugupima laser

1.2 Urugendo rwa metamorphose kuva kanjye kugera fab
Dufashe urugero rwa ZHHIMG rwibikorwa byubwenge muri Shandong, urugero rwa granite mbisi igomba kunyuramo:

Gutunganya ultr-precision: santimetero eshanu zihuza imashini ikora amasaha 200 yo gusya ubudahwema, uburinganire bwubutaka bugera kuri Ra0.008μm

Kuvura ibihimbano byubusa: amasaha 48 yo guhagarika umutima mubisanzwe mumahugurwa ahoraho yubushyuhe nubushuhe, biteza imbere ibicuruzwa 40%
Icya kabiri, kora ibibazo bitandatu byukuri byo gukora igice cya kabiri "gukora igisubizo"
2.1 Gahunda yo kugabanya igipimo cya Wafer

Imyiyerekano: Nyuma yuko uruganda rukora chip mu Budage rumaze gufata gazi ireremba ya granite:

Diameter	kugabanya igipimo cya chip	Gutezimbere
Santimetero 12	67%	≤0.001mm
Santimetero 18	82%	≤0.0005mm

2.2 Gahunda ya Lithographie ihuza neza gahunda yo gutera imbere

Sisitemu yo kwishyurwa ubushyuhe: yashyizwemo ceramic sensor ikurikirana imiterere ihindagurika mugihe nyacyo kandi ihita ihindura icyerekezo cya platform
Ibipimo byapimwe: munsi y'imihindagurikire ya 28 ℃ ± 5 ℃, gushyiramo ukuri guhindagurika bitarenze 0,12 mm