Ese ishingiro rya granite rishobora gukuraho ubushyuhe bukabije ku bikoresho byo gupfunyikamo wafer?

Mu buryo bunoze kandi bugoye bwo gukora semiconductor mu gupakira wafer, stress y'ubushyuhe imeze nk' "ikintu cyangiza" cyihishe mu mwijima, gihora kibangamira ireme ry'ibipfunyika n'imikorere ya chips. Kuva ku itandukaniro riri hagati y'ibipimo by'ubushyuhe hagati ya chips n'ibikoresho byo gupakira kugeza ku mpinduka zikomeye z'ubushyuhe mu gihe cyo gupakira, inzira zo gukora stress y'ubushyuhe ziratandukanye, ariko byose bigaragaza ingaruka zo kugabanya umusaruro no kugira ingaruka ku kwizerwa kw'ibipfunyika mu gihe kirekire. Urufatiro rwa granite, rufite imiterere yihariye y'ibikoresho, rurimo kuba "umufasha" ukomeye mu guhangana n'ikibazo cy'stress y'ubushyuhe.
Ikibazo cy'ubushyuhe mu gupfunyika wafer
Gupfunyika mu ifuru bikubiyemo ubufatanye bw'ibikoresho byinshi. Ubusanzwe ifuru zigizwe n'ibikoresho bya semiconductor nka silikoni, mu gihe ibikoresho byo gupfunyika nk'ibikoresho bya pulasitiki n'ibikoresho bya substrate bitandukanye mu bwiza. Iyo ubushyuhe buhindutse mu gihe cyo gupfunyika, ibikoresho bitandukanye biratandukanye cyane mu rwego rwo kwaguka no guhindagurika kw'ubushyuhe bitewe n'itandukaniro rikomeye mu gipimo cyo kwaguka k'ubushyuhe (CTE). Urugero, igipimo cyo kwaguka k'ubushyuhe bw'ifuru za silikoni ni hafi 2.6 × 10⁻⁶/℃, mu gihe igipimo cyo kwaguka k'ubushyuhe bw'ibikoresho bisanzwe byo gushushanya epoxy resin kiri hejuru ya 15-20 × 10⁻⁶/℃. Iki cyuho kinini gituma igipimo cyo gucukuka kwa chipu n'ibikoresho byo gupfunyika bitagenda neza mu gihe cyo gukonja nyuma yo gupfunyika, bigatera ubushyuhe bukomeye ku buryo buhuriweho. Mu gihe cy'ingaruka zihoraho z'ubushyuhe, wafer ishobora gupfunyika no kwangirika. Mu bihe bikomeye, ishobora no guteza inenge zikomeye nko kwangirika kwa chip, kuvunika kw'ingingo zometse, no gutandukana kw'interface, bigatera kwangirika k'amashanyarazi ya chip no kugabanuka gukomeye mu gihe cyo kuyikoresha. Dukurikije imibare y’inganda, igipimo cy’ubusembwa bw’ibipfunyika bya wafer giterwa n’ibibazo by’ubushyuhe gishobora kuba kiri hagati ya 10% na 15%, bikaba ikintu cy’ingenzi kibuza iterambere ryiza kandi ry’inganda zikora ibikoresho bya semiconductor.

Ibyiza byihariye by'ishingiro rya granite
Ingano nto y’ubushyuhe: Granite igizwe ahanini na kristu nka quartz na feldspar, kandi ingano yayo y’ubushyuhe ni nto cyane, muri rusange iri hagati ya 0.6 na 5 × 10⁻⁶/℃, ikaba yegereye cyane iya silicon chips. Iyi miterere ituma mu gihe cyo gukoresha ibikoresho byo gupfunyika bya wafer, nubwo haba hari ihindagurika ry’ubushyuhe, itandukaniro mu kwaguka k’ubushyuhe hagati y’ishingiro rya granite n’imashini n’ibikoresho byo gupfunyika rigabanuka cyane. Urugero, iyo ubushyuhe buhindutseho 10℃, itandukaniro ry’ingano y’urutonde rw’ibikoresho byo gupfunyika rwubatswe ku ishingiro rya granite rishobora kugabanukaho ibirenze 80% ugereranije n’ishingiro rya gakondo ry’icyuma, ibyo bigabanya cyane ubushyuhe buterwa no kwaguka no guhindagurika k’ubushyuhe, kandi bigatanga ibidukikije bihamye byo gushyigikira wafer.
Ubushyuhe buhamye cyane: Granite ifite ubushyuhe buhamye cyane. Imiterere yayo y'imbere ni minini, kandi kristu zifatanye neza binyuze mu migozi ya ionic na covalent, bigatuma ubushyuhe bugenda buhoro imbere. Iyo ibikoresho byo gupakira binyura mu bihe bigoye by'ubushyuhe, ishingiro rya granite rishobora gukumira ingaruka z'impinduka z'ubushyuhe ubwaryo no kugumana ubushyuhe buhamye. Igerageza rikenewe ryerekana ko munsi y'impinduka zisanzwe z'ubushyuhe bw'ibikoresho byo gupakira (nka ± 5℃ ku munota), ihindagurika ry'ubushyuhe bw'ubuso bw'ishingiro rya granite rishobora kugenzurwa muri ± 0.1℃, hirindwa ikintu cy'ubushyuhe bukabije buterwa n'itandukaniro ry'ubushyuhe bw'aho hantu, kwemeza ko wafer iri ahantu hamwe kandi hahamye mu gihe cyose cyo gupakira, no kugabanya isoko ry'ubushyuhe bukabije.
Gukomera cyane no kudakomera: Mu gihe cy'ikoreshwa ry'ibikoresho byo gupfunyika bya wafer, ibice byimuka imbere mu byuma (nk'amamoteri, ibikoresho byo kohereza, nibindi) bizatera guhindagurika. Iyo ibyo bihindaguritse byoherejwe muri wafer, bizongera kwangirika guterwa n'ubushyuhe kuri wafer. Ishingiro rya granite rifite ubukana bwinshi n'ubukana burenga ubw'ibikoresho byinshi by'icyuma, bishobora kurwanya kubangamira guhindagurika kw'inyuma. Hagati aho, imiterere yaryo yihariye imbere iratanga ubushobozi bwiza bwo kudakomera kandi ikayifasha gusohora ingufu zo guhindagurika vuba. Amakuru y'ubushakashatsi agaragaza ko ishingiro rya granite rishobora kugabanya guhindagurika kwa frequency (100-1000Hz) guterwa n'imikorere y'ibikoresho byo gupfunyikaho ku kigero cya 60% kugeza kuri 80%, bigabanya cyane ingaruka zo guhuza guhindagurika no guhungabana k'ubushyuhe, kandi bigakomeza kwemeza ko gupfunyika kwa wafer ari ingirakamaro kandi kwizerwa cyane.
Ingaruka zo gushyira mu bikorwa mu buryo bufatika
Mu ikorwa ry’ibikoresho byo gupakira bya wafer by’ikigo kizwi cyane gikora ibikoresho bya semiconductor, nyuma yo gushyiraho ibikoresho byo gupakira bifite ishingiro rya granite, hagezweho ibikorwa bitangaje. Hashingiwe ku isesengura ry’amakuru y’igenzura rya wafer 10.000 nyuma yo gupakira, mbere yo gukoresha ishingiro rya granite, igipimo cy’inenge cya wafer cyatewe n’ubushyuhe cyari 12%. Ariko, nyuma yo guhindura ishingiro rya granite, igipimo cy’inenge cyaragabanutse cyane kigera kuri 3%, kandi igipimo cy’umusaruro cyariyongereye cyane. Byongeye kandi, ibizamini by’igihe kirekire by’ubwirinzi byagaragaje ko nyuma y’amasaha 1.000 y’ubushyuhe bwinshi (125℃) n’ubushyuhe buke (-55℃), umubare w’intege nke za solder za chip zishingiye ku ipaki ya granite wagabanutseho 70% ugereranije n’ipaki isanzwe, kandi imikorere ya chip yarushijeho kuba myiza cyane.

Uko ikoranabuhanga rya semiconductor rikomeza gutera imbere rigana ku buziranenge bwo hejuru no ku bunini buto, ibisabwa mu kugenzura ubushyuhe mu gupakira wafer birimo kugenda birushaho gukomera. Ishingiro rya granite, hamwe n'inyungu zaryo zose mu kwaguka k'ubushyuhe buke, kudahungabana k'ubushyuhe no kugabanya gutigita, byabaye amahitamo y'ingenzi mu kunoza ireme ry'udupfunyika twa wafer no kugabanya ingaruka z'ubushyuhe. Birimo kugira uruhare runini mu gutuma inganda za semiconductor zitera imbere mu buryo burambye.