Ingano za Alumina Ceramic mu gukora Semiconductors: Imyaka 10 y'ubudahangarwa budasanzwe

Mu nganda za semiconductor, aho mikoro imwe ishobora kuba itandukaniro hagati y’itsinda ry’ibintu bitanga umusaruro mwinshi n’ibihenze, guhitamo ibikoresho bya metrology ni ingenzi cyane. Mu gihe lithography na wafer igenzura bisunika imbibi za fiziki, ibyuma gakondo ndetse na granite yo mu rwego rwo hejuru birimo kugera ku iherezo ryabyo.

Alumina Ceramic (Al2O3) yagaragaye nk'igisubizo cy'ukuri ku bakora ibikoresho bya semiconductor. Kubera ko ibikoresho bya semiconductor bishobora kugumana neza kurusha ibikoresho gakondo imyaka irenga 10, ntabwo bikiri iby'agaciro - ni ingenzi mu bwubatsi.

Kuki Alumina Ceramic ikoreshwa mu gukora ibikoresho bya semiconductors?

Mbere yo kwinjira mu bikorwa, ni ngombwa gusobanukirwa imiterere yihariye y'iyi nyandiko "itera ubwoba butatu":

• Guhagarara neza k'ubushyuhe: Ingano nto y'ubushyuhe (≈7 × 10^{-6}/K) ituma ibipimo biguma bihuye nubwo ubushyuhe buterwa n'ibikoresho byihuta cyane.

• Ntikoresha amashanyarazi cyangwa ngo ikoreshwe: Ni ngombwa cyane mu bidukikije bidafite umwuka mwinshi ndetse no mu gupima neza amashanyarazi aho amashanyarazi ashobora kunyuranya n'imirasire y'amashanyarazi.

• Kutagira ingese: Bitandukanye n'ibyuma, ibumba ntirikoresha imiti, bigatuma rihuzwa n'amabwiriza yo gusukura mu cyumba cyo gusukura no mu bidukikije birimo imyuka yangiza.

Ikoreshwa 5 ry'ingenzi mu bikoresho bya semiconductor

1. Ibyiciro by'imashini zikoresha lithography

Fotolithography igezweho isaba gushyira ibintu ku rwego rwa nanometero. Kare za ceramic n'ibice by'imiterere bikoreshwa nk' "icyitegererezo cy'ingenzi" ku cyiciro cya wafer. Igipimo cyazo cyo gukomera cyane ku buremere cyemerera kwihuta vuba nta guhindagurika cyangwa "gucuranga" bifitanye isano n'ibikoresho biremereye.

2. Igenzura rya Wafer na Metrology

Muri sisitemu ya geometrike ya wafer, Ceramic Master Squares ikoreshwa mu gupima imiterere y’imirongo igororotse n’igororotse. Kubera ko Ceramic igumana imiterere yayo mu myaka icumi ishize, izi mashini zikenera imikorere mike cyane yo gupima imiterere yazo, bigatuma zikoresha igihe kinini.

3. Guteranya neza ibyumba by'imyanda

Guteranya ibikoresho bya semiconductor akenshi biba ahantu hadakoreshejwe umwuka aho amavuta aba make. Ibipimo bya semiconductor bitanga icyerekezo cy'ubuziranenge "cyumye" kitazasohora umwuka cyangwa ngo cyanduze umwuka, bigatuma ibice by'imbere bihuzwa n'ubushobozi bwo kwihanganira ibintu bya sub-micron.

4. Isuzuma ry'ikoranabuhanga rikoreshwa inshuro nyinshi

Ku igeragezwa rya chip ryihuse, ikintu icyo ari cyo cyose cya rukuruzi cyangwa igikoresho cyo gupima gishobora guhindura ibisubizo. Imiterere ya alumina ceramic idakurura rukuruzi ituma iba ibikoresho byiza byo gukoresha mu gupima amakarita y’urumuri no mu gupima aho aherereye.

5. Abahanga mu gupima ububiko bw'ibikoresho byo mu cyumba cyo kuruhuka

Mu byumba byo gusukura bya ISO Class 1, ingese ni umwanda ubujijwe. Ibipimo by'icyuma bisaba utwuma tw'amavuta kugira ngo hirindwe ogisijeni, ibyo bikaba ari ingaruka zikomeye ku kwanduza. Ibipimo bya serimini ntibisaba amavuta kandi bishobora gusukurwa na isopropyl alcohol, bigatuma "particles" zigumana "zero-particle" mu gihe cy'imyaka irenga 10.

"Ibyiza by'imyaka 10"

Nubwo ibyuma bishobora guhindagurika cyangwa kwangirika nyuma y'imyaka mike bikoreshwa cyane, imiterere ya molekile ya Alumina ifite isuku nyinshi irahamye cyane. Iyo ikoreshejwe nk'urukiramende rwa Ceramic cyangwa Straight Edge, ubukana bw'icyo gikoresho (cyane cyane n'ubwa safiro) burinda kwangirika k'ubuso bwa mikorosikopi bukunze gutuma "ubuziranenge" bugenda bugabanuka uko igihe kigenda gihita.

Ku isosiyete ikora ibikoresho bya semiconductor, ibi bivuze kugabanuka inshuro 10 kw'ikiguzi cyo kubungabunga igihe kirekire no kwizera urwego rwo hejuru cyane mu gihe cyose cy'imashini.