Mu byumba bituje bya laboratwari zo gupima, ibyumba byo gusukura bya semiconductor, n'ibyumba byo gupima ikirere, hari impinduka itunguranye irimo gukorwa. Ntabwo iyobowe na porogaramu cyangwa sensa gusa—ahubwo iyobowe n'ibikoresho nyine bigize ishingiro ry'ibipimo ubwabyo. Ku isonga ry'iri hinduka hari ibikoresho bipima bya keramike bigezweho, birimo icyuma gipima umwuka ugororotse cya keramike na silicon-carbide ikora neza cyane (Si-SiC) ifite imiyoboro imeze nk'iy'impande zombi. Ibi si ibikoresho gusa; ni ibikoresho bitanga imbaraga mu gihe gishya aho gutuza, gusubiramo, no kutagira aho bibogamira mu bushyuhe bidashoboka kuganirwaho.
Mu gihe kirenga mirongo itanu cy'ikinyejana, granite y'umukara yiganjemo ubuziranenge bw'ibipimo. Ubushyuhe bwayo busanzwe, kwaguka kwayo mu bushyuhe buke, no kuba igorofa nziza byatumye iba ibikoresho byo gukoresha ku masahani yo hejuru, kare, no ku nkengero zigororotse. Nyamara uko inganda zigenda zishyira imbaraga mu gupima ibintu bito ndetse na nanometero—cyane cyane muri lithography ya semiconductor, space optics, na quantum computing—imbogamizi za granite zarushijeho kugaragara. Iremereye, ishobora kwangirika mu buryo bukabije iyo ikozeho kenshi, kandi, nubwo ivugwaho byinshi, iracyagaragaza ko ihora ihindagurika mu gihe kirekire bitewe n'umutwaro cyangwa ibidukikije.
Injira mu bikoresho bya keramike byakozwe mu buryo bwa tekiniki: ntabwo ari ibikoresho byoroheje byo mu bitekerezo bya buri munsi, ahubwo ni ibikoresho binini, bihuye, bikora neza cyane bikozwe mu bushyuhe bwinshi n'umuvuduko. Muri ibyo, hari ubwoko bubiri bugaragara mu gukoresha ibipimo: alumina yo mu rwego rwo hejuru (Al₂O₃) na carbide ya silikoni iboheshejwe na reaction-bonded (Si-SiC). Nubwo byombi bitanga impinduka zikomeye ugereranyije n'ibikoresho gakondo, bigira uruhare rutandukanye—kandi byose hamwe, bigaragaza imbaraga zigezweho mu bipimo bishoboka mu bipimo.
Urugero, fata inyuguti ya ceramic air straight ruler. Yagenewe gukoreshwa hamwe n'ibice bitwara umwuka cyangwa interferometers z'amajwi, iki gikoresho gisaba imiterere ihamye, uburemere buke, kandi nta bushyuhe buturukaho. Ishingiye kuri aluminaimirongo y'ibumba—byakozwe mu buryo bworoshye no kugororoka muri ± 0.5 µm hejuru ya mm 500 kandi bigashyirwa ku bushyuhe buri munsi ya Ra 0.02 µm—bitanga neza neza. Ubucucike bwabyo buke (~ 3.6 g / cm³) bugabanya ubushyuhe mu buryo bwo gupima ibintu, mu gihe imiterere yabyo idakoresha ingufu za rukuruzi, idakoresha ingufu za rukuruzi ikuraho ingaruka mbi mu bidukikije by’ikoranabuhanga cyangwa rukuruzi. Mu bikoresho byo kugenzura wafer cyangwa se uburyo bwo gupima laser, aho na micron y’umuheto ishobora guhindura ibisubizo, icyuma gikoresha umwuka wa keramik gitanga icyerekezo gihamye kandi kidakoresha ingufu cyagumaho mu gihe cy’ihindagurika ry’ubushyuhe n’imikorere.
