Mu rwego rwo gukora neza inganda no gukora ubushakashatsi bugezweho bwa siyanse, urubuga rwa granite hamwe n’imikorere myiza y’imitingito rwabaye ibikoresho by'ingenzi kugira ngo iterambere ryorohewe ry'ibikorwa bitandukanye bihanitse. Igipimo cyacyo gikomeye cyerekana ibipimo bitanga garanti yizewe mubikorwa byinshi byunvikana cyane kunyeganyega.
Ubwa mbere, ishingiro ryerekana igipimo cyerekana umutingito urwego rwa granite
Ibiranga ibintu: platform ya Granite ikozwe muri granite karemano, nyuma yimyaka miriyoni yimikorere ya geologiya, imiterere ya kirisiti yimbere itunganijwe neza kandi irasa cyane. Iyi miterere idasanzwe iha granite igipimo gito cyane cyimpinduka ya modulike ihindagurika, mugihe ihuye nikibazo, ugereranije nibindi bikoresho bisanzwe nkicyuma, irashobora kugenzura ihindagurika ryayo muburyo buto. Ukurikije icyemezo cy’ibigo byemewe byo gupima, guhindura imiterere ya granite mu buryo busanzwe bwo gupima ibizunguruka ni 1 / 10-1 / 20 gusa by’ibikoresho bisanzwe by’icyuma, bitanga umusingi ukomeye w’ibikorwa byo mu rwego rwo hejuru by’imitingito.
Igishushanyo mbonera: Uhereye ku miterere ya macro, urubuga rwa granite rwashizweho hamwe na geometrike nziza kandi igashyigikira imiterere. Igipimo rusange cy'uburebure-ubugari-burebure bwa platifomu ibarwa neza kugirango harebwe ikigo gihamye cyogukurura imbaraga no kugabanya ibyago byo kunyeganyezwa biterwa no kunyeganyega. Muri icyo gihe, gukwirakwiza ingingo zingoboka byateguwe mubuhanga hakurikijwe amahame yubukanishi, bushobora gukwirakwiza uburemere bwibintu byashyizwe kumurongo hamwe ningaruka zingaruka ziterwa no kunyeganyega hanze. Kurugero, murwego runini rwa granite, imiterere yingingo zingoboka zikoreshwa, kandi ikosa ryintera hagati yingingo zifatika zegeranye rigenzurwa muri ± 0.05mm, birinda neza guhangayikishwa n’ibanze kandi bikarushaho kunoza ubushobozi bw’ibiza bya platifomu.
2. Ibipimo birambuye hamwe nibisabwa muri buri rwego ruterekana ihungabana
Urwego rwa I ihungabana-risanzwe (ultra-high precision ibisabwa ssenarios)
Icyerekezo cyo kwimura icyerekezo: Muburyo bwikigereranyo cyikigereranyo cya seisimike yikigereranyo cyinyeganyeza (0.1Hz-100Hz), agaciro keza ko kwimuka kwinyeganyeza kumwanya uwariwo wose kuri platifomu nturenza 0.001mm. Iyo ihindagurika rito ryatewe no gukora imashini nini zikikije (nko kunyeganyeza igikoresho cyimashini iremereye kuri frequence ya 1Hz-10Hz) kibangamiwe, ibikoresho byo gupima optique yo mu rwego rwo hejuru byashyizwe kuri platifomu, nka microscopi yingufu za atome, ihinduka ryimuka ryimuka hagati yipima ryapimwe nicyitegererezo cyapimwe ntirisanzwe, byemeza ko gupima neza kuri nanoscale.
Ikoreshwa rya progaramu: Ikoreshwa cyane mubikorwa bya lithographie yo gukora chip ya semiconductor. Gukora chip bisaba ubunyangamugayo buhanitse cyane, kandi ubugari bwumurongo bugeze kurwego rwa nanometero. Mubikorwa bya lithographie, platform ya granite ikeneye gutanga inkunga ihamye kumashini ya lithographie, gutandukanya vibrasiya iterwa no gukoresha ibindi bikoresho mumahugurwa, kandi ikemeza ko ihererekanyabubasha ryimyandikire yimyandikire, bityo bikazamura cyane umusaruro wogukora chip. Dukurikije imibare y’inganda, ikoreshwa ryumurongo wa chip wujuje urwego rwa mbere rusanzwe rwerekana ihungabana rya granite rwongereye umusaruro 15% -20% ugereranije no gukoresha urubuga rusanzwe.
Urwego rwa 2 rwo kurwanya ihungabana (ibintu bisobanutse neza)
Icyerekezo cyo kwimura icyerekezo: munsi yinyeganyeza ya 0.1Hz-100Hz, ihindagurika ryimpinga yimiterere ya platifomu igenzurwa muri 0.005mm. Kubushakashatsi bwa microscopique buke bwakorewe muri laboratoire yubushakashatsi bwa siyanse muri kaminuza, nko gusikana tunneling microscope (STM), uru rwego rwimikorere idahwitse rushobora kwemeza ko umwanya ugereranije hagati yisonga rya STM nicyitegererezo uhagaze neza kabone niyo haba hari amasoko asanzwe yinyeganyeza nkabakozi bagenda bazenguruka laboratoire nibikoresho bigenda bizenguruka laboratoire. Niyo mpamvu, amakuru ya kwant amakuru yamakuru ya microscopique yafashwe neza, atanga garanti kubashakashatsi kubona amakuru yubushakashatsi nyayo.
Ikoreshwa rya porogaramu: Byakoreshejwe cyane mubikorwa byo murwego rwohejuru rwogukora ibikoresho, nkibikorwa bya elegitoroniki byuzuye byerekana umusaruro. Impirimbanyi za elegitoronike zumva cyane kunyeganyega, ndetse no kunyeganyega bito bishobora gutera gutandukana mubisubizo byo gupima. Ihuriro rya granite, ryujuje urwego rwa kabiri rwerekana ihungabana, rishobora gutanga ibidukikije bihamye kugirango habeho kalibrasi no gutangiza uburinganire bwa elegitoronike, kwemeza ko ibipimo bifatika bipima uburinganire bugera ku rwego rwa microgramu, kandi bigahuza n'inganda zikenewe mu gupima uburemere buke nko kumenya imiti n'imitako.
Inzego eshatu zo guhungabana-zerekana neza (ibintu bisobanutse neza)
Icyerekezo cyo guhindagurika kunyeganyega: murwego rwo kunyeganyega rwa 0.1Hz-100Hz, ihindagurika ryimpinga yimiterere yubuso ntirirenga 0.01mm. Iyo uhuye nikinyeganyeza cyatewe nigikorwa cyibikoresho biciriritse bikunze kugaragara mu mahugurwa y’uruganda (inshuro zinyeganyega muri rusange ni 10Hz-50Hz), ibikoresho bisanzwe byo gupima bishyirwa kuri platifike ya granite, nkigikoresho cyo gupima cooride, birashobora kugumya kumenya neza ibipimo bihamye, kandi gutandukana kwamakuru yapimwe bigenzurwa murwego ruto cyane.
Icyerekezo cyo gusaba: Birakwiriye gupimwa neza mubikorwa byimodoka. Gukora neza kwimashini ya moteri yimodoka, ibyuma byohereza nibindi bice bigira ingaruka kumikorere no kwizerwa kwimodoka. Mu gupima ibi bice, urubuga rwa granite rwibikorwa bitatu bitagira shitingi rushobora gutandukanya neza ibikoresho byamahugurwa bikoresha kunyeganyega, kugirango harebwe niba igikoresho cyo gupima cooride gipima neza ingano yibice, imiterere n’imiterere yihanganira imyanya nibindi bipimo, kugirango bitange inkunga ikomeye yo kugenzura ubuziranenge bwibice byimodoka, kuzamura umusaruro wibice byimodoka.
Icya gatatu, gupima ubuziranenge kugirango harebwe niba urwego rwumutingito rwujuje ubuziranenge
Kugirango tumenye neza ko buri kibanza cya granite gishobora kuba cyujuje ibipimo ngenderwaho bitarwanya umutingito, twashyizeho uburyo bunoze kandi bunoze bwo kugenzura ubuziranenge. Mubikorwa byo kubyaza umusaruro, ikizamini cyumutungo wuzuye gikorerwa kuri buri gice cyibikoresho fatizo bya granite kugirango harebwe niba imiterere yimbere ari imwe kandi nta nenge zigaragara. Nyuma yo gutunganya porogaramu irangiye, ibikoresho bigezweho byo kwigana byifashishwa mu kwigana ibintu bitandukanye bigoye kunyeganyega kugirango bigerageze urubuga. Binyuze mu byerekezo bihanitse bya laser byo kwimura, kugenzura-igihe nyacyo cyo guhindura ihinduka ryimuka rya buri ngingo hejuru yikibuga mugihe cyo kunyeganyega, kandi amakuru yoherezwa muri sisitemu yumwuga yo gutunganya amakuru kugirango isesengurwe. Gusa iyo ibipimo byinyeganyeza byurubuga bihuye neza nuburinganire bwikigereranyo cyo guhungabana, biremewe gushyirwa kumasoko.
Mu ncamake, urubuga rwa granite hamwe nubumenyi bwarwo bwa siyansi yubushakashatsi, imikorere myiza itajegajega no kugenzura ubuziranenge bukomeye, kubikorwa byinganda nubushakashatsi bwa siyanse mubikorwa bihanitse kugirango bitange inkunga ihamye, ni ugukurikirana ukuri kwuzuye kandi kwizewe guhitamo.
Igihe cyo kohereza: Werurwe-28-2025