Guhitamo hagati ya Granite na Ceramic kuri Next-Gen Lithography

Mu isi ya nanometero ya lithography ya semiconductor, gutigita gato k’imiterere cyangwa kwaguka k’ubushyuhe bukabije bishobora gutuma wafer ya silikoni igura miliyoni nyinshi z’amadolari ntacyo imaze. Uko inganda zigenda zigana ku tuntu twa 2nm no hejuru, ibikoresho bikoreshwa mu kubaka imashini ntibikiri "ibishyigikizo" gusa - ahubwo ni uruhare runini mu gushaka uburyo bwo gukora neza.

Muri ZHHIMG, abakora ibikoresho by’ikoranabuhanga ku isi barushaho kubazwa ibibazo bikurikira: Ese twagombye gukomeza gukoresha granite ihamye, cyangwa igihe kirageze ngo duhindukire tujye ku bikoresho bya tekiniki bigezweho? Igisubizo kiri mu buhanga bwihariye bw’ikoreshwa ryawe.

Fiziki y'Ituze: Granite vs. Ceramic

Iyo ugereranyaibice bya granite bitunganyen'ibice by'ibumba, tugomba kureba "ubutatu butagatifu" bw'ubuhanga bwo gukora neza: Gushonga, Guhagarara k'ubushyuhe, no Gukomera.

1. Guhagarika imitingito: Akamaro k'imiterere karemano

Gutigita ni umwanzi w’ingufu zituruka ku bushobozi bwo gukoresha amashanyarazi. Granite, ibuye karemano rikomoka ku ivumbi, rifite imiterere igoye ya polycrystalline ikora nk'ikintu gifata amashanyarazi karemano. Uku gutitira imbere muri granite bituma ingufu za mekanike zigabanuka neza kurusha ibikoresho byinshi by’ubukorikori.

Mu buryo bunyuranye, ibikoresho bya keramike bigezweho nka Silicon Carbide (SiC) cyangwa Alumina birakomeye cyane. Nubwo ubu buryo bukomeye ari ingirakamaro mu gusubiza ibintu mu buryo bugezweho, ibikoresho bya keramike ntibitanga ubushyuhe bwinshi imbere mu mubiri. Mu buryo bwa lithography, aho ibyiciro bigenda byihuta cyane, ishingiro rya granite riva kuri ZHHIMG ritanga ibidukikije "bituje" bikenewe kugira ngo optique ikomeze kuba mu buryo buboneye.

2. Imiterere y'ubushyuhe: Gucunga Micron

Kwaguka k'ubushyuhe akenshi ni ikibazo gikomeye mu gihe kirekire. Granite karemano ifite igipimo gito cyane cyo kwaguka k'ubushyuhe (CTE), ubusanzwe hagati ya 5 × 10^{-6}/K na 6 × 10^{-6}/K.

Ibikoresho bya kera bishobora kugera ku gaciro ka CTE gake cyane, ariko akenshi bigira ubushyuhe buke. Ibi bivuze ko nubwo byaguka bike muri rusange, bikora vuba cyane iyo ubushyuhe buhindagurika. Ubushyuhe bwinshi bwa Granite bukora nk' "ubufasha," bigatuma iba amahitamo meza ku bicuruzwa binini.imashini zikoresha lithographyaho ibidukikije bigomba kuguma bihamye mu masaha menshi y'akazi gahoraho.

Ibikoresho byo gukoresha Lithography Frontier

Imashini igezweho ya lithography ishobora kuba ari yo ikora cyane kurusha izindi zose. Ku bijyanye n'imiterere y'inyubako, inganda zagiye zishingira kuIbice bya Granite nzizabitewe n'uko zidakoresha ingufu za rukuruzi kandi zirwanya ingese.

Ariko, ku bice byihariye byimuka vuba cyane biri muri lithography stack—nk'udupira twa wafer cyangwa udupira duto twa stroke—ibirahuri birimo kwiyongera bitewe n'uko bingana cyane n'uburemere. Muri ZHHIMG, tubona ahazaza atari ukurushanwa hagati y'ibi bikoresho, ahubwo nk'uburyo bwo guhuza ibintu mu buryo bw'ingamba. Dukoresheje ishingiro rya granite ku rufatiro n'ibirahuri ku bice bifite imbaraga nyinshi, injeniyeri zishobora kugera ku buringanire burambye bwo guhumeka no kwihuta.

Impamvu ZHHIMG ari yo ikundwa cyane ku isi yose

Nk'umuyoboziutanga ibikoresho bya granite by'ubuhangaZHHIMG irasobanukiwe ko gukora neza atari ibikoresho fatizo gusa, ahubwo ni ibijyanye n'ibipimo byihishe inyuma. Ikigo cyacu gikoresha uburyo bwo gukuramo imyuka mu buryo busanzwe mu bikoresho byose byihariye ndetse no gukoresha uburyo bwo gufunga neza burenze ibipimo bya DIN 876 Grade 00.

Twihariye muri:

• Ishingiro rya Granite ryihariye kuri OEM: Imiterere y'ijimetero ikozwe mu buryo buhuye n'imigozi ikoreshwa mu kuyobora umurongo.

• Ibice bito bya Lithography: Gukora ishingiro rinini rigumana ubugari buri hagati ya mikoroni imwe n'igice mu metero nyinshi.

• Advanced Metrology: Gutanga amahame ngenderwaho ku bikoresho by’igenzura by’ikoranabuhanga ku isi.

Umwanzuro: Inzira y'Ingamba zo Gutera Imbere

Guhitamo hagati ya granite na ceramic bisaba gusobanukirwa neza imiterere y’imashini yawe. Nubwo ceramics zitanga ubukana bwo hejuru, ubushyuhe busanzwe n’ubukonje bw’ubushyuhe bwa granite ntibishobora kugereranywa kugira ngo bigire ubusugire bunini.

Mu gihe tugiye mu 2026, ZHHIMG ikomeje guhanga udushya aho amabuye karemano n'ibinyabutabire bigezweho bihurira. Ntidutanga ishingiro gusa, ahubwo dutanga icyizere cy'uko ibikoresho byawe bizakora neza kugeza ku rugero rwabyo rw'amahame.

Hamagara itsinda ry’abahanga rya ZHHIMG uyu munsi kugira ngo ubone urupapuro rw’amakuru yerekeye igereranya rya tekiniki cyangwa kugira ngo muganire ku byo umushinga wawe ukeneye.