Ariko iyo hakenewe ubukana bukomeye n'ubushobozi bwo gutwara ubushyuhe—nk'uko bigenda mu miterere y'indorerwamo ya telesikope yo mu kirere cyangwa metrologiya ya laser ifite imbaraga nyinshi—abahanga bahindukirira ibice bya silikoni-karubide (Si-SiC) bifite ubushobozi bwo gutwara ibintu mu buryo buhanitse kandi bungana na kare. Si-SiC iri mu bikoresho bikomeye bizwi cyane, aho modulus ya Young irenga 400 GPa—ikubye inshuro zirenga eshatu iz'icyuma—kandi uburyo bwo gutwara ubushyuhe bungana na aluminiyumu. Icy'ingenzi ni uko coefficient of thermal expansion (CTE) yayo ishobora guhindurwa kugira ngo ihuze n'iy'ibirahuri by'urumuri cyangwa silicon wafers, bigatuma habaho kwaguka kwa hafi ya zero mu matsinda ya hybrid. Si-SiC square ikoreshwa nk'icyitegererezo cy'ingenzi mu gikoresho cya EUV lithography ntizakomeza kuba imiterere yayo gusa—izarwanya cyane guhindagurika kw'ubushyuhe cyangwa guhindagura.
Igituma ibi bigerwaho si ibikoresho gusa, ahubwo ni ubuhanga mu gukora ibikoresho bipima ibumba. Urugero, gukora neza Si-SiC bisaba amapine ya diyama, platforme za CNC za sub-micron, hamwe n'ibikorwa byinshi byo gusimbuza ipamba bikorwa mu bidukikije bigenzurwa n'ubushyuhe. Ndetse n'imihangayiko mito ikomoka ku gusimbuza ibintu mu buryo butari bwo ishobora gutuma habaho gusimbuza ibintu nyuma y'ibumba. Niyo mpamvu inganda nke zo ku isi zihuza gusa ibikoresho, gukora neza, na metrology ya nyuma munsi y'ikintu kimwe—ubushobozi butandukanya abakora metrology nyabo n'abatanga metrology rusange.
Muri ZHONGHUI INTELLIGENT MANUFACTURING (JINAN) GROUP CO., LTD (ZHHIMG), iyi gahunda yo guhuza ibintu ihagaze ni ingenzi mu ntego zacu. Ibikoresho byacu byo gupima ibikoresho bya ceramic—harimo ceramic air straight ruler models zemejwe na DIN 874 Grade AA hamwe na high precision silicon-carbide (Si-Si-C) parallelepipe artifacts na square artifacts zishobora gukurikiranwa hakurikijwe amahame ya PTB na NIST—bikorerwa mu byumba byo gusukura bya ISO Class 7 hakoreshejwe uburyo bwihariye bwo gusinya no kurangiza. Buri gice cyose gikorerwa igenzura ryuzuye rya interferometric, igenzura rya CMM ry’ubushobozi bwo kwihanganira ibintu (flatness, parallelism, perpendicularity), n’igeragezwa ry’ubuziranenge bw’ubuso mbere yo koherezwa. Ibisubizo ni ikintu cy’icyitegererezo kitujuje ibisabwa gusa—kirabirenga buri gihe mu byiciro.
Ubusabe bw'imikorere nk'iyi buri kwiyongera. Mu nganda zikora ibikoresho bya semiconductor, EUV na sisitemu za lithography za NA nyinshi zisaba imiterere ihamye kugeza kuri nanometero icumi mu ntera ya metero imwe - ntibishoboka hatabayeho guhuza ubushyuhe na mekanike bya Si-SiC. Mu kirere, intebe z'ikoranabuhanga za satelite optique zikozwe mu byuma bipima ubushyuhe zituma habaho ubusugire bw'ikirere nubwo ubushyuhe bukabije buzenguruka. Ndetse no mu nzego zirimo kuzamuka nko kumenya umuraba cyangwa iterambere ry'isaha ya atome, aho ubusugire bw'urwego rwa picometer ari ingenzi, ibikoresho bya ceramic na Si-SiC metrology birimo kuba ingenzi cyane.
Mu by’ingenzi, ibi bikoresho binareba uburyo bwo kuramba no gukoresha umutungo wose. Nubwo ishoramari rya mbere mu gikoresho cya silikoni-carbide parallelepipe gifite ubuhanga buhanitse rishobora kurenza iry’igikoresho kingana na granite, igihe cyacyo cyo gukora gishobora kuba kirekire inshuro 5-10 mu bidukikije bikoreshwa cyane. Ntigisaba amavuta, ntikirwanya ibintu byose bisanzwe bishongesha na plasma, kandi ntikigera gikenera kongera gupimwa bitewe no kwinjiza amazi mu buryo busanzwe—bitandukanye n’icyuma cyashongeshejwe cyangwa ndetse na granite zimwe na zimwe. Ku bashinzwe ubuziranenge bakora hakurikijwe AS9100, ISO 13485, cyangwa ibipimo bya SEMI, uku kwizerwa bivuze ko igihe cyo gukora kigabanuka, ibyavuye mu igenzura bike, no kugira icyizere kinini ku bakiriya.
Byongeye kandi, ubwiza n'imikorere y'ibi bikoresho ntibikwiye kwirengagizwa. Ikarito ya Si-SiC irabagirana cyane kandi irabagirana nk'icyuma ariko ipima ibiro bike ugereranyije n'icyuma. Ikarito y'umwuka igororotse ya ceramic yumva ikomeye ariko irazamuka nta nkomyi—ni nziza cyane mu kugenzura intoki ahantu hato. Iyi mico ishingiye ku muntu ni ingenzi muri laboratwari aho imiterere n'uburyo bworoshye bwo kuyikoresha bigira ingaruka ku mikorere ya buri munsi.
None se, ibikoresho bipima ceramic birimo kuvugurura uburyo bipima neza cyane? Igisubizo kiri mu makuru—no mu rutonde rw’abayobozi b’isi bakomeza kwiyongera ubu bakaba babivuga nk’ibisanzwe. Kuva ku bigo by’igihugu bipima imiterere y’ibipimo byemeza ibipimo ngenderwaho by’uburebure bw’igisekuru gitaha kugeza ku batanga serivisi zo mu cyiciro cya mbere bemeza ibice bya EV drivetrain, impinduka iragaragara: iyo gushidikanya bigomba kugabanuka, abahanga mu by’imashini biringira ceramics zakozwe mu buryo bwa tekiniki.
Kandi uko inganda zikomeza urugendo rwazo rudacogora rugana ku kugenzura ubunini bwa atome, ukuri kumwe kurahinduka: ahazaza ho gupima ntabwo hazacukurwa mu mabuye cyangwa ngo hakoreshwe mu cyuma. Bizacukurwa, bigasenywa, kandi bigasenwa muri ceramic na silicon carbide.
ZHHIMG INTELLIGENT MANUFACTURING (JINAN) GROUP CO., LTD (ZHHIMG) ni ikigo cy’ikoranabuhanga kizwi ku isi hose mu gupima ibintu mu buryo bugezweho bwa keramike na silicon-carbide. Ifite ubuhanga mu gupima ibikoresho bya keramike, ceramic air straight ruler, hamwe na silicon-carbide (Si-SiC) ifite uburyo bwo gukora ibintu mu buryo bugezweho kandi bungana na kare, ZHHIMG itanga ibikoresho byemewe kandi byemewe muri laboratwari ku bikoresho bya semiconductor, aerospace, ubwugarizi, n’ubushakashatsi bwa siyansi. Ibifashijwemo na ISO 9001, ISO 14001, na CE certifications, ibicuruzwa byacu byizewe n’ibigo bikomeye by’ikoranabuhanga ku isi. Suzuma urutonde rwacu rwa kera rwa metrology kuriwww.zhhimg.com.
Igihe cyo kohereza: Ukuboza-05-2025