Ihuriro rya granite, nkigikoresho cyifashishwa mu gupima no gutunganya neza, kubungabunga neza bigira ingaruka ku bwiza bw’umusaruro. Ibikurikira bitanga gahunda ihamye yo kubungabunga ibidukikije ikubiyemo kubungabunga ibidukikije, kubungabunga buri munsi hamwe na kalibrasi yabigize umwuga kugirango porogaramu ikomeze kumenya neza urwego rwa nanometero igihe kirekire.
1. Kugenzura ibidukikije: Kubaka inzitizi yo kurinda neza
Gucunga ubushyuhe n'ubushuhe
Ubushyuhe bwibidukikije bukora bugomba guhagarara kuri 20 ± 1 ℃. Buri 1 ℃ ihindagurika rizatera ihindagurika ryumuriro wa granite kuri 0.5-1μm / m. Sisitemu yubushyuhe burigihe irashobora gushyirwaho mumahugurwa kugirango wirinde guhumeka neza guhita kuri platifomu.
Ubushuhe bugomba kugenzurwa hagati ya 40% na 60%. Ubushuhe bukabije burashobora gutera ingese kubice byicyuma, mugihe ubuhehere buke bushobora gutuma amashanyarazi ahagarara mugupima.
Kwigunga
Ihuriro rigomba kuba kure yisoko ryinyeganyeza nkimashini zitera kashe hamwe nimashini zisya. Birasabwa gukomeza intera irenga metero 3 uvuye mubikoresho byo kunyeganyega.
Niba kunyeganyega bidashobora kwirindwa, ibyuma byangiza ikirere bishobora gushyirwaho munsi yikibuga kugirango bigabanye ingaruka ziterwa n’ibidukikije ku buso bwa platifomu (bishobora kugabanya kunyeganyega hanze kurenga 80%).
2. Kubungabunga buri munsi: Igenzura ryitondewe kuva isuku ukarinda
Ibisobanuro byogusukura hejuru
Kurandura umukungugu: Ihanagura hejuru hamwe nimpu cyangwa umwenda utagira linti mucyerekezo kimwe buri munsi kugirango wirinde ivumbi (≥5μm) gushushanya urubuga. Ikirangantego cyinangiye gishobora guhanagurwa buhoro hamwe na Ethanol ya anhydrous (ubuziranenge ≥99.7%). Umuti ukomeye nka acetone ntugomba gukoreshwa.
Gutesha agaciro: Niba ihuye n’amavuta y’amavuta, ihanagure hamwe n’isuku idafite aho ibogamiye, hanyuma kwoza amazi ya deioniyoyasi hamwe n’umwuka wumuyaga kugirango wirinde amavuta y’amabuye y'agaciro kwinjira mu byobo bito bya platifomu.
Kurinda umutwaro no kugongana
Ubushobozi bwo kwikorera imitwaro ya platifomu bugomba kugenzurwa muri 70% yumutwaro wagenwe (urugero, kumurongo wa 1000 kg, birasabwa ko umutwaro waba 00700kg) kugirango wirinde ihinduka rihoraho riterwa nuburemere bwaho.
Birabujijwe rwose gukubita ibihangano kumurongo. Mugihe ukoresha ibikoresho, ambara uturindantoki tworoshye kugirango wirinde ibintu bikarishye gutaka hejuru (gushushanya bifite ubujyakuzimu burenze 20 mm bizagira ingaruka ku gupima inzira yumucyo ugaragara).
3. Calibration yabigize umwuga: Intandaro yubuhanga bwo kubungabunga ukuri
Kugena ibihe
Ikoreshwa risanzwe: Hindura inshuro imwe buri gihembwe hanyuma ukoreshe laser interferometero kugirango umenye neza (hamwe na ± 0.5μm / m).
Gukoresha inshuro nyinshi cyangwa ibidukikije bikaze: Calibration ya buri kwezi, hibandwa ku kugenzura ahantu hitawe n'ubushyuhe (nk'uruhande rwa platifomu hafi y'amasoko y'ubushyuhe).
Gutunganya nyuma ya kalibrasi
Niba gutandukana kwa tekinike bibonetse (nka> ± 1μm / m), bigomba kuba hasi kandi bigasanwa numutekinisiye wabigize umwuga ukoresheje ifu ya mikoro ya W1.5. Kwisya hamwe na sandpaper birabujijwe rwose.
Nyuma ya kalibrasi, amakuru agomba kwandikwa no kubikwa, kandi hagomba gushyirwaho umurongo wukuri wo kugereranya umurongo kugirango utegure ibisabwa mbere yo kubungabunga.
4. Kubika no Gutwara: Irinde gutakaza neza
Ingingo z'ingenzi zo kubika igihe kirekire
Iyo ubitse, bigomba kuba bitwikiriwe nubushuhe kandi butagira umukungugu. Hasi igomba gushyigikirwa ningingo eshatu (ingingo yo gushyigikira iherereye kuri 2/9 byuburebure bwa platifomu) kugirango hirindwe ihinduka ryunamye ryatewe nuburemere (urubuga rwa metero 1 rushobora kugabanuka kuri 0.3μm bitewe nigihe kirekire cyo gushyigikira ingingo imwe).
Himura umwanya wibikoresho bya platform buri gihe (buri kwezi) kugirango wirinde igitutu cyigihe kirekire.
Gahunda yo kurinda ubwikorezi
Gutwara intera ngufi: Gupfunyika ifuro ikurura ifuro, ikosore muburyo bukomeye, kandi ukomeze kwihuta muri 2g.
Gutwara intera ndende: Igomba kuba yuzuye vacuum kandi yuzuye azote yumye. Nyuma yo kuhagera, bigomba gusigara bihagaze kumasaha 24 kugeza igihe ubushyuhe bugeze kuringaniza mbere yo gupakurura kugirango birinde amazi ya kondegene kugira ingaruka ku kuri.
5. Guhanura Amakosa: Uburyo bwo Kumenya Ibibazo Byambere
Igenzura rigaragara: Buri gihe witegereze hejuru hamwe nikirahure cya 40x. Niba ibishushanyo bikomeza cyangwa igabanuka ryinshi ryurumuri bibonetse, birashobora kwerekana kugabanuka kwukuri.
Kumenya amajwi: Kanda kuri platifomu witonze. Niba amajwi ahindutse urusaku (mubisanzwe bigomba kuba ijwi risobanutse), hashobora kuba micro-crack imbere. Hagarika kuyikoresha ako kanya kugirango umenye.
Binyuze muri ubu buryo bwo kubungabunga, urubuga rwa ZHHIMG® granite rushobora kugumana uburebure bwa ± 1μm / m mu myaka 10, rukaba rurenze inshuro eshatu kurenza ubuzima bwuzuye bwibibuga bitabitswe neza. Imyitozo yerekanye ko nyuma y’uruganda runaka rwa semiconductor rwemeje iki gisubizo, inshuro za kalibrasi ya platifomu yagabanutseho 50%, kandi amafaranga yo kubungabunga buri mwaka yazigamye amafaranga arenga 150.000.
Igihe cyo kohereza: Jun-18-2025