Impinduramatwara mu guca wafer neza! Nigute ushobora kubungabunga um 5um umwanya wa granite?

Mu ntambara yanyuma ya "nanoprecision" mubikorwa bya semiconductor, niyo ikosa ryoroheje ryibikoresho byo gukata wafer rishobora guhindura chip imyanda. Intangiriro ya granite nintwari itaririmbye igenzura ± 5um isubiramo neza neza, ikandika amategeko yubukorikori bwuzuye nibintu bitatu bitangaje.

"Anchor stabilisation" irwanya ihindagurika ry'ubushyuhe: Coefficient yo kwagura ubushyuhe bwa granite iri munsi ya 5-7 × 10⁻⁶ / ℃, ni kimwe cya gatatu cyibikoresho byibyuma. Mugihe cyubushyuhe buterwa nigikorwa cyihuta cyibikoresho byo gukata wafer, ibikoresho bisanzwe bizahinduka kubera kwaguka kwinshi no kugabanuka, bigatuma imyanya yumutwe uca ihinduka. Nyamara, base ya granite irashobora kuguma "itanyeganyega", ikuraho burundu gutandukana kwimyanya iterwa no guhindura ubushyuhe no gushiraho urufatiro rukomeye rwukuri.

"Inkinzo icecekeye" yo kwinjiza ibinyeganyega: Guhora gutontoma kw'ibikoresho by'imashini no guhora kunyeganyega kw'ibikoresho mu mahugurwa bishobora gufatwa nk '"abicanyi bapfa". Imiterere yihariye ya kirisiti ya granite ni nkibintu bisanzwe bikurura ibintu, bishobora guhindura byihuse ibinyeganyega byo hanze hamwe no kunyeganyega kwa mashini biterwa no gukoresha ibikoresho mumashanyarazi kugirango bisakare. Mugihe ibindi bishingiro bikiri "kunyeganyega" kubera kunyeganyega, base ya granite yashyizeho urubuga ruhamye rwo gutema umutwe ukomeza kugenda, bigatuma ± 5um byukuri bishoboka.

Kurwanya ruswa "Igihome Cy'iteka": Amahugurwa ya Semiconductor yuzuyemo ibintu byangirika nk'ibisubizo byangiza ndetse na aside hamwe na alkali. Mu bidukikije, ibyuma bizagenda byangirika buhoro buhoro. Granite, hamwe nimiterere yihariye ya chimique, ntabwo ikora nibintu byose byimiti. Nubwo imyaka ingahe ikoreshwa, irashobora kugumana ubusugire bwimiterere kandi igakomeza kwemeza gukata neza.

Kuva ku mpano zifatika kugeza kuri ultra-precision gutunganya, granite base yerekanye n'imbaraga zayo ko ibikoresho byose bidashobora guhangana ningorane zikomeye zogukora inganda. Ni ukubera neza kubera ibyiza nyaburanga bidasubirwaho niho base ya granite yabaye urufunguzo rwibikoresho byo gutema wafer kugirango igere ku mwanya wa ± 5um, kandi byanatumye inganda za semiconductor zikomeza kugenda zerekeza kuri verisiyo ihanitse!