Gukuraho "imbaraga z'amabuye" inyuma y'inganda za semiconductor - Ni gute ibice by'ubuhanga bwa granite bishobora kongera guhindura umupaka w'ubuhanga mu nganda za chips

Impinduramatwara mu buryo bunoze mu nganda za semiconductor: Iyo granite ihuye n'ikoranabuhanga rya micron
1.1 Ibintu bitunguranye byavumbuwe mu bumenyi bw'ibikoresho
Nk’uko raporo y’Ishyirahamwe Mpuzamahanga ry’Ibikoresho by’Indashyikirwa (SEMI) ryo mu 2023 ibivuga, 63% by’ibikoresho bigezweho ku isi byatangiye gukoresha ishingiro rya granite aho gukoresha ibyuma gakondo. Iri buye karemano, rikomoka ku gushonga kwa magma mu butaka, ririmo kwandika amateka y’inganda za semiconductor kubera imiterere yaryo yihariye:

Akamaro k'ubushyuhe: igipimo cyo kwaguka k'ubushyuhe bwa granite 4.5×10⁻⁶/℃ ni 1/5 gusa cy'icyuma kitagira umugese, kandi ubuziranenge bwa ± 0.001mm bukomeza gukoreshwa mu gihe cy'imashini ikora lithography.

Ibiranga uburyo bwo kugabanya umuvuduko: ubushobozi bwo kugabanya umuvuduko w'imbere buruta inshuro 15 ugereranije n'ubw'icyuma gishongeshejwe, bufata neza uburyo bwo kugabanya umuvuduko w'ibikoresho

Imiterere ya zeru ya magnetization: gukuraho burundu ikosa rya magnetism mu gupima laser

1.2 Urugendo rw'impinduka kuva ku bwanjye kugera ku bwiza
Dufashe urugero rw'aho ZHHIMG ikorera mu buryo bw'ubwenge i Shandong, igice cya granite isanzwe kigomba kunyuramo:

Uburyo bwo gukora imashini bugezweho cyane: ikigo cy'imashini gihuza imiyoboro itanu mu masaha 200 yo gusya buri gihe, ubukana bw'ubuso bugera kuri Ra0.008μm

Uburyo bwo kuvura gusaza hakoreshejwe uburyo bwa "Artificial Addictive Addiction ...tional Addiction Treatment": Amasaha 48 yo kurekura stress karemano mu iduka risanzwe ry’ubushyuhe n’ubukonje, ibyo bigatuma umusaruro uhora uhagaze neza ku kigero cya 40%.
Icya kabiri, sesengura ibibazo bitandatu by’ubuhanga mu gukora "urutare" mu buryo bunonosoye
2.1 Gahunda yo kugabanya igipimo cyo gucikamo ibice bya Wafer

Ingero: Nyuma y'uko uruganda rukora ibyuma bito mu Budage rukoresheje urubuga rwacu rwa granite rurembera mu mazi:

Umwanya w'umugati	kugabanya igipimo cya chip	kunoza ubugari
santimetero 12	67%	≤0.001mm
santimetero 18	82%	≤0.0005mm

2.2 Gahunda yo gutunganya neza uburyo bwo guhuza Lithographic

Sisitemu yo gupima ubushyuhe: sensor ya ceramic ikora igenzura imiterere mu gihe nyacyo kandi igahindura imiterere ya platform mu buryo bwikora
Amakuru yapimwe: munsi y'ihindagurika rya 28℃±5℃, ubunyangamugayo bwo gushyiramo buhinduka munsi ya 0.12μm