Uburyo 8 busanzwe bwo gukoresha ibice bya Precision Granite mu bikoresho bya Semiconductor

Mu nganda za semiconductor, aho "nanometer" ari cyo gipimo gisanzwe, ubusugire bw'imiterere y'ibikoresho ntibushobora kuganirwaho. Uko utudomo twa chip tugabanuka kugera kuri 5nm no hejuru, icyifuzo cyo kudakomeza guhindagurika no kudahungabana k'ubushyuhe kigera ku rwego rukabije. Ibice bya granite byahindutse biva ku kuba amahitamo meza cyane bijya ku "DNA" y'ingenzi y'ibikoresho bya semiconductor.

Nk’umutanga ibikoresho bikomeye kandi bihamye, ZHHIMG® isesengura ibikoresho umunani by’ingenzi aho granite ari yo ntwari y’ubuhanga.

1. Imashini zikoreshwa mu gushushanya

Imashini ya lithography ni yo ikora cyane mu muyoboro wa semiconductor. Ishingiro rigomba gushyigikira sisitemu nini z'urumuri mu gihe riguma rituje neza. Ubucucike bwinshi bwa Granite n'ubudahangarwa bw'imbere bituma ishobora gufata imitingito mito iva mu bidukikije, bigatuma urumuri ruguma ku rwego rwa atome.

2. Ibyiciro byo kugenda kw'umwuka

Gutwara wafer yihuta cyane bisaba kugenda nta gukururana. Kubera ko granite ishobora gufatirwa ku gice cyo hasi cya micron, ikora nk'umufatanyabikorwa mwiza mu ikoranabuhanga ryo gutwara umwuka. "Umusego w'umwuka" unyura hejuru y'ubuso bwa granite nta kwangirika, bigatuma habaho kugenda neza cyane gukenewe mu gusesengura no gushyira ahantu.

3. Uburyo bwo kugenzura no gupima imiterere y'ibicuruzwa (Wafer Inspection & Metrology Platforms)

Nyuma yo gukata, wafer zigomba gusuzumwa niba nta nenge zifite. Ubushyuhe ubwo aribwo bwose bwagutse mu gitereko cy'imashini bwatuma habaho "igihamya cy'ibinyoma" cyangwa inenge yabuze.Ibice bya granite by'umwimereregutanga ahantu hatarangwa ubushyuhe bwinshi, bireba neza ko amakuru y’igenzura agaragaza neza ubuso bwa wafer, atari uko imashini yahinduye isura.

4. Sisitemu zo Kugenda za Gantry (Imiterere y'Ibiraro)

Mu gukata cyangwa guhuza insinga ku muvuduko mwinshi, "ikiraro" cyangwa gantry bigomba kugenda vuba bidatinze. Gantry ya granite itanga igipimo cyo gukomera ku bunini ugereranije n'icyuma gishongeshejwe, bigabanya cyane "igihe cyo gutuza" - igihe imashini igomba gutegereza ko imitingito ihagarara mbere yuko ikora akazi kayo gakurikiraho.

5. Amafuremu y'ibikoresho byo gusana laser

Iyo habonetse inenge kuri mask cyangwa wafer, laser zikoreshwa mu gusana neza. Ibi bisaba urufatiro rw'imiterere rudakoresha ingufu za rukuruzi kandi rudakoresha ingufu za rukuruzi. Granite irinda ubushyuhe bw'amashanyarazi mu buryo busanzwe, ikarinda ko amashanyarazi yangiza inzira ya laser yoroshye.

6. CMM (Imashini zipima hamwe) zo mu byumba by'isuku

Igenzura ry’ubuziranenge mu kigo cya semiconductor risaba CMM zishobora kwihanganira amabwiriza akomeye yo gusukura. Bitandukanye n’icyuma, gishobora gusohora uduce cyangwa oxidize, granite irinda aside kandi ntishobora kwangiza, ikomeza imiterere y’ibikoresho bihamye kandi bidahumanya ibidukikije.

7. Ibyuma byo gusiga irangi ry'ubutabire (CMP)

Uburyo bwa CMP bukoresha urusenda n'ibintu bihumanya ikirere cyane ku byuma. Kuba Granite irwanya ibidukikije bituma iba ibikoresho byiza cyane ku rufatiro rw'ibikoresho byo gusiga irangi, bigatuma iramba ndetse no mu bidukikije bikomeye.

8. Sisitemu zo Gutera Ion

Ahantu hafite amashanyarazi menshi mu byuma bitera amashanyarazi bisaba ibice bitabangamira imirasire ya ion cyangwa ngo bikore amashanyarazi ahuza. Imiterere ya Granite ituma iba amahitamo meza kandi ahamye yo gushyiraho ibikoresho by’amashanyarazi n’iby’amashanyarazi bidafite amashanyarazi.

Kuki ZHHIMG® ikoreshwa mu bikorwa remezo bya semiconductor?

Muri ZHHIMG®, twumva ko ibikoresho bya semiconductor fatizo atari agace k'ibuye gusa—ni igikoresho gipima neza. Granite yacu yihariye y'umukara, hamwe n'ubuhanga bwacu bw'imyaka irenga 30 mu gusya hakoreshejwe intoki, bidufasha kugera ku manota yo kugorora no gupima ingano yujuje ibisabwa bikomeye byo mu gihe cya sub-micron.

• Ibikoresho: Granite y'umukara ya ZHHIMG® ifite ubucucike bwinshi, ifite ibara ryiza cyane.

• Uburyo bwo gukora neza: Ingano z'ubuziranenge hakurikijwe DIN 876 Grade 00 cyangwa ibisobanuro bya JIS/ASME byihariye.

• Guhindura: Ibyuma bishyirwamo ibikoresho, imiyoboro ya T, n'inzira zitwara umwuka byashyizwe mu iduka ryacu rya metero kare 10,000 rikoresha ubushyuhe budahinduka